Guided-mode resonant Brewster filter consisting of two homogenous layers and a single grating with an equal refractive index

In this paper,a new type of resonant Brewster filter(RBF) consisting of two homogenous layers and a single grating with an equal refractive index is presented.The properties are studied by using the plane waveguide method(PWM) and rigorous coupled-wave analysis(RCWA).It is found that the variation of the grating thickness does not effectively change the position of the resonant wavelength,however it has a remarkable effect on the line width,and the resonant peak can be adjusted back to its original position by slightly tuning the grating period.Moreover,by simultaneously tuning the thicknesses of the homogeneous layers above and beneath the grating structure,multiple channels can also be obtained when the RBF is illuminated at the Brewster angle calculated with the effective medium theory(EMT) of subwavelength grating.The adjacent optical thickness for acquiring the multiple channels is about three-quarters of the resonant wavelength.Furthermore,it is demonstrated that the line width at the operating resonant wavelength can be appreciably narrowed by tuning the thickness of the homogenous layer to its corresponding thickness without fine tuning the grating period or the thickness.Therefore,it is very useful for designing filters with different line widths at the desired wavelength.In addition,it is shown from our calculations that the symmetrical line feather can be obtained if the total optical thickness for the homogeneous layer meets the special condition.     

高准确度多功能激光直写装置

采用高数值孔径物镜和高准确度纳米平台搭建了一台激光直写装置,可以在光敏感薄膜材料上进行打点、刻画矢量和标量图形等多种操作,其最小特征尺寸小于300 nm,重复性5 nm.在刻写前准确标定刻写激光功率,刻写过程中采用象散法精确自动聚焦,刻写完成后采用两种不同波长的激光束探测样品的透过率和反射率的细微变化,最终实现了高准确度亚微米图形的刻写和检测.     

Guided-mode resonant Brewster filter consisting of two homogenous layers and a single grating with an equal refractive index

In this paper, a new type of resonant Brewster filter (RBF) consisting of two homogenous layers and a single grating with an equal refractive index is presented. The properties are studied by using the plane waveguide method (PWM) and rigorous coupled-wave analysis (RCWA). It is found that the variation of the grating thickness does not effectively change the position of the resonant wavelength, however it has a remarkable effect on the line width, and the resonant peak can be adjusted back to its original position by slightly tuning the grating period. Moreover, by simultaneously tuning the thicknesses of the homogeneous layers above and beneath the grating structure, multiple channels can also be obtained when the RBF is illuminated at the Brewster angle calculated with the effective medium theory (EMT) of subwavelength grating. The adjacent optical thickness for acquiring the multiple channels is about three-quarters of the resonant wavelength. Furthermore, it is demonstrated that the line width at the operating resonant wavelength can be appreciably narrowed by tuning the thickness of the homogenous layer to its corresponding thickness without fine tuning the grating period or the thickness. Therefore, it is very useful for designing filters with different line widths at the desired wavelength. In addition, it is shown from our calculations that the symmetrical line feather can be obtained if the total optical thickness for the homogeneous layer meets the special condition.     

高准确度多功能激光直写装置

采用高数值孔径物镜和高准确度纳米平台搭建了一台激光直写装置,可以在光敏感薄膜材料上进行打点、刻画矢量和标量图形等多种操作,其最小特征尺寸小于300 nm,重复性5 nm.在刻写前准确标定刻写激光功率,刻写过程中采用象散法精确自动聚焦,刻写完成后采用两种不同波长的激光束探测样品的透过率和反射率的细微变化,最终实现了高准确度亚微米图形的刻写和检测.