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We discuss the characters of two-side tapered waveguides. Then, based on some approximations, a simple but practical and efficient method is developed to design the taper waveguide. The results are compared with other methods in a good agreement. 相似文献
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In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy. 相似文献
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Nano-Traceability Study of a Cr Standard Grating Fabricated by Laser-Focused Atomic Deposition
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A dimensional artifact is developed, which is a chromium (Cr) deposition grating fabricated by a laser-focused atomic deposition technique. The mean pitch of the grating is measured by using a metrological atomic force microscope with a large range, where a series of reference signs have been performed to locate the deposition area. Cosine error of the measurement result is analyzed and eliminated by the iterative angle calibration. The measurement result shows that the mean pitch of the grating is 212.66 ±0.02nm, which is very close to half of the standing laser wavelength (λ = 425.55 nm). This means that the grating has traceability with high accuracy and can substitute the laser interference technology for instrument calibration. Moreover, using the Cr deposition grating as a nano standard can shorten the traceability chain and improve the practical application. 相似文献
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Switchable down-, up- and dual-chirped microwave waveform generation with improved time-bandwidth product based on polarization modulation and phase encoding
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Yuxiao Guo 《中国物理 B》2022,31(7):78403-078403
A switchable down-, up- and dual-chirped microwave waveform generation technique with improved time-bandwidth product (TBWP) is proposed and demonstrated based on a dual-polarization dual-parallel Mach-Zehnder modulator (DP-DPMZM) cascaded with a polarization modulator (PolM). By properly controlling the phase shifts of the radio frequency signals applied to the DP-DPMZM, switchable down-, up- and dual-chirped waveforms with simultaneous frequency and bandwidth doubling can be generated. To enlarge the TBWP further, splitting parabolic signal and phase-encoding splitting parabolic signal are used to drive the PolM for the enhancement of bandwidth and time duration. Numerical results demonstrate the generation of down-, up- and dual-chirped microwave waveform with TBWP of 8, 160 and 10240. The proposed method may find applications in future multifunction radar systems due to the high performance and flexibility. 相似文献
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