一步掩膜法制备超低压ITO沟道纸上薄膜晶体管

基于一步掩模法工艺制备了一种新型的纸上双电荷层超低压薄膜晶体管. 在室温射频磁控溅射过程中, 仅仅利用一块镍掩模板, 就可同时沉积出氧化铟锡(ITO)源漏电极和ITO沟道. 在此基础上, 以等离子体增强化学气相沉积法(PECVD)合成的具有双电荷层效应的微孔SiO₂为栅介质, 成功制备出以纸为衬底的超低压氧化物薄膜晶体管. 这种晶体管显示出极好的性能: 超低的工作电压1.5 V, 场效应迁移率为20.1 cm²/Vs, 亚阈值斜率为188 mV/decade, 开关电流比为5× 10⁵. 这种基于全室温一步掩模法工艺制备的纸上氧化物薄膜晶体管具有工作电压低, 工艺简单, 成本低廉等优点, 非常有望应用于未来便携式低功耗电子产品的制造中.     

Low-Voltage Depletion-Mode Indium-Tin-Oxide Thin-Film Transistors Gated by Ba0.4Sr0.6TiO3 Dielectric

We report on the fabrication and characterization of low-voltage indium-tin-oxide （ITO） thin-film transistors （TFTs） gated by a0.4Sr0.6TiO3 （BST） gate dielectric deposited at room temperature. The 400-nm-thick BST film shows a low leakage current density of 6 × 10^-8 A/cm^2 and a high specific capacitance of 83 nF/cm^2 （corresponding εr= 37）. The ITO TFTs gated by such BST dielectric operate in a depletion mode with an operation voltage of 5.0 V. The device exhibits a threshold voltage of -3.7 V, a subthreshold swing of 0.5 V/decade, a field effect mobility of 3.2cm^2/Vs and a current on/off ratio of 1.4× 10^4.     

Muon flux measurement at China Jinping Underground Laboratory

China Jinping Underground Laboratory(CJPL)is ideal for studying solar,geo-,and supernova neutrinos.A precise measurement of the cosmic-ray background is essential in proceeding with R&D research for these MeV-scale neutrino experiments.Using a 1-ton prototype detector for the Jinping Neutrino Experiment(JNE),we detected 264 high-energy muon events from a 645.2-day dataset from the first phase of CJPL(CJPL-I),reconstructed their directions,and measured the cosmic-ray muon flux to be (3.53±0.22_stat.±0.07_sys.)×-10^-10cm^-2.The observed angular distributions indicate the leakage of cosmic-ray muon background and agree with simulation data accounting for Jinping mountain's terrain.A survey of muon fluxes at different laboratory locations,considering both those situated under mountains and those down mine shafts,indicates that the flux at the former is generally a factor of (4±2) larger than at the latter,with the same vertical overburden.This study provides a convenient back-of-the-envelope estimation for the muon flux of an underground experiment.