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Two-dimensional particle-in-cell plasma source ion implantation of a prolate spheroid target
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A two-dimensional particle-in-cell simulation is used to
study the time-dependent evolution of the sheath surrounding a
prolate spheroid target during a high voltage pulse in plasma source
ion implantation. Our study shows that the potential contour lines
pack more closely in the plasma sheath near the vertex of the major
axis, i.e. where a thinner sheath is formed, and a non-uniform total
ion dose distribution is incident along the surface of the prolate
spheroid target due to the focusing of ions by the potential
structure. Ion focusing takes place not only at the vertex of the
major axis, where dense potential contour lines exist, but also at
the vertex of the minor axis, where sparse contour lines exist. This
results in two peaks of the received ion dose, locating at the
vertices of the major and minor axes of the prolate spheroid target,
and an ion dose valley, staying always between the vertices, rather
than at the vertex of the minor axis. 相似文献
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This paper performs a numerical simulation of concentric-ring discharge structures within the scope of a two-dimensional diffusion--drift model at atmospheric pressure between two parallel circular electrodes covered with thin dielectric layers. With a relative high frequency the discharge structures present different appearances of ring structures within different radii in time due to the evolvement of the filaments. The spontaneous electron density distributions help understanding the formation and development of self-organized discharge structures. During a cycle the electron avalanches are triggered by the electric field strengthened by the feeding voltage and the residual charged particles on the barrier surface deposited in the previous discharges. The accumulation of charges is shown to play a dominant role in the generation and annihilation of the discharge structures. Besides, the rings split and unify to bring and annihilate rings which form a new discharge structure. 相似文献
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建立了气体放电空心圆筒阴极鞘层离子的自洽蒙特-卡罗模拟模型,对鞘层区内离子的输运过程进行了研究。考虑了离子与中性原子的电荷交换碰撞和弹性散射,用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在空心阴极鞘层中的运动,得到了不同放电条件下自洽电场分布,离子的能量分布,角分布以及电子密度分布和离子密度分布。计算结果表明:离子在由鞘层边界向阴极运动过程中,离子能量分布的高能部分逐渐增大,角分布向小角度部分压缩,鞘层中的强电场对离子起加速和聚焦作用;在鞘层内离子密度分布比较均匀,只是在鞘层边界附近变化
关键词: 相似文献
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用火花预电离辅助介质阻挡放电装置在大气压空气中实现了均匀的类辉光放电。通过用光谱模拟法和波尔兹曼图解法对N 2 第一负带系B2Σ→X 2Σ(0,0)带发射谱线的分析,对放电过程中N 2 的转动温度进行了诊断。研究了不同频率和放电模式下转动温度的变化规律,对由两种方法计算所得的温度进行了对比。实验结果表明,转动温度会随着外加频率的增加而缓慢的增加;当放电从类辉光模式变到丝状放电模式时,转动温度会有70K左右的升高。 相似文献
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大气压非平衡等离子体由于其独特的非平衡特性,可为甲烷和二氧化碳稳定温室气体分子活化和重整提供非热平衡和活化环境.本文采用了零维等离子体化学反应动力学模型,考虑了详细的CH4/CO2等离子体化学反应集,重点研究了反应气体CH4/CO2摩尔分数(5%—95%)对大气压非平衡等离子体甲烷干法重整制合成气和重要含氧化合物的影响.首先,给出了进料气体不同体积比时电子密度和温度随时间的演化规律,结果表明初始甲烷摩尔分数的提高有利于获得较高的电子密度和电子温度.随后,讨论了主要自由基和离子数密度在不同的甲烷摩尔分数下随着时间的变化规律,并给出了反应气体的转化率、合成气体和重要含氧化合物的选择性.此外,还明确了合成气和含氧化合物主要生成和损耗的化学反应路径,发现甲基和羟基是合成含氧化合物的关键中间体.最后,归纳总结给出了主要等离子体粒子之间的总体等离子体化学反应流程图. 相似文献
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Observation of Periodic Multiplication and Chaotic Phenomena in Atmospheric Cold Plasma Jets
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We investigate the temporal evolution of the current pulses from an ac Fie cold plasma jet at atmospheric pressure and with driving frequency in the range 14.76-15.30 kHz. The driving frequency is used as the plasma system's bifurcation parameter in analogy with the evolution in which the current pulses undergoes multiplication and chaos. Such time-domain nonlineaxity is important for controlling instabilities in atmospheric glow discharges. In addition, the observation can provide some data to support the simulation results reported previously [Appl. Phys. Lett. 90 (2007) 071501]. 相似文献
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利用两维particle-in-cell方法研究了半圆形容器表面等离子体源离子注入过程中鞘层的时空演化规律. 详尽考察了鞘层内随时间变化的电势分布和离子密度分布规律,离子在鞘层中的运动轨迹和运动状态,得到了半圆容器内、外表面和边缘平面上各点离子注入剂量分布规律,获得了工件表面各点注入离子的入射角分布规律. 研究结果揭示了半圆容器边缘附近鞘层中离子聚焦现象,以及离子聚焦现象导致工件表面注入剂量分布和注入角度分布存在很大不均匀的基本物理规律.
关键词:
等离子体源离子注入
鞘层
两维particle-in-cell方法
离子运动轨迹 相似文献