Large area planar plasma sustained by surface microwave

In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the experimental results we find that the nonuniformities in azimuthal plasma density and electron temperature have been greatly improved and in particular the nonuniformity is less than 10{\%} when the gas pressure is 30 Pa. By improving the antenna shape, enhancing the microwave power and choosing the appropriate gas pressure, the large area planar plasma with high density can be produced.     

Improvement of Uniformity of Inductively Coupled Plasma with a one Spiral Antenna

Uniformity of inductively coupled plasma （ICP） is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results.     

Large Volume and High Density Surface Wave Plasmas Sustained by Two Microwave Launchers

Surface wave plasma （SWP） is an electromagnetic excitation along the planar interface between a dielectric and plasma medium when plasma density is so large that its permittivity becomes negative. An experiment SWP system consisting of two microwave launchers （upper and side microwave launcher） has been developed for producing large volume surface wave plasmas in our laboratory. The experimental investigation shows that comparable uniformity plasma with not only large volume but also high density properties has been obtained by the two launchers.