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In this paper, we propose a novel Schottky barrier MOSFET structure,
in which the silicide source/drain is designed on the buried metal
(SSDOM). The source/drain region consists of two layers of silicide
materials. Two Schottky barriers are formed between the silicide
layers and the silicon channel. In the device design, the top barrier
is lower and the bottom is higher. The lower top contact barrier is
to provide higher {on-state} current, and the higher bottom contact
barrier to reduce the off-state current. To achieve this, ErSi is
proposed for the top silicide and CoSi2 for the bottom in the
n-channel case. The 50~nm n-channel SSDOM is thus simulated to
analyse the performance of the SSDOM device. In the simulations, the
top contact barrier is 0.2e~V (for ErSi) and the bottom barrier is
0.6eV (for CoSi2. Compared with the corresponding conventional
Schottky barrier MOSFET structures (CSB), the high on-state
current of the SSDOM is maintained, and the off-state current is
efficiently reduced. Thus, the high drive ability (1.2mA/μm
at Vds=1V,
Vgs=2V) and the high Ion/Imin ratio (106)
are both achieved by applying the SSDOM
structure. 相似文献
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