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GaInAs/AlGaAs comprehensive-strained three-quantum-well lasers with asymmetric waveguide are designed and optimized. With this design, the optical field in the transverse direction is extended, and a semiconductor laser with large spot is obtained. For a 300-μm cavity length and 100-μm aperture device under continuous wave (CW) operation, the measured vertical and horizontal far-field divergence angles are 12.2° and 3.0°, respectively. The slope efficiency is 0.44 W/A and the lasing wavelength is 917 nm.The equivalent transverse spot size is 3 μm for the fundamental transverse mode, which is a sufficiently large value for the purpose of coupling and manipulation of light. 相似文献
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为了提高1060 nm垂直腔面发射激光器(VCSEL)的性能,本文对大功率1060 nm VCSEL进行了理论模拟和实验研究。计算得到红移速度为0.40 nm/K,据此确定增益和腔模失配量为-20 nm。对比分析了6种不同InGaAs组分和厚度的量子阱,以及3种不同势垒材料的增益特性和输出特性,模拟结果表明,应变补偿的InGaAs/GaAsP量子阱有源区在温度稳定性、阈值电流以及功率方面更有优势。对P型分布式布拉格反射镜(DBR)进行优化设计,优化DBR渐变层厚度和对数,有助于获得更好的输出特性。采用金属有机化学气相沉积生长了InGaAs/GaAsP应变补偿量子阱结构的VCSEL外延片,并制备了单管和阵列VCSEL,实验数据和理论分析基本吻合。实验测得,288单元VCSEL阵列在4.5 A电流下,连续输出功率为2.62 W,最高电光转换效率为36.8%,5 mm×5 mm VCSEL阵列准连续条件下(脉宽为100μs,占空比为1%),且在100 A电流下,获得峰值功率为53.4 W。 相似文献
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