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Fluid simulation of the pulsed bias effect on inductively coupled nitrogen discharges for low-voltage plasma immersion ion implantation 下载免费PDF全文
Planar radio frequency inductively coupled plasmas(ICP) are employed for low-voltage ion implantation processes,with capacitive pulse biasing of the substrate for modulation of the ion energy. In this work, a two-dimensional(2D) selfconsistent fluid model has been employed to investigate the influence of the pulsed bias power on the nitrogen plasmas for various bias voltages and pulse frequencies. The results indicate that the plasma density as well as the inductive power density increase significantly when the bias voltage varies from 0 V to-4000 V, due to the heating of the capacitive field caused by the bias power. The N+fraction increases rapidly to a maximum at the beginning of the power-on time, and then it decreases and reaches the steady state at the end of the glow period. Moreover, it increases with the bias voltage during the power-on time, whereas the N_2~+ fraction exhibits a reverse behavior. When the pulse frequency increases to 25 kHz and40 kHz, the plasma steady state cannot be obtained, and a rapid decrease of the ion density at the substrate surface at the beginning of the glow period is observed. 相似文献
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Continuous phase plate(CPP),which has a function of beam shaping in laser systems,is one kind of important diffractive optics.Based on the Fourier transform of the Gerchberg-Saxton(G-S) algorithm for designing CPP,we proposed an optical diffraction method according to the real system conditions.A thin lens can complete the Fourier transform of the input signal and the inverse propagation of light can be implemented in a program.Using both of the two functions can realize the iteration process to calculate the near-field distribution of light and the far-field repeatedly,which is similar to the G-S algorithm.The results show that using the optical diffraction method can design a CPP for a complicated laser system,and make the CPP have abilities of beam shaping and phase compensation for the phase aberration of the system.The method can improve the adaptation of the phase plate in systems with phase aberrations. 相似文献
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钨标准物质在钨的测定、分析仪器校准、分析方法的评价等方面发挥非常重要的作用。黑钨精矿、黑钨中矿在标准物质样品制备过程中产生严重的热团聚现象,样品制备非常困难,至今国内没有相关标准物质。研究发现通过降低转速、延长磨样间隔时间可以降低磨样产生的大量热量以减小热团聚现象,再结合过筛完成制样。实验采用间歇正反转干磨,过0.074mm湿筛,筛上3kg小瓷球磨机湿磨,再球磨机混样,最后人工8次梅花堆锥混样。经均匀度检验样品粒度小于0.074mm超过98%,稳定性检验合格。制备的样品满足标准物质要求。 相似文献
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基于光传输理论研究了前表面颗粒污染物诱导薄光学元件产生初始损伤的原因,提出了颗粒遮光效应和颗粒造成的光学元件局部热变形两者共同作用对光束进行扰动的损伤机理.研究结果表明:对于高功率激光光束,薄光学元件局部热变形对光束的扰动是产生较高光强调制的重要原因;随着激光脉冲发射次数的增加,局部热变形的表面形状、位相延迟幅度、热扩散长度不断变化,会在光学元件内不同厚度处和后表面xy方向上的不同位置处产生较高的光强调制,不仅容易引起后表面产生多个损伤点,也可能在光学元件内就产生损伤,并且在厚度方向上的损伤点是分散的. 相似文献
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大口径高功率激光装置为提高激光靶面的光强强度, 通常采用2×2集束聚焦的模式进行打靶. 大口径楔形透镜是组成2×2集束聚焦系统的核心元件, 可分为二维离轴楔形透镜、一维离轴楔形透镜和非离轴楔形透镜3类. 为了获得理想靶面光强分布, 基于这3 类楔形透镜, 对比研究相应2×2集束聚焦系统下的靶面光强分布特性. 研究结果表明: 相比离轴楔形透镜, 采用基于非离轴楔形透镜的2×2集束聚焦系统时, 容易在激光靶面获得更窄的主瓣宽度、更强的峰值强度、更高的能量集中度. 研究结果对高功率激光靶场聚焦系统的配置选择有重要参考价值. 相似文献
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