纳米硅薄膜的研制

使用大量氢稀释硅烷,严格控制PECVD系统中的工艺参数,分别沉积出a-Si:H,nc-Si:H 以及μc-Si:H薄膜.使用HREM,Raman及X射线谱,探讨了nc-Si:H膜的结构特征.结果表明,它已符合国际上对于固体纳米材料的认识.由于结构上的新颖性,使它具有一系列鲜为人知的物性.     

ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

The Ge_xSi_1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant along <100> zone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along the <100> zone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy along <100> zone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed along <100> zone axis.     

非晶硅薄膜晶化过程中微结构的分析

使用X射线衍射技术和高分辨率电子显微镜(HREM),分析研究了在非晶硅薄膜由非晶相向微晶相转化过程中其网络结构的变化特征,由此,给人们一个直观的信息,并加深对非晶硅薄膜微结构的认识。 关键词：     

ORDER ALLOY IN GexSi1-x/Si(100) STRAINED-LAYER SUPERLATFICES

The Ge_xSi_1-x/Si(100) strained-layer superlattices have been investigated by means of the transmission electron microscopy of the cross-sectional specimen (XTEM) and the high resolution electron microscopy (HREM), The order alloy with a period of modulation twice as large as the lattice constant along <100> zone axis has been found in the alloy layers of the superlattices with x≈0.4-0.5. This order struc-ture makes the superlattices inhomogeneously strained. The result of the compuler simulation shows that the order alloy exhibits an altemating stack of 2 monolayers of Ge atoms and 2 monolayers of Si atoms along the <100> zone axis. Thc calculated elastic strain energy of the disorder alloy reported in the litera-ture is very close to that of the order alloy along <100> zone axis. Thus, during the MBE growth of the alloy layers, both the disorder and order alloys can be formed along <100> zone axis.