X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

H− Formation in proton-metal collisions

Negative hydrogen ion formation is studied by scattering protons from a cesiated tungsten (110) surface. The primary energy ranges from 50 to 400 eV. The angle of incidence is 70° with respect to the surface normal. A maximum conversion efficiency $\text{H}{}^{\mathrm{?}}\text{(H}{}^{\mathrm{?}}\text{+ H}{}^0\text{)}$ of 67% is measured. The measurements can be described in terms of the probability model. The perturbation of the H^? ion by the metal is described within first order perturbation theory. A reasonable agreement between theory and experiment is obtained.     

A post-column extraction system for the determination of tertiary amines by liquid chromatography with chemiluminescence detection

Summary The combination of an ion-pair extraction detection system with peroxyoxalate chemiluminescence detection has been investigated. Ion-pairs of protonated tertiary amines with a chemiluminescent counter ion are on-line post-column extracted to 1,2-dichloroethane containing bis(2,4,6-trichlorophenyl)oxalate (TCPO). Hydrogen peroxide is added to the organic phase by means of a solid-state perhydrit reactor. The influence of the base catalyst (imidazole) on the chemiluminescence reaction in apolar solvents was studied. Some sulfonated chemiluminophores were compared with respect to their chemiluminescence, ion-pairing and extraction properties, and 5-dimethylaminonaphthalene-1-sulfonate was found to be the most suitable reagent. The detection limit of the potential drug secoverine is in the sub-nanogram range.     

Determination of organophosphorus pesticides in aqueous samples by on-line membrane disk extraction and capillary gas chromatography

Summary A fast and simple procedure for the analysis of aqueous samples by on-line membrane disk extraction and capillary gas chromatography (GC) is presented. As an example, organophosphorus pesticides are preconcentrated from aqueous samples on three 0.5 mm thick, 4.2 mm diameter extraction disks. The layers are dried by a stream of nitrogen (10–15 min; ambient temperature). Desorption of the analytes is carried out with ethyl acetate which is directly introduced into a retention gap under partially concurrent solvent evaporation conditions, using an early solvent vapour exit. The final analysis is carried out by GC with thermionic detection. The technique is applied to the determination of a series of organophosphorus pesticides in tap water and water from two European rivers. With a sample volume of only 2.5 ml, detection limits of 10–30 ppt are achieved in tap water and of 50–100 ppt in river water.     

Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon -- germanium nanostructures imaging

This paper presents a new technique using energy filtered TEM (EFTEM) for inelastic electron scattering contrast imaging of Germanium distribution in Si-SiGe nanostructures. Comparing electron energy loss spectra (EELS) obtained in both SiGe and Si single crystals, we found a spectrum area strongly sensitive to the presence of Ge in the range [50-100 eV]. In this energy loss window, EELS spectrum shows a smooth steeply shaped background strongly depending on Ge concentration. Germanium mapping inside SiGe can thus be performed through imaging of the EELS background slope variation, obtained by processing the ratio of two energy filtered TEM images, respectively, acquired at 90 and 60 eV. This technique gives contrasted images strongly similar to those obtained using STEM Z-contrast, but presenting some advantages: elastic interaction (diffraction) is eliminated, and contrast is insensitive to polycrystalline grains orientation or specimen thickness. Moreover, since the extracted signal is a spectral signature (inelastic energy loss) we demonstrate that it can be used for observation and quantification of Ge concentration depth profile of SiGe buried layers.