In situ reaction mechanism studies on the atomic layer deposition of Al2O3 from (CH3)2AlCl and water

Reaction mechanisms between dimethylaluminum chloride and deuterated water in the atomic layer deposition (ALD) of Al2O3 were studied at 150-400 degrees C using a quartz crystal microbalance (QCM) and a quadrupole mass spectrometer (QMS). The observed reaction byproducts were DCl and CH3D. QMS showed that about one-third of the chlorine, and half of the methyl ligands were released during the (CH3)2AlCl pulse. The growth rate deduced from the QMS and QCM data was in qualitative agreement with the previously published growth rate from ALD film growth experiments.     

Transducer properties of AFM microprobes conformally covered by ALE-deposited SnO2 thin films

2 thin films. The study showed that by applying very thin film (30 nm SnO₂ in this study) the transducer influences on force sensing can be neglected. However, even much thicker (470 nm SnO₂) overlayers can be used if the coating influence on the optical and mechanical properties of the cantilever is sufficiently taken into account. Received: 3 August 1998 / Accepted: 3 November 1998     

Quasilinear elliptic equations with boundary blow-up

Assume that Ω is a bounded domain in ℝ _N withN ≥2, which has aC ²-boundary. We show that forp ∃ (1, ∞) there exists a weak solutionu of the problem δ_p u(x) = f(u(x)), x ∃ Ω with boundary blow-up, wheref is a positive, increasing function which meets some natural conditions. The boundary blow-up ofu(x) is characterized in terms of the distance ofx from ∂Ω. For the Laplace operator, our results coincide with those of Bandle and Essén [1]. Finally, for a rather wide subclass of the class of the admissible functionsf, the solution is unique whenp ∃ (1, 2].     

The Bieberbach-Rademacher problem for the Monge-Ampère operator

Assume that Ω is a bounded, strictly convex, smooth domain in ℝ^N withN≥2. We consider the problem det ((∂ _iju(x)))=f(x,u(x)),u(x)→∞ asx→∂Ω, where (∂ _iju(x)) denotes the Hessian ofu(x) andf meets some natural regularity and growth conditions. We prove that there exists a unique smooth, strictly convex solution of this problem. The boundary-blow-up rate ofu(x) is characterized in terms of the distance ofx from ∂Ω. Partially supported by the Royal Swedish Academy of Sciences, Gustaf Sigurd Magnuson's fund.     

The Blow-up Rate of Solutions to Boundary Blow-up Problems for the Complex Monge–Ampère Operator

A regularity result for solutions to boundary blow-up problems for the complex Monge–Ampère operator in balls in is proved. For certain boundary blow-up problems on bounded, strongly pseudoconvex domains in with smooth boundary an estimate of the blow-up rate of solutions are given in terms of the distance to the boundary and the product of the eigenvalues of the Levi form.     

Atomic layer deposition of ZrO2 thin films using a new alkoxide precursor

Zirconium oxide thin films were grown by atomic layer deposition using a new type of Zr alkoxide: [Zr(O^tBu)₂(dmae)₂]₂ (dmae is dimethylaminoethoxide). Water was used as the oxygen source. The films grown at 190-240 °C were amorphous, and the films grown at 290-340 °C were nanocrystalline. The highest refractive index of the films was 2.08 at a wavelength of 580 nm. The permittivity of a film grown at 240 °C was 25.     

High energy proton-carbon scattering in the alpha-particle model

We investigate elastic and inelastic 0⁺–2⁺ high energy proton-¹²C scattering in the alpha-particle model. We use a rigid equilateral triangle nuclear wave function with a Gaussian dispersion function allowing theα-particles of the¹²C-nucleus to deviate from their most probable positions at the triangle vertices. Expressions for the differential scattering cross sections are deduced using Glauber multiple diffraction theory. Thus we need thep?α-particle scattering amplitude, which is calculated from a Gaussian nucleon-nucleon profile function. Numerical calculations show that the model reproduces the experimental results onp?α andp-¹²C scattering.     

Epimerization of Glycal Derivatives by a Cyclopentadienylruthenium Catalyst: Application to Metalloenzymatic DYKAT

Epimerization of a non‐anomeric stereogenic center in carbohydrates is an important transformation in the synthesis of natural products. In this study an epimerization procedure of the allylic alcohols of glycals by cyclopentadienylruthenium catalyst 1 is presented. The epimerization of 4,6‐O‐benzylidene‐D ‐glucal 4 in toluene is rapid, and an equlibrium with its D ‐allal epimer 5 is established within 5 min at room temperature. Exchange rates for allal and glucal formation were determined by 1D ¹H EXSY NMR experiments to be 0.055 s^?1 and 0.075 s^?1, respectively. For 4‐O‐benzyl‐L ‐rhamnal 8 the epimerization was less rapid and four days of epimerization was required to achieve equilibration of the epimers at room temperature. The epimerization methodology was subsequently combined with acylating enzymes in a dynamic kinetic asymmetric transformation (DYKAT), giving stereoselective acylation to the desired stereoisomers 12 , 13 , and 15 . The net effect of this process is an inversion of a stereogenic center on the glycal, and yields ranging from 71 % to 83 % of the epimer were obtained.