Dynamics of Miniature and High-Compliance Structures: Experimental Characterization and Modeling

Experimental Mechanics - The dynamic behavior of miniature and high-compliance structures is critical for their performance. However, their low stiffness and inertia bring significant challenges to...     

Experimental modal analysis for microelectromechanical systems

The structural dynamics behavior of microelectromechanical systems (MEMS), which include moving, overhung, and compliant subcomponents, plays a pivotal role in determining their performance and reliability. Traditionally, experimental modal analysis is used to characterize the dynamic behavior of structures, as well as to derive, validate, update, and correct analytical and numerical models. Due to their small size, however, conventional modal testing methods cannot be directly applied to microstructures. In this paper we provide an overview of modal testing techniques for microsystems. A particular experimental modal analysis methodology that includes base excitation via a piezoelectric shaker and measurement through a laser interferometer is then described and evaluated. A distinguishing characteristic of the methodology is its simplicity, including its simple setup and off-the-shelf components. The modal model is derived for the base excitation of microcantilever beams. The effectiveness of the methodology is illustrated through various experiments on polysilicon microcantilevers for different geometries and ambient pressures. Analysis of the damping data for different pressures has confirmed the well-documented fact that the structural damping in microsystems can be considerably less than damping arising from interaction with the ambient gases.     

An impact excitation system for repeatable,high-bandwidth modal testing of miniature structures

Miniature components and devices are increasingly seen in a myriad of applications. In general, the dynamic behavior of miniature devices is critical to their functionality and performance. However, modal testing of miniature structures poses many challenges. This paper presents a design and evaluation of an impact excitation system (IES) for repeatable, high-bandwidth, controlled-force modal testing of miniature structures. Furthermore, a dynamic model of the system is derived and experimentally validated to enable the identification of the system parameters that yield single-hit impacts with desired bandwidth and force magnitude. The system includes a small instrumented impact tip attached to a custom designed flexure-based body, an automated electromagnetic release mechanism, and various precision positioners. The excitation bandwidth and the impact force magnitude can be controlled by selecting the system parameters. The dynamic model of the system includes the structural dynamics of the flexure-based body, the electromagnetic force and the associated eddy-current damping, and the impact event. A validation study showed an excellent match between the model simulations and experiments in terms of impact force and bandwidth. The model is then used to create process maps that relate the system parameters to the number of hits (single vs. multiple), the impact force magnitudes and the excitation bandwidths. These process maps can be used to select system parameters or predict system response for a given set of parameters. A set of experiments is conducted to compare the performances of the IES and a (manual) miniature impact hammer. It is concluded that the IES significantly improves repeatability in terms of the impact bandwidth, location, and force magnitude, while providing a high excitation-bandwidth and excellent coherence values. The application of the IES is demonstrated through modal testing of a miniature contact-probe system.     

Three dimensional dynamics of pretwisted beams: A spectral-Tchebychev solution

This paper presents the application of the spectral-Tchebychev (ST) technique for solution of three-dimensional dynamics of unconstrained pretwisted beams with general cross-section (including both straight and curved cross-sections). In general, the dynamic response of pretwisted beams presents three-dimensional (3D) motions, including coupled bending–bending–torsional–axial motions. As such, accurately solving pretwisted beam dynamics requires a 3D solution approach. In this work, the integral boundary value problem based on the 3D linear elasticity equations is solved numerically using the 3D-ST approach. To simplify evaluation of the volume integrals, the boundaries are simplified by applying two coordinate transformations to render the pretwisted beam with curved cross-section into an equivalent straight beam with rectangular cross-section. Three sample pretwisted beam problems with rectangular, curved, and airfoil cross-sections at different twist rates are solved using the presented approach. In each case, the convergence of the solution is analyzed, and non-dimensional natural frequencies and mode shapes are compared to those from a finite-element (FE) solution. Furthermore, cross-sectional stress and displacements are obtained from the 3D-ST solution. Lastly, the non-dimensional natural frequencies from the 3D-ST and a 1D/2D solutions are compared. It is concluded that the 3D-ST solution can capture the three-dimensional dynamic behavior of pretwisted beams as accurately as an FE solution, but for a fraction of the computational cost. Furthermore, it is shown that 1D/2D solution can lead to significant errors at high twist rates, and thus, the 3D-ST solution should be preferred.     

Fabrication of circular microfluidic channels by combining mechanical micromilling and soft lithography

The fabrication of microfluidic channels with complex three-dimensional (3D) geometries presents a major challenge to the field of microfluidics, because conventional lithography methods are mainly limited to rectangular cross-sections. In this paper, we demonstrate the use of mechanical micromachining to fabricate microfluidic channels with complex cross-sectional geometries. Micro-scale milling tools are first used to fabricate semi-circular patterns on planar metallic surfaces to create a master mold. The micromilled pattern is then transferred to polydimethylsiloxane (PDMS) through a two-step reverse molding process. Using these semi-circular PDMS channels, circular cross-sectioned microchannels are created by aligning and adhering two channels face-to-face. Straight and serpentine-shaped microchannels were fabricated, and the channel geometry and precision of the metallic master and PDMS molds were assessed through scanning electron microscopy and non-contact profilometry. Channel functionality was tested by perfusion of liquid through the channels. This work demonstrates that micromachining enabled soft lithography is capable of fabricating non-rectangular cross-section channels for microfluidic applications. We believe that this approach will be important for many fields from biomimetics and vascular engineering to microfabrication and microreactor technologies.