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碳化硅薄膜的力学性能测试分析 总被引:1,自引:0,他引:1
对利用射频磁控溅射及真空退火方法在(100)硅晶片衬底上制备的纳米晶碳化硅(SiC)薄膜,用纳米压痕仪进行了力学性能测试分析。纳米压痕技术测试给出两块SiC薄膜样品I和II的弹性模量/硬度分别约为106GPa/9.5GPa和175GPa/15.6GPa。纳米划痕技术测试两块SiC薄膜的摩擦系数分别约为0.02~0.15和0.05~0.18,显示出良好的润滑性能;对薄膜的临界附着力等进行测量以评价膜基结合强度,分析了划痕过程中薄膜近表面弹塑性变形和断裂信息。在原子力显微镜下对SiC薄膜样品的初始表面及残余压痕和划痕形貌进行了观察分析,与测试结果相符。综合比较,样品II的整体性能优于样品I。本文中薄膜的弹性模量和硬度值较低可归因于制膜技术的不同和表层碳含量偏高。 相似文献
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Ligang Song 《中国物理 B》2021,30(8):86103-086103
Fe-Cr ferritic/martensitic (F/M) steels have been proposed as one of the candidate materials for the Generation IV nuclear technologies. In this study, a widely-used ferritic/martensitic steel, T91 steel, was irradiated by 196-MeV Kr+ ions at 550 ℃. To reveal the irradiation mechanism, the microstructure evolution of irradiated T91 steel was studied in details by transmission electron microscope (TEM). With increasing dose, the defects gradually changed from black dots to dislocation loops, and further to form dislocation walls near grain boundaries due to the production of a large number of dislocations. When many dislocation loops of primary a0/2<111> type with high migration interacted with other defects or carbon atoms, it led to the production of dislocation segments and other dislocation loops of a0<100> type. Lots of defects accumulated near grain boundaries in the irradiated area, especially in the high-dose area. The grain boundaries of martensite laths acted as important sinks of irradiation defects in T91. Elevated temperature facilitated the migration of defects, leading to the accumulation of defects near the grain boundaries of martensite laths. 相似文献
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