排序方式: 共有33条查询结果,搜索用时 15 毫秒
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SU-8光胶因具有良好的光刻性能,并可获得稳定的高深宽比而在微加工领域得到了广泛的应用。众多研究采用不同的光源对其进行了多种光刻研究,本文应用355nm激光对SU-8胶进行曝光,分别采用XPS谱和FT-IR谱分析了SU-8胶与激光相互作用过程中,355nm激光对SU-8胶的作用以及反应前后主要成分含量、分子结构的变化,初步探讨了SU-8胶中激光曝光能量与透入深度的关系。 相似文献
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利用数值模拟方法,研究波长1 064 nm、脉冲宽度介于1~20 ps的激光在刻蚀铜靶时,单次脉冲作用下非平衡场刻蚀和热平衡刻蚀两种机制的竞争过程。结果表明:随着脉冲宽度的增加,刻蚀过程由非平衡电荷分离场刻蚀占主导地位转变为热平衡刻蚀起主要作用,且脉冲宽度和激光峰值功率密度增大到一定程度后,各种电子加速机制在不同时刻开始突显,电子能量分布出现多峰结构。在能量密度为15 J/cm2的激光作用下,1和5 ps脉宽对应的非平衡场刻蚀深度分别为110和101 nm,10和20 ps脉宽分别为25和18 nm。 相似文献
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Analysis of X-Ray Photoelectron Spectroscopy of Polymethyl Methacrylate Etched by a KrF Excimer Laser 下载免费PDF全文
The C ls and 0 ls electrons in polymethyl methacrylate etched by different incident laser intensities are analysed by x-ray photoelectron spectroscopy. The results show that when the incident laser fluence increases gradually,the percentage of carbon atoms in C-C bonds decreases while the one in carbonyl group (C=O) and alkoxy group (C-O) increases, and the percentage of oxygen atoms in C=O bonds increases while the one in C-O bonds decreases. Based on the analysis of the chemical structure, the energy level transition, energy diversion, and dissociation of bonds are theoretically examined, which is consistent with the experimental results. 相似文献
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利用时间分辨光谱技术,研究了激光诱导Cu等离子体中激发态4d′4F9/2的形成及其辐射跃迁的瞬态特性。结果表明:电子离子复合、粒子间碰撞、自蚀吸收等过程在等离子体不同演化时刻,对激发态4d′4F9/2原子的制备起着不同作用。粒子间碰撞作用剧烈时,激发态4d′4F9/2原子以相同几率向低能态4p′4Do7/2及4p′4Fo9/2跃迁转移能量;等离子体辐射约500 ns后,粒子间相互作用变弱,激发态4d′4F9/2原子主要通过辐射谱线CuⅠ359.91 nm转移能量。 相似文献
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Time-resolved spectroscopy for 5s~('4)D_(7/2) state transitions undergoing electron–ion recombination in femtosecond laser-produced copper plasma 下载免费PDF全文
In the femtosecond laser-produced Cu-plasma, the transient transition dynamics that the excited state 5s~('4)D_(7/2) via electron–ion recombination transfers to 4p~('4)F_(9/2)~0(465.11 nm, Λ1 line) and 4p~('4)D_(7/2)~0(529.25 nm, Λ_2 line) states are investigated by using the time-resolved spectroscopy. The occupation number and relevant lifetime of the excited state 5s~('4)D_(7/2),the temporal evolutions of spectral intensities for Λ_1 line and Λ_2 line emissions are demonstrated to be in direct proportion to the employed laser intensity, which reveals the transient features of transition dynamics clearly differing from that resulted in the traditional collision excitation. Furthermore, some unique characteristics for Λ_1 and Λ_2 transitions stemming from electron–ion recombination are examined in detail. 相似文献
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Quantization of electromagnetic field in quadratic continuous nonlinear absorptive dielectrics 下载免费PDF全文
This paper reports that in the quantization of
electromagnetic field in the dielectrics, the wave equation with
regard to the Green function is analytically solved by a direct integral
method for a quadratic continuous nonlinear absorptive dielectric
medium. The quantization of the electromagnetic field in such a
nonlinear absorptive dielectric is carried out for which the
material dielectric function is assumed as a separable variable about
the frequency and the space coordinate. The vacuum field
fluctuations for different spatial continuous variations of
dielectric function are numerically calculated, which shows that the
present result is self-consistent. 相似文献
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激光辐照与拉伸预应力作用下复合材料试件的破坏研究 总被引:3,自引:0,他引:3
对复合材料T300/FAG80试件在室温及激光辐照下的力学性能进行了测试,得到材料的纵横向有效弹性模量以及拉压破坏强度,并分析激光参数对于材料力学性能的影响.试验采用波长为1064nm的Nd:YAG连续输出激光器,在不同拉伸预应力下,以不同功率密度激光辐照复合材料,并使用高速摄像机进行同步观测,对烧蚀破坏机理进行了分析并预测激光强度对于材料性能影响的趋势走向.使用有限元软件对激光辐照复合材料试件破坏时间进行数值建模,将计算结果与试验结果相对比,数据基本吻合. 相似文献
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微通道不仅仅是作为流体流动的单元, 更是进行流体控制的工具,微通道自身特性和特征用在实现微流体的驱动、进样、混合、分离以及液滴的产生、控制等方面已经表现出了良好的效果.由于微通道中比表面积非常大, 表面效应极大影响流体流动,近年来多数研究集中在应用表面效应来实现微流体驱动与控制,而以利用微通道结构特征实现流体流动控制为目标的研究成果相对较少.为了提高对通道构型作用的认识,主要介绍了基于微通道构型的无可动部件的流体微阀和基于微通道构型微小液滴的产生及流动控制器两个方面的发展情况,表明微通道构型在微流体控制中同样可以发挥重要作用,甚至有望带来微流控技术的突破. 相似文献