Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE

Lithium niobate (LN) metasurfaces have emerged as a new platform for manipulating electromagnetic waves. Here, we report a fabrication technique for LN nano-grating metasurfaces by combining focused ion beam(FIB) milling with inductively coupled plasma reactive ion etching(ICP-RIE). Steep sidewalls with angles larger than 80° are achieved. Sharp quasi-bound states in the continuum are observed from our metasurfaces. The measured transmission spectra show good agreement with the numerical simulat...     

铌酸锂的耄耋之路:历史与若干进展

铌酸锂集压电、倍频、电光和光折变等特性于一身,被认为是非线性光学的模型晶体,已经表现出巨大的实用价值。铌酸锂在其诞生以来的近百年中,已经在国土安全、医学检测、高能物理、工业探测等领域占据着不可或缺的地位。随着微纳技术的发展,近年来铌酸锂微纳结构中新型光学效应的研究,已经成为国际上竞相争夺的前沿热点之一,相关研究对于产生新型微纳光子学器件具有重要推动作用。本文主要围绕铌酸锂的光学性质综述了其发展历史,同时介绍其在微纳光学领域的研究现状,并对其未来发展进行了展望。