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Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer 下载免费PDF全文
We achieve a successful novel lift-off of patterning Pt/Ti electrodes on SiO2/Si substrates by employing ZnO sacrificial layer deposition and patterning, successive uniform Pt/Ti deposition and final lift-off. Then we deposit PZT thin films on the electrodes. Compared with the conventional lift-off processes for the electrodes, this novel process does not need post-annealing, which must be performed after conventional lift-off process. It is demonstrated that the electrodes patterned by the novel lift-off process have stronger adhesion. The electrodes and the PZT films on the electrodes are more compact and smoother than those by the conventional lift-off process. 相似文献
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基于微电子机械系统制造技术的MEMS压电水听器和矢量水听器具有小型化、低功耗、低成本、易成阵、无源、噪音低等优点。对基于ZnO薄膜的MEMS水听器和矢量水听器进行了研究,测试结果表明,硅微压电水听器的灵敏度为-192 d B(ref.1 V/μPa),基本达到实用化的要求。MEMS压电矢量水听器等效声压灵敏度为-229.5 d B(ref.1 V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17 d B,但还未达到实用化要求。为了进一步提高MEMS矢量水听器的灵敏度,设计了具有U形槽的压电复合悬臂梁结构和电极串联结构,采用具有更高压电系数的掺钒ZnO薄膜作为压电层,并对MEMS制备工艺进行了改进,有望显著提高MEMS矢量水听器的灵敏度。 相似文献
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利用三维并行计算代码求解Navier-Stokes方程,数值模拟标模(ELECTRE)化学非平衡绕流,研究真实气体效应对标模气动热特性的影响,反应模型为Dunn和Kang的7组元7反应化学动力学模型.利用典型弹道点的飞行试验数据验证化学非平衡流计算程序的可靠性.在此基础上,研究不同壁面催化条件下攻角和高度变化对热流的影响.计算表明:真实气体效应主要发生在物面附近很薄的激波层内,并使激波脱体距离减小;完全催化壁驻点热流值高于非催化壁热流值;随着攻角增大,热流分布差异明显,而且攻角越大时,物面电子数密度越小;飞行高度越高,O2和N2离解程度越低,驻点热流越低. 相似文献
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Detection and Location of a Target in Layered Media by Snapshot Time Reversal and Reverse Time Migration Mixed Method 下载免费PDF全文
A target in layered medium can be located by the ridge-like distribution time reversal and reverse time migration(TR-RTM) mixed method. However, this method cannot distinguish between acoustic field distributions of the interface and target for the wider acoustic pulse signals, which may result in inaccurate location of the target. A snapshot TR-RTM mixed method is proposed to solve this problem. The principle of snapshot TR-RTM mixed method is first given. Experiments are then carried out, and a mountain-like acoustic field distribution is obtained by processing experimental data. The results show that the location of the peak is that of the target, and the ratio of the scattered signal and interface reflection signal(signal-to-interference ratio) is improved by about four times after processing. Furthermore, this method can effectively suppress the interface reflection signal and enhance the target scattering signal. Therefore, it can achieve effective detection and location of a target in a layered medium. 相似文献