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1.
使用高真空电子束蒸发在p型Si(1 0 0 )衬底上制备了高kHfO2 薄膜 .俄歇电子能谱证实薄膜组分符合化学配比 ;x射线衍射测量表明刚沉积的薄膜是近非晶的 ,高温退火后发生部分晶化 ;原子力显微镜和扫描电子显微镜检测显示在高温退火前后薄膜均具有相当平整的表面 ,表明薄膜具有优良的热稳定性 ;椭偏测得在 6 0 0nm处薄膜折射率为 2 0 9;电容 电压测试得到的薄膜介电常数为 1 9.这些特性表明高真空电子束蒸发是一种很有希望的制备作为栅介质的HfO2 薄膜的方法 相似文献
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研究了在不同温度区间氧气氛和氮气氛退火后处理对PtBa0.8Sr0.2TiO3Pt介电特性的影响.经过高温550℃氮气退火处理后,再放入350℃的氧气中退火,发现样品的介电特性出现了非常明显的低频弛豫现象,并且这种低频弛豫现象在350℃的氮气中退火后将会消失.通过在出现低频弛豫现象的样品的上下电极加一偏压,可以发现低频弛豫现象更加明显,并且在撤消偏压后这种增强将会逐渐减弱,直至最终恢复到偏压前的弛豫状态
关键词:
脉冲激光沉积
介电弛豫
动态随机存储器 相似文献
3.
[100]金刚石薄膜的辐照响应特性研究 总被引:1,自引:0,他引:1
采用热丝辅助化学气相沉积(HFCVD)方法生长得到25μm厚的[100]取向金刚石膜,用以制备辐射探测器.在100 V偏压下,测得暗电流为16.1 nA,55Fe X射线(5.9 keV)和241Am α粒子(5.5 MeV)辐照下的净光电流分别为15.9nA和7.0nA.光电流随时间的变化先快速增加随后由于"pumping"效应逐渐达到稳定.X射线和α粒子辐照下的平均电荷收集效率分别为45;和19;,并由Hecht理论计算得到对应的电荷收集距离为11.25μm和4.75μm. 相似文献
4.
使用高真空电子束蒸发在p型Si(100)衬底上制备了高k HfO2薄膜.俄歇电子能谱证实薄膜组分符合化学配比;x射线衍射测量表明刚沉积的薄膜是近非晶的,高温退火后发生部分晶化;原子力显微镜和扫描电子显微镜检测显示在高温退火前后薄膜均具有相当平整的表面,表明薄膜具有优良的热稳定性;椭偏测得在600?nm处薄膜折射率为2.09;电容电压测试得到的薄膜介电常数为19.这些特性表明高真空电子束蒸发是一种很有希望的制备作为栅介质的HfO2薄膜的方法.
关键词:
高k薄膜
HfO2
电子束蒸发 相似文献
5.
采用射频磁控溅射技术分别在纳米与微米金刚石薄膜上制备立方氮化硼(c- BN)薄膜.金刚石薄膜由拉曼光谱(Raman)及原子力显微镜(AFM)进行表征.采用傅立叶变换红外光谱(FTIR)研究了不同沉积温度对c- BN薄膜生长的影响,结果表明在金刚石薄膜上生长c- BN不存在温度阈值,室温下生长的c- BN含量可达70;以上.当沉积温度由室温向上升高时,对于纳米金刚石薄膜衬底上生长的BN薄膜而言,其中的立方相含量反而逐渐降低.此外,随着沉积温度的降低,c- BN对应的峰位向低波数方向偏移的现象表明低温下生长的c- BN薄膜内应力较小.文中探讨了产生此现象的原因. 相似文献
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7.
Thermal stability of HfO2/Si(001) films prepared by electron beam evaporation in ultrahigh vacuum using atomic oxygen
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HfO2 films on silicon substrates have been prepared by electron beam evaporation in ultrahigh vacuum using atomic oxygen.Synchrotron radiation photon-electron spectroscopy was used to investigate the thermal stability of HfO2 films under an ultrahigh vacuum environment.At the temperature of 750℃,HfO2 films begin to decompose.After being further annealed at 850℃ for 3 min,HfO2 films decomposes completely,partially to form Hf-silicide and partially to form gaseous HfO.Two chemical reactions are responsible for this decomposition process.A small amount of Hf-silicide,which is formed at the very beginning of growth,may result in the films grown subsequently to be loosened,and thereby leads to a relatively low decomposition temperature. 相似文献
8.
Investigation of transport properties of perovskite single crystals by pulsed and DC bias transient current technique
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Time-of-flight (ToF) transient current method is an important technique to study the transport characteristics of semiconductors. Here, both the direct current (DC) and pulsed bias ToF transient current method are employed to investigate the transport properties and electric field distribution inside the MAPbI$_{3}$ single crystal detector. Owing to the almost homogeneous electric field built inside the detector during pulsed bias ToF measurement, the free hole mobility can be directly calculated to be about 22 cm$^{2}\cdot$V$^{-1}\cdot$s$^{-1}$, and the hole lifetime is around 6.5 μs-17.5 μs. Hence, the mobility-lifetime product can be derived to be $1.4\times 10^{-4}$ cm$^{2}\cdot$V$^{-1}$-$3.9\times 10^{-4}$ cm$^{2}\cdot$V$^{-1}$. The transit time measured under the DC bias deviates with increasing voltage compared with that under the pulsed bias, which arises mainly from the inhomogeneous electric field distribution inside the perovskite. The positive space charge density can then be deduced to increase from 3.1$\times10^{10}$ cm$^{-3}$ to 6.89$\times 10^{10}$ cm$^{-3}$ in a bias range of 50 V-150 V. The ToF measurement can provide us with a facile way to accurately measure the transport properties of the perovskite single crystals, and is also helpful in obtaining a rough picture of the internal electric field distribution. 相似文献
9.
The intrinsic defect of cadmium vacancy (Vcd) in cadmium telluride (CdTe) has been studied by first-principles cal- culations using potentials with both the screened hybrid functional of Heyd, Scuseria, and Ernzerhof (HSE) approximation and the generalized gradient approximation of the Perdew-Burke-Ernzerhof form (PBE-GGA). Both results show that the Ta structure of the Vctl defect for different charges is the most stable structure as compared with the distorted C3v structure with one hole localized at one of the four nearest Te atoms. This indicates that the John-Teller distortion (C3v) structure may be unstable in bulk CdTe crystal. The reason likely lies in the delocalized resonance nature of the t2 state of the Vcd defect. Moreover, the formation energy obtained by the HSE method is about 0.6-0.8 eV larger than that obtained by the PBE method. The transition levels calculated by the PBE method and the HSE method are similar and well consistent with the experimental results. 相似文献
10.
CsPbI2Br薄膜在大气环境下制备存在覆盖率低、结晶质量差和结构稳定性差等问题.本文提出了一种动态热风辅助再结晶策略(dynamic hot-air assisted recrystallization,DHR),在相对湿度大于(50%(>60%RH).的大气环境下,制备出高覆盖率、(100)择优取向、大尺寸晶粒、结构稳定、光电性能好的CsPbI2Br薄膜.这是由于动态热风过程能够有效提高薄膜的覆盖率和获得(100)择优取向的结晶,但晶粒尺寸会显著减小(Rave=0.32μm)并伴随着大量的晶界形成,从而加剧载流子的非辐射复合(τave=99 ns);而通过再结晶过程,可进一步提高(100)择优取向的结晶和显著增大晶粒尺寸(Rave=2.63μm),从而提高薄膜的光致发光强度和荧光寿命(τave=118 ns).由DHR策略制备的未封装CsPbI2Br太阳能电池具备高光电转换效率(power conversion effici... 相似文献