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用RF溅射制备厚度为200 nm的Fe-N薄膜在250℃, 12000 A/m磁场下真空热处理后,当N含量在5%~7%(原子百分数)范围内形成α′+α″相时,4πMS可达2.4 T, Hc<80 A/m, 2~10 MHz下高频相对导磁率μr=1500,可满足针对10 Gb/in2存储密度的GMR/感应式复合读写磁头中写入磁头的需要. Fe-N系薄膜中α′相的形成机理和点阵常数与块状试样按Bain机理形成的α′相有明显的差别,得到了薄膜中α′相的a,c与Cα′N之间的线性关系式. 相似文献
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The structure and magnetic properties of Fe- N thin films 总被引:1,自引:0,他引:1
200 nm Fe-N thin films deposited on glass substrates by RF sputtering were vacuum annealed at 250-350℃ under 12000 A/m magnetic field. Heat treatment was effective in improving the soft magnetic properties of the Fe-N film. When the nitrogen content was in the range of 5-7 at. %,the thin films consisted of α′ + α" after heat treatment and had excellent soft magnetic properties of 4πMs = 2.4 T, Hc < 80 A/m, μr = 1500 under 2-10 MHz. The properties of the films meet the needs of a write head material used in the dual element GMR/inductive heads. The fromation mechanism and lattice constants of the α′ phase in Fe-N thin film are different from Jack's results obtained from γ→α′transformation in bulk samples. The linear relationship between a, c and Ca'N for thin film was obtained asc = 2. 866+ 1.559Ca'N,a = 2.866 + 0.181Ca'N.`` 相似文献
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CRYSTALLINE CARBON NITRIDE THIN FILMS DEPOSITED BY MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION
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The crystalline carbon nitride thin films have been prepared on Si (100) substrates using microwave plasma chemical vapor deposition technique. The experimental X-ray diffraction pattern of the films prepared contain all the strong peaks of α-C3N4 and β-C3N4, but most of the peaks are overlapped.The films are composed of α-C3N4 and β-C3N4. The N/C atomic ratio is close to the stoichiometric value 1.33. X-ray photoelectron spectroscopic analysis indicated that the binding energies of C 1s and N 1s are 286.43eV and 399.08 eV respectively. The shifts are attributed to the polarization of C-N bond. Both observed Raman and Fourier transform infrared spectra were compared with the theoretical calculations. The results support the existence of C-N covalent bond in α- and β-C3N4 mixture. 相似文献
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