Al纳米颗粒增强微晶硅薄膜太阳电池光吸收的模拟研究

利用价格低廉、性能优良的金属纳米颗粒增强太阳电池的光吸收具有广阔的应用前景. 通过建立三维数值模型, 模拟了微晶硅薄膜电池前表面周期性分布的Al纳米颗粒阵列对电池光吸收的影响, 并对其结构参数进行了优化. 模拟结果表明: 对于球状Al纳米颗粒阵列, 影响电池光吸收的关键参数是周期P与半径R的比值, 或者说是颗粒的表面覆盖度; 当P/R=4–5时, 总的光吸收较参考电池提高可达20%. 与球状颗粒相比, 优化后的半球状Al纳米颗粒阵列可获得更好的陷光效果, 但后者对颗粒半径R的变化较敏感. 另外, 结合电场分布, 对电池光吸收增强的物理机理进行了分析.     

椭圆偏振技术研究VHF-PECVD高速沉积微晶硅薄膜的异常标度行为

采用VHF-PECVD技术高速沉积了不同生长阶段的微晶硅薄膜,通过椭圆偏振技术研究了生长过程中微晶硅薄膜表面粗糙度的演化.实验结果表明,沉积气压P_g=300 Pa时,β=0.81,其超出标度理论中β最大值为0.5范围,出现异常标度行为.这表明微晶硅薄膜高速生长中还存在其他粗糙化增加的因素,此粗糙化增加的因素与阴影作用有关. 关键词： 微晶硅薄膜 椭偏光谱法 生长机制 表面粗糙度     

Effect of substrate temperature on microstructure and optical properties of single-phased Ag20 film deposited by using radio-frequency reactive magnetron sputtering method

Using a radio-frequency reactive magnetron sputtering technique, a series of the single-phased Ag20 films are deposited in a mixture of oxygen and argon gas with a flow ratio of 2：3 by changing substrate temperature （Ts）. Effects of the Ts on the microstructure and optical properties of the films are investigated by using X-ray diffractometry, scanning electron microscopy and spectrophotometry. The single-phased Ag20 films deposited at values of Ts below 200℃ are （111） preferentially oriented, which may be due to the smallest free energy of the （111） crystalline face. The film crystallization becomes poor as the value of Ts increases from 100℃ to 225℃. In particular, the Ag20 film deposited at Ts=225℃ loses the （111） preferential orientation. Correspondingly, the film surface morphology obviously evolves from a uniform and compact surface structure to a loose and gullied surface structure. With the increase of Ts value, the transmissivity and the reflectivity of the films in the transparent region are gradually reduced, while the absorptivity gradually increases, which may be attributed to an evolution of the crystalline structure and the surface morphology of the films.     

Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag2O Films by Direct-Current Reactive Magnetron Sputtering

（111） preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and optical properties are then characterized by x-ray diffractometry, scanning electron microscopy, and spectrophotometry, respectively. The results indicate that no clear Ag diffraction peak is discernable in the Ag2O film annealed below 200°C. In comparison, the Ag2O film annealed at 200°C begins to exhibit characteristic Ag diffraction peaks, and in particular the Ag2O film annealed at 250°C can demonstrate enhanced Ag diffraction peaks. This implies that the threshold of the thermal decomposition reaction to produce Ag particles is approximately 200°C for the Ag2O film. In addition, an evolution of the film surface morphology from compact and pyramid-like to a rough and porous structure clearly occurred with increasing annealing temperature. The porous structure might be attributable to the escape of the oxygen produced during annealing, while the rough surface might originate from the reconstruction of the surface. The dispersion of interference peak intensity in the reflectance and transmission spectra could be attributed to the Ag particles produced. The lowered crystallinity and Ag particles produced induce a lattice defect, which results in an enhanced transmissivity in the violet region and a weakened transmissivity in the infrared region.     

Microstructure and Optical Properties of AgxO Prepared by Direct-Current Magnetron-Sputtering Method

Two series of AgxO films are prepared on glass substrates by dc magnetron-sputtering method at room temperature and 90℃ under different oxygen to argon gas ratio （OAR） conditions. The mierostrueture is investigated by XRD and SEM in order to obtain the information on the component evolution of AgO＋Ag2O to Ag2O. Its optical properties are investigated by reflectance and absorption spectroscopy to extract the information on metallic and dielectric behaviour evolution of Ag2O, AgO and silver particles and the interband transition. The results indicate that the AgxO film prepared at room temperature is mainly made up of AgO and Ag2 O clusters while Ag2O is the primary component of AgxO prepared at 90℃. The AgxO film mainly consisting of the primary component shows indirect interband transition structure occurring at 2.89eV. Combination of increasing OAR and substrate temperature is an effective method to lower the threshold of thermal decomposition temperature of AgxO and to deal with the bottleneck of short-wavelength optical and magneto-optieM storage.     

多孔硅形成机理的逆结晶学模型

本文概述了多孔硅形成机理和现有模型.通过观察和分析多晶多孔硅化学腐蚀机理提出了一个新模型:多孔硅形成机理的逆结晶学模型.这个模型指出多晶多孔硅均匀形貌具有自选择性,而此自选择性受结晶学原理控制.此模型的提出对研究晶体生长有用.     

利用快速热退火法制备多晶硅薄膜

为了制备优质的多晶硅薄膜,该论文研究了非晶硅薄膜的快速热退火(RTA)技术.先利用PECVD设备沉积非晶硅薄膜,然后把其放入快速热退火炉中进行退火.退火前后的薄膜利用X射线衍射(XRD)仪、Raman光谱仪及扫描电子显微镜(SEM)测试其晶体结构及表面形貌,利用电导率测试设备测试其暗电导率.研究表明退火温度、退火时间以及沉积时的衬底温度对非晶硅薄膜的晶化都有很大的影响.     

薄膜结构性能变化中的"温度临界点"

本文先从理论角度说明了薄膜结构性能变化中存在"温度临界点",然后借助于XRD、Raman等测试仪器研究分析了Si薄膜、AZO薄膜在晶化过程、晶粒长大过程以及性能突变中的"温度临界点".结果显示:薄膜结构性能变化中确实存在"温度临界点";在"温度临界点"前后薄膜结构性能的变化规律曲线出现拐点.进而推论:薄膜的结构性能在随温度变化中"温度临界点"可能不止一个.     

热处理对Agx O薄膜结构及成份的影响

利用X射线衍射谱(XRD)和X射线光电子谱(XPS)研究了热处理对AgxO样品的结构及成份的影响.研究结果表明所有制备的AgxO样品基本为无定型,并且AgO和Ag2O两种成份共存;两组具有代表性的AgxO样品经过高温热处理后分别呈现了(Ag+Ag2O)和Ag2O的多晶结构,结构及成份的巨大差异与样品制备条件息息相关;AgO和Ag2O两种成份的热分解临界温度分别为200℃和300℃;热处理过程中,伴随着AgxO的热分解及体内的氧原子向样品表面的扩散过程,并且Ag2O具有相对致密的结构.     

射频磁控溅射低温制备ITO薄膜

利用射频磁控溅射法低温制备铟锡氧化物薄膜,主要研究了氧氩流量比、溅射功率、溅射压强、沉积温度和靶基距等工艺参数对ITO薄膜结构和光电性能的影响.在优化的沉积条件即氧氩流量比0.1/25、溅射功率210W、溅射压强0.2 Pa、靶基距2.0 cm和衬底为100℃的低温下制备的ITO薄膜电阻率为7.3×10-4Ω·cm、可见光范围内平均透光率为89.4;.在氩气气氛中200℃低温退火60 min后,ITO薄膜的电阻率降为3.8 ×10-4Ω·cm,透光率不变.