Retrospective of work at Bell Laboratories on the effect of fluorine substitution on the properties of photoacid generators

An overview is given on the work done at Bell Laboratories in which fluorine substitution was employed to tune the structure property relationships of chemically amplified resists. In particular, this paper will detail how structural changes in 2-nitrobenzyl photoacid generator (PAG) affect molecular properties such as quantum yield, thermal stability, and in turn also influence the lithographic characteristics of photoresist formulations such as sensitivity and post-exposure bake (PEB) and post-exposure delay (PED) latitude.     

Polymers for microlithographic applications: new directions and challenges

Advances in the fabrication technologies associated with electronic devices have placed increasing demands on microlithography, the technology used to generate today's integrated circuits. Within the next few years, a new form of lithography will be required that routinely produces features of less than 0.1 μm. As the exposing wavelength of light decreases to facilitate higher resolution imaging, the opacity of traditional materials precludes their use; and major research efforts to develop alternate materials are underway. As a current example, lithography tools utilizing 193 nm light are now being introduced into the manufacturing environment. Through understanding of materials structure and its relationship to device process requirements and performance, a new class of cyclo‐olefin based polymers was designed for these applications. In particular, alicyclic monomers such as norbornene are readily copolymerized with maleic anhydride and substituted acrylates to afford a wide range of alternative matrices that exhibit transparency at the exposing wavelength and aqueous base solubility. Materials properties must be carefully tailored to maximize lithographic performance with minimal sacrifice of other performance attributes. Further reduction in exposing wavelength to 157 nm introduces new challenges in polymer materials design. Efforts to address those challenges will be discussed.     

Synthesis of silica-gold nanocomposites and their porous nanoparticles by an in-situ approach

We demonstrate the one-step synthesis of a silica-gold nanocomposite by simultaneous hydrolysis and reduction of gold chloride. The aminophenyl group was used as a reducing agent, and the trimethoxy silane group acts a precursor for the formation of silica. The porous gold nanoparticles were formed by etching out the silica-gold nanocomposite by hydrofluoric acid. The electron diffraction of porous gold nanoparticles showed that the particle are polycrystalline with FCC structure. The silica-gold nanocomposite exhibited nonlinear current-voltage behavior, and the porous gold nanoparticles displayed linear current-voltage behavior.     

Electron paramagnetic resonance and optical absorption studies of manganese ions doped in polyvinyl(alcohol) complexed with polyethylene glycol polymer films

Electron paramagnetic resonance (EPR), optical absorption, and infrared spectral studies have been carried out on Mn²⁺ ions doped in poly(vinyl alcohol) (PVA) complexed with polyethylene glycol (PEG) films prepared by solution cast technique. The EPR spectra of 0.25?mol% Mn²⁺ ions doped polymer complex (PVA+PEG) at room temperature exhibit sextet hyperfine structure (hfs), centered at g????1.99. The spin?CHamiltonian parameter values indicate that the ground state of Mn²⁺ ion is d⁵ and the site symmetry around Mn²⁺ ions in tetragonally distorted octahedral site. The spin concentration participating in the resonance is measured as a function of temperature and it is observed that it obeys Boltzmann??s law. The paramagnetic susceptibility (??) is calculated from the EPR data at various temperatures (93?C333?K) and it obeys the Curie?CWeiss law. The optical absorption spectra exhibits two bands which are assigned to ⁶A_1g (S)??⁴A_1g (G) or ⁴E_g (G) and ⁶A_1g (S)??⁴T_2g (G) transitions. The infrared spectrum exhibits few bands due to the presence of O?CH, C?CH, and C=C groups.     

Structural investigations on sodium-lead borophosphate glasses doped with vanadyl ions

Electron paramagnetic resonance (EPR), optical absorption, and FT-IR spectra of vanadyl ions in the sodium-lead borophosphate (Na(2)O-PbO-B(2)O(3)-P(2)O(5)) (SLBP) glass system have been studied. EPR spectra of all the glass samples exhibit resonance signals characteristic of VO(2+) ions. The spin Hamiltonian parameters g and A are found to be independent of the V(2)O(5) content and temperature. The values of the spin Hamiltonian parameters indicate that the VO(2+) ions in SLBP glasses are present in octahedral sites with tetragonal compression. The population difference between Zeeman levels (N) is calculated as a function of temperature for an SLBP glass sample containing 1.0 mol % VO(2+) ions. From the EPR data, the paramagnetic susceptibility (χ) is calculated at different temperatures, and the Curie constant (C) is calculated from the 1/χ versus T graph. The optical absorption spectra of the glass samples show two absorption bands, and they are attributed to V(3+) and V(4+) ions. The optical band gap energy (E(opt)) and Urbach energy (ΔE) are calculated from their ultraviolet absorption edges. It is observed that, as the vanadium ion concentration increases, E(opt) decreases and ΔE increases. The study of the IR absorption spectrum depicts the presence of BO(3), BO(4), PO(3), PO(4), and VO(5) structural units.     

Spectral studies on Cu ions in sodium–lead borophosphate glasses

Electron Paramagnetic Resonance (EPR) and optical absorption spectra of Cu²⁺ ions in sodium–lead borophosphate glasses doped with different concentrations of Cu²⁺ ions have been studied. EPR spectra of all the glass samples exhibit resonance signals characteristic of Cu²⁺ ions. The values of spin-Hamiltonian parameters indicate that the Cu²⁺ ions in sodium–lead borophosphate glasses are present in octahedral sites with tetragonal distortion. The optical absorption spectra of all the glass samples show a single broad band, which has been assigned to the ²B_1g→²B_2g transition of Cu²⁺ ions. The optical band gap energy (E_opt) and Urbach energy (ΔE) are calculated from their ultraviolet absorption edges. The emission bands observed in the ultraviolet and blue region are attributed to 3d⁹4s→3d¹⁰ triplet transition in Cu⁺ ion. The FT-IR spectra show that the glass system contains BO₃, BO₄ and PO₄ structural units.     

Alkaline earth zinc borate glasses doped with Cu2+ ions studied by EPR,optical and IR techniques

Copper ions incorporated into alkaline earth zinc borate glasses 10RO + 30ZnO + 60B₂O₃ (R = Mg, Ca and Sr) and 10SrO + (30 ? x)ZnO + 60B₂O₃ + xCuO (x = 0, 0.1, 0.3, 0.5, and 0.7 wt.%) were characterized by electron paramagnetic resonance (EPR), optical absorption and FTIR techniques. The EPR spectra of all the glass samples exhibit resonance signals characteristic of Cu²⁺ ions. The values of spin-Hamiltonian parameters indicate that the Cu²⁺ ions in alkaline earth zinc borate glasses were present in octahedral sites with tetragonal distortion. The spin concentration (N) participating in resonance was calculated as a function of temperature for strontium zinc borate (SrZB) glass sample containing 0.7 wt.% of Cu²⁺ ions and the activation energy was calculated. From the EPR data, the paramagnetic susceptibility (χ) was calculated at different temperatures and the Curie constant was evaluated from the 1/χ-T graph. The optical absorption spectra of these samples show only one absorption band. The optical band gap energies (E_g) and Urbach energy (ΔE) are calculated from their ultraviolet edges. The FTIR studies show different stretching and bending vibrations of alkaline earth zinc borate glasses.     

Emission analysis of Tb:MgAl2O4 powder phosphor

This paper reports the emission analysis of green-emitting Tb³⁺-doped MgAl₂O₄ phosphors. Uniformity of the phase of the Tb³⁺-doped MgAl₂O₄ phosphor has been checked by X-ray diffraction (XRD) technique and show common bands existing in the results of Fourier transform infrared (FT-IR). This phosphor exhibits weak blue, orange emissions and a strong emission at λ_exci=350 nm. The blue and green-orange emissions are ascribed to ⁵D₃→⁷F_J and ⁵D₄→⁷F_J (where J=3-6) transitions of Tb³⁺ ions, respectively. These phosphors have shown a strong, more prominent green emission from ⁵D₄→⁷F₅ at 543 nm. The results have indicated that MgAl₂O₄:Tb³⁺ could be a potential candidate as agreen-emitting powder phosphor.     

Stereoselectivity reversal of a photochemical reaction in the solid state

The stereoselectivity of Norrish type II cyclobutanol formation resulting from photolysis of α-adamantyl-p-methoxyacetophenone is altered in favor of the more hindered cis isomer as the reaction medium is changed from isotropic liquid phases (benzene or acetonitrile) to the pure crystal. Based on the reactant X-ray crystal structure, it is suggested that the intermediate 1,4-biradical in the solid state is born in, and restricted to, a conformation which is ideal for direct closure to the more hindered product. In the relatively unrestricted solution environment, however, conformational isomerism of the biradical is faster than closure, thus leading to a predominance of the less hindered trans cyclobutanol.