Etching Characteristics and Mechanisms of Mo and Al2O3 Thin Films in O2/Cl2/Ar Inductively Coupled Plasmas: Effect of Gas Mixing Ratios

An investigation of etching behaviors for Mo and Al₂O₃ thin films in O₂/Cl₂/Ar inductively coupled plasmas at constant gas pressure (6 mTorr), input power (700 W) and bias power (200 W) was carried out. It was found that an increase in Ar mixing ratio for Cl₂/Ar plasma results in non-monotonic etching rates with the maximums of 160 nm/min at 60 % Ar for Mo and 27 nm/min at 20 % Ar for Al₂O₃. The addition of O₂ in the Cl₂/Ar plasma causes the non-monotonic Mo etching rate (max. 320 nm/min at 40–45 % O₂) while the Al₂O₃ etching rate decreases monotonically. The model-based analysis of etching kinetics allows one to relate the non-monotonic etching rates in Cl₂/Ar plasma to the change in the etching regime from the ion-flux-limited mode (at low Ar mixing ratios) to the neutral-flux-limited mode (for high Ar mixing ratios). In the Cl₂/O₂/Ar plasma, the non-monotonic Mo etching rate is probably due to the change in reaction probability.     

A Comparative Study of HBr-Ar and HBr-Cl<Subscript>2</Subscript> Plasma Chemistries for Dry Etch Applications

The effects of HBr/Ar and HBr/Cl₂ mixing ratios in the ranges of 0–100% Ar or Cl₂ on plasma parameters, densities of active species influencing the dry etch mechanisms were analyzed at fixed total gas flow rate of 40 sccm, total gas pressure of 6 mTorr, input power of 700 W and bias power of 300 W. The investigation combined plasma diagnostics by Langmuir probes and the 0-dimensional plasma modeling. It was found that the dilution of HBr by Ar results in maximum effect on the ion energy flux with expected impact on the etch rate in the ion-flux-limited etch regime, while the addition of Cl₂ influences mainly the relative fluxes of Br and Cl atoms on the etched surface with expected impact on the etch rate in the reaction-rate-limited etch regime.     

A novel approach to determine the molecular overlap of polyelectrolyte using an ultrafiltration membrane

The overlapping of charged polymers (e.g., polyelectrolyte) in the liquid phase is one of the key parameters affecting the processing of the macromolecular solutions. This work focused on the development of a novel method for determining the overlap concentration of polyelectrolytes with stirred cell ultrafiltration (UF) techniques. A new, simplified equation that incorporated the resistance-in-series UF model into the osmosis phenomenon caused by polymers was developed, and then applied to estimate the threshold concentration for macromolecular overlap. The overlap concentrations of model polymers, such as poly(dimethylamine-co-epichlorohydrin-co-ethylenediamine) and poly(diallyldimethylammonium chloride), were evaluated with different, initial polymer concentrations and membrane pore sizes. In the correlation between ln R_t/C_r and ln C_r, the concentration where ln R_t/C_r had the minimal value was referred to as the overlap concentration. The gyration radius of polyelectrolytes was calculated using the overlap concentration, which can provide insight into the understanding of the size of polymers and their rejections by membranes. Determining the overlap concentration of polymers with a UF membrane appeared to be viable and practical.     

Microfluidic fabrication of microengineered hydrogels and their application in tissue engineering

Microfluidic technologies are emerging as an enabling tool for various applications in tissue engineering and cell biology. One emerging use of microfluidic systems is the generation of shape-controlled hydrogels (i.e., microfibers, microparticles, and hydrogel building blocks) for various biological applications. Furthermore, the microfluidic fabrication of cell-laden hydrogels is of great benefit for creating artificial scaffolds. In this paper, we review the current development of microfluidic-based fabrication techniques for the creation of fibers, particles, and cell-laden hydrogels. We also highlight their emerging applications in tissue engineering and regenerative medicine.     

Hybrid functional RuO2–Al2O3 thin films prepared by atomic layer deposition for inkjet printhead

Hybrid functional RuO₂–Al₂O₃ thin films were prepared by atomic layer deposition using bis(ethylcyclopentadienyl)ruthenium (Ru(EtCp)₂) and trimethyl aluminum (TMA). The intermixing ratios between RuO₂ and Al₂O₃ in the RuO₂–Al₂O₃ thin films were controlled from (RuO₂)_0.16–(Al₂O₃)_0.84 to (RuO₂)_0.72–(Al₂O₃)_0.28. With the RuO₂ intermixing ratio less than 0.43, both temperature coefficient of resistance (TCR) values and resistivities were abruptly changed. The TCR values for RuO₂–Al₂O₃ thin films were changed from ?381 to ?62.3 ppm/K by changing the RuO₂ intermixing ratios from 0.43 to 0.83, while the resistivities were also changed from 1,200 to 243 μΩ·cm. Moreover, the change in the TCR of RuO₂–Al₂O₃ thin films was below 127 ppm/K even after O₂ annealing process at 700 °C. Moreover, it showed that RuO₂–Al₂O₃ thin films had a high corrosion resistance due to the highly corrosion-resistive RuO₂ and Al₂O₃.     

Proteomic analysis of Helicobacter pylori cellular proteins fractionated by ammonium sulfate precipitation

Among 1590 ORFs in the Helicobacter pylori genome, >250 have been identified as authentic genes by proteomic analysis. Low-abundance proteins need to be enriched to a minimal amount for MALDI-TOF analysis and salt precipitation has generally been used for protein enrichment. Here, a whole-cell extract of H. pylori strain 26695 was subjected to protein fractionation with stepwise concentrations of ammonium sulfate and the proteins were displayed by 2-DE. The protein spots were quantified using PDQUEST software and identified by peptide fingerprinting. The 2-DE profiles and intensities of individual protein spots differed among the protein fractions. Out of the 98 identified proteins, 61 were found in the stepwise ammonium sulfate fractions but not in the whole-cell extract. Out of these, 37 proteins, including KdsA, were found exclusively in a single fraction. In contrast, GroEL, UreA, UreB, TrxA, NapA, and FldA were ubiquitously present in all fractions. Iron-containing proteins such as NapA, SodB, CeuE, and Pfr were found predominantly in the 100% saturated ammonium sulfate precipitate. Additionally, 29 proteins were newly identified in this study. These data will facilitate the preparation of significant H. pylori proteins, as well as provide information about low-abundance proteins.     

Peculiarities of Si and SiO2 Etching Kinetics in HBr + Cl2 + O2 Inductively Coupled Plasma

Plasma Chemistry and Plasma Processing - Peculiarities of the etching kinetics and mechanisms for Si and SiO2 in the HBr?+?Cl2?+?O2 inductively coupled plasma were...     

Effect of chlorine on adsorption/ultrafiltration treatment for removing natural organic matter in drinking water

In drinking water treatment, prechlorination is often applied in order to control microorganisms and taste-and-odor-causing materials, which may influence organics removal by adsorption and membrane filtration. Thus, the addition of chlorine into an advanced water treatment process using a hybrid of adsorption and ultrafiltration (UF) was investigated in terms of natural organic matter (NOM) removal and membrane permeability. A comparison between two adsorbents, iron oxide particles (IOP) and powdered activated carbon (PAC), was made to understand the sorption behavior for NOM with and without chlorination. Chlorine modified the properties of dissolved and colloidal NOM in raw water, which brought about lower TOC removal, during IOP/UF. The location of IOPs, whether they were in suspension or in a cake layer, affected NOM removal, depending on the presence of colloidal particles in feedwater. Chlorine also played a role in reducing the size of particulate matter in raw water, which could be in close association with a decline in permeate flux after chlorination.     

Use of a photocatalytic membrane reactor for the removal of natural organic matter in water: Effect of photoinduced desorption and ferrihydrite adsorption

The photocatalytic degradation of natural organic matter (NOM) would be an attractive option in the treatment of drinking water. The performance of a submerged photocatalytic membrane reactor (PMR) was investigated with regard to the removal of NOM and the control of membrane fouling. In particular, this work focused on the adsorption and desorption of humic acids (HA) and lake water NOM at the surface of TiO₂ photocatalyts and ferrihydrite (FH) adsorbents in the PMR for water treatment. The addition of FH particles with a large sorption capacity helped remove the NOM released from TiO₂ particles, but FH suspended in water affected the photocatalysis of lake water NOM with a low specific UV absorbance (SUVA) value. To prevent the UV light being scattered by FH without any photocatalytic activity, FH particles were attached to a submerged microfiltration (MF) membrane, which contributed to a greater removal of NOM during long-term PMR operation. The further removal of NOM from aqueous solution was achieved due to the synergistic effect of TiO₂ photocatalysis and FH adsorption in PMR while minimizing the influence of photoinduced desorption of NOM. No significant membrane fouling occurred when the submerged PMR was operated even at high flux levels (>25 L/m² h), as long as photocatalytic decomposition took place.     

Isolation and structure determination of a new diketopiperazine dimer from marine-derived fungus Aspergillus sp. SF-5280

A new diketopiperazine dimer designated as SF5280-415 (1) was isolated from an EtOAc extract of the marine-derived fungus Aspergillus sp. SF-5280 by various chromatographic methods. The structure of 1 was mainly determined by analysis of the NMR spectroscopic data and MS data, along with Marfey’s method. This compound is a new diastereoisomer of known bispyrrolidinoindoline diketopiperazine alkaloid WIN 64745, which possesses unique architecture biosynthetically derived from an indole oxidation reaction of tryptophan.