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Emanation Thermal Analysis (ETA) was demonstrated as a tool for the characterization of microstructure changes of a sol-gel precursor for silica-titania layers deposited on the glass plate to be used as planar waveguides. Temperature ranges of 280-330 and 380-500°C, respectively, in which the densification of the layers took place, were determined by ETA under in situ conditions of the sample heating. Results of thermogravimetry were compared with the ETA data. This revised version was published online in August 2006 with corrections to the Cover Date.  相似文献   
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