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Imai Hiroaki Morimoto Hirotoki Tominaga Atsushi Hirashima Hiroshi 《Journal of Sol-Gel Science and Technology》1997,10(1):45-54
Structural changes in sol-gel derived thin films by exposure to water vapor were investigated using Fourier transform infrared absorption spectroscopy, ellipsometry and x-ray diffraction. We found that SiO2 gel films were densified with a decrease in OH groups by the exposure at 60°–180°C. The shrinkage and the peak frequency of 4 (TO) for the exposed films were comparable to those heated in a dry atmosphere at temperatures above 500°C. However, OH groups in the films were not completely removed by the water exposure. A subsequent annealing above 300°C changed the structure of the water-exposed SiO2 films with condensation of the remaining OH groups. Although the exposed SiO2 gel films were amorphous, TiO2 gel films were transformed to anatase with a decrease in OH groups by the treatments at 80°–180°C. 相似文献
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