Stopping powers and inelastic mean free path from quantitative analysis of experimental REELS spectra for electrons in Ti,Fe, Ni,and Pd

Stopping power (SP) and inelastic mean free path (IMFP) of electrons in Ti, Fe, Ni, and Pd have been determined by using dielectric models. We have used energy loss function (ELF) determined from quantitative analysis of experimental reflection electron energy loss spectroscopy (REELS) spectra as the input parameter for this model. ELF in this study was determined from the previously published quantitative analysis of REELS spectra. The SP of Fe, Ni, Pd, and Ti was compared with several calculation methods for energies from 100 eV to 10 keV and shows SP in this study, which are in best agreement for medium to high energies (greater than or equal to 300 eV). The IMFP obtained in this study shows the best agreement with online database TPP2M and NIST and also calculation by Tanuma with a root mean square (rms ) less than 12%. The present approach shows ELF from quantitative analysis of REELS spectra has a high potential for the experimental determination of SP and IMFP of metals.