微等离子体氧化Al2O3陶瓷膜的组织结构与形成过程

The alumina ceramic coatings were prepared on aluminum alloy using micro-plasma oxidation. The structure and morphologies of ceramic coatings were studied by X-ray diffraction (XRD) and scanning electron microscope (SEM), and then its formation process was investigated. The results of XRD reveal that with increasing oxidation time the content of γ-Al₂O₃in the ceramic coatings decreases, and in which the content of α-Al₂O₃increases. The results of SEM show that many crater-mouth like traces formed by the plasma discharge are observed on the coatings surface, it indicates when the plasma is discharging, a plasma thermal chemical reaction occurs between the aluminum from the substrate and the oxygen and other ions from the electrolyte. The reaction products then are propelled away from the inner-wall of the discharging channels. Finally, these products agglomerate in the inner-wall of the discharging channels and on the surface near the discharging channels to produce the ceramic coatings. The change of ceramic coatings thickness with increasing oxidation time divides into two stages, and the final thickness is formed in first stage. With increasing current density the final thickness of ceramic coatings increases.