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在抛光的200℃莫来石陶瓷衬底上电子束蒸发淀积200nm的Ti膜,并在高真空中退火,利用二次离子质谱(SIMS)、俄歇电子能谱(AES)和X射线衍射分析(XRD)研究了从200—650℃Ti与莫来石的固相界面反应.结果表明,在淀积过程中,最初淀积的Ti与衬底表面的氧形成Ti—O键,并有微量元素态Al,Si原子析出,界面区很窄;450℃,1h退火后,界面区有所展宽,但变化不大;650℃,1h退火后,界面发生强烈反应,样品主要由TiO+Ti,Ti3Al,Ti3Al+TiSi2和莫来石陶瓷衬底四层结构组成
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研制出一种基于介质上电润湿(electrowetting-on-d ielectric,EWOD)机制的可编程数字化微流控芯片。它采用“三明治”结构:受控离散液滴被夹在两极板之间;下极板以硅为衬底,掺杂多晶硅作为芯片微电极阵列,其上涂覆有Teflon(AF1600薄膜的S iO2作为疏水性介质层;上极板是涂覆有Teflon(AF1600疏水薄膜的透明电极。通过分析数字化微流控系统的基本操作(离散液滴的传输、拆分及混合)的物理机理和模拟优化,在35 V低驱动电压下实现了约0.35μL和0.45μL去离子水离散液滴的传输和合并,并在70 V驱动电压下实现了0.8μL液滴的拆分等操作。 相似文献
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Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator
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An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top p/ate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a Teflon AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an air environment with a 70V at lOHz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE+. 相似文献
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A Si-based novel Fabry-Perot microcavity device that can emit blue-green light at room temperature is proposed and fabricated, One of its Bragg reflectors consists of periodically stacked a-SiO2/a-Si:H layers deposited on the glass by plasma enhanced chemical vapour deposition, The other reflector is a sputtered Al film, The active region between both the reflectors is constructed by a p-type a-SiCx:H/intrinsic-type a-SiCx :H junction fromwhich the electroluminescence (EL) is originated. The EL spectra of this device are recorded by RENISHAW RM2000, a sharp and strong EL peak at 483nm with FWHM of 20nm is observed when the device is driven by dc voltages of 8 V, 12 V and 18 V at room temperature. The intensity of EL increases with the applied voltage while the luminescence wavelength keeps unchanged. Compared with the EL spectra from the sample without the Bragg reflector, the luminescence intensity is about 10 times enhanced and the peak is narrowed greatly. The luminescence mechanism is analysed in detail. 相似文献
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Integrated a-Si:B Microbolometer Arrays Based on Improved Porous Silicon Micromachining Techniques
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A monolithic uncooled 8 × 8 microbolometer array with is presented. The a-Si:B film was deposited by plasma boron-doped a-Si (a-Si:B) thermistors as active elements enhanced chemical vapour deposition. To decrease the thermal conductance of the microbolometer, a-Si:B thermistor was formed on a four-leg suspended microbridge. The improved porous silicon micromachining techniques described here enable the integration of the sensor array with the metal oxide-semiconductor readout circuitry. The sacrificial material of porous silicon is prepared in the first step. It is then well protected all the time during the fabrication of metal-oxide-semiconductor field effect transistors and microbolometers before being released. Measurements and calculations show that the uncorrected uniformity of the 8 × 8 microbolometer array is about 4.5%, and the detectivity of 2.17 × 10^8 cm Hz^1/^2W^-1 is achieved at a chopping frequency of 30 Hz and a bias voltage of 5 V with a thermal response time of 12.4 ms. 相似文献
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用于"芯片实验室"的静电机制微液滴控制芯片的研制 总被引:2,自引:0,他引:2
提出了一种结构简单、可编程控制的离散液滴控制芯片。它以硅为衬底,重掺杂多晶硅为微电极阵列,氧化硅为介质层,碳氟聚合物薄膜为疏水层。它克服了传统连续流传输、混合的局限性及层流条件的限制,通过控制施加在微电极阵列上的电压脉冲时序,成功实现了对离散液滴的快速传输和混合。在30 V驱动电压下,约0.9μL去离子水液滴传输速度可达24 mm/s;在40 V驱动电压下,约0.8μL去离子水液滴和约1.4μL的0.0001 mol/L Rhodam ine液滴在7/30 s内完成了快速混合。另外,还提出利用提高液滴速度及来回晃动混合后的液滴等几种加强混合方法。 相似文献