半导体单晶硅的离子束蚀刻实验研究

离子束蚀刻是一种有超精细加工能力的微细加工技术,广泛应用于微电子、光子技术、表面科学等领域。硅及其化合物常用来制作大规模集成电路,在其表面蚀刻出具有一定几何布图尺寸的沟槽。其深度、宽度、边壁倾角及槽底形状等直接影响器件的性能。     

药物学领域的电子束辐射技术——一种新型抗结核制剂

为了根除疾病,药物学研究的重点已经从单纯的药物化学领域扩展到化学、生物学、电子学等多学科结合领域.本文介绍了俄罗斯科研人员运用电子束加速器固定技术研制的新型抗结核药物制剂,该制剂改善了原有的抗结核药物的内涵,加强了药物制剂中生物活性物质的作用.     

MeV Pb离子在非晶Si中的射程离散──离子束混合和增强扩散的影响

１．０ＭｅＶ２０８Ｐｂ离子在非晶Ｓｉ中的投影射程ＲＰ和射程偏差ΔＲＰ作为注量和温度二者的函数用背散射法进行测定．注量的变化范围为５×１０１３～７×１０１４ｃｍ－２．注入是在室温和ｔ＝－１２０℃下完成的．由由实验所确定的投影射程，射程偏差与注量或温度无关，并且分别等于２９５和７２．２ｎｍ．与ＴＲＩＭ８６的计算结果相比较，发现ＲＰ的偏离为１８％，而ΔＲＰ的偏离为３６％．ＲＰ和ΔＲＰ二者与注量及温度的无关性，排除了所观察到的与ＴＲＩＭ的矛盾是由于注入期间辐射增强扩散或离子束混合效应而引起的解释。     

离子束引起的在Al／Cr双层薄膜界面处的原子混合

用600keV的Kr~ 离子轰击Al/Cr双层薄膜样品进行界面原子反应及相互混合的研究。实验样品是在单晶硅上蒸镀约500nm厚的铝膜,相继再蒸上所需厚度的铬膜而制成的。轰击剂量为2.0×10~(15)-2.5×10~(16)Kr~ /cm~2。用2.0MeVa粒子对轰击前后的样品进行了卢瑟福背散射(RBS)分析,发现界面处有明显的原子混合存在;当轰击剂量≥1.0×10~(16)Kr~ /cm~2时,RBS谱出现有明显的坪台,经拟合计算和x射线衍射(XRD)测量证实确有化合物Al_(13)Cr_2存在;还分别得到了原子混合量及混合效率与轰击剂量的关系;最后对界面处的原子混合机制进行了讨论。     

A generalized Adadorov theory for anisotropic thin-walled beams

This paper presents a generalized Adadorov theory for anisotropic thin—walled beams. The theory takes account of the shear strain of the middle surface, which exerts a significant influence on the anisotropic thin-walled beams. A new approach is established to solve the governing equations, which have the same form for both open and closed section beams. The numerical examples show that the effects of the shear strain cannot be neglected for this class of beams.This work was part of research project supported by the National Natural Science Foundation of China     

高斯光束通过离焦望远镜系统的变换

文章应用复参数表示和ABCD定律,讨论高斯光束通过离焦望远镜系统的变换问题,其结论对实际操作有指导意义。     

板型燃料组件内部流场数值分析

为板型燃料组件的设计和实验研究提供参考 ,采用商用流体力学计算程序 CFX5对板型燃料组件内部流场进行了数值模拟 ,以获得各流速下的板间流场。数值计算结果表明 :板型燃料组件不同流道和单一流道内的流速分布基本均匀 ,在 2 0个流道中居中的 3～ 5流道内的流量比其它流道小一些 ,其中中间流道内的流量最小 ,其流量与平均流量的误差小于 10 % ;提梁对其后部速度场的影响较大 ,对其后部压力场的影响很小。当板间水隙的最大加工误差为0 .15 mm时 ,该流道内的流量与流道内平均流量的误差接近10 %。组件进出口差压计算值与实验值比较接近 ,证明了计算结果的可靠性     

振动系统的模态分析实验设计

利用模态分析原理和简单试验仪器，得到了直观的悬臂梁和圆盘前4阶模态振型，使学生熟悉了模态分析原理和测试方法，有利于学生对振动规律的理解．     

Decentered twisted Gaussian Schell-model beams and their propagation through a misaligned first-order optical system

The propagation properties of decentered twisted Gaussian Schell-model (DTGSM) beams passing through a misaligned first-order optical system are studied. The explicit expressions for the cross-spectral density function and Wigner distribution function of the output beam are derived, which retain their form unchanged. It is shown that the DTGSM beams preserve their closed property. The second-order moments matrix and the Wigner distribution function evolve with the usual laws, whereas the first-order moments matrix varies, as if a ray passes through such system. The propagation of DTGSM beams through an aligned first-order optical system is treated as the limiting case that corresponds to the vanishing misalignment parameters.     

MgO films grown on yttria-stabilized zirconia by molecular beam epitaxy

MgO films were grown on (0 0 1) yttria-stabilized zirconia (YSZ) substrates by molecular beam epitaxy (MBE). The crystalline structures of these films were investigated using X-ray diffraction and transmission electron microscopy. Growth temperature was varied from 350 to 550 °C, with crystalline quality being improved at higher temperatures. The MgO films had a domain structure: (1 1 1)[1 1 2¯]_MgO(0 0 1)[1 0 0]_YSZ with four twin variants related by a 90° in-plane rotation about the [1 1 1]_MgO axis. The observed epitaxial orientation was compared to previous reports of films grown by pulsed laser deposition and sputtering and explained as resulting in the lowest interface energy.