Temperature effect on deposition rate of silicon nitride films

Temperature effects on deposition rate of silicon nitride films were characterized by building a neural network prediction model. The silicon nitride films were deposited by using a plasma enhanced chemical vapor deposition system and process parameter effects were systematically characterized by 2⁶⁻¹ fractional factorial experiment. The process parameters involved include a radio frequency power, pressure, temperature, SiH₄, N₂, and NH₃ flow rates. The prediction performance of generalized regression neural network was drastically improved by optimizing multi-valued training factors using a genetic algorithm. Several 3D plots were generated to investigate parameter effects at various temperatures. Predicted variations were experimentally validated. The temperature effect on the deposition rate was a complex function of parameters but N₂ flow rate. Larger decreases in the deposition rate with the temperature were only noticed at lower SiH₄ (or higher NH₃) flow rates. Typical effects of SiH₄ or NH₃ flow rate were only observed at higher or lower temperatures. A comparison with the refractive index model facilitated a selective choice of either SiH₄ or NH₃ for process optimization.     

构建层次化教学体系,培养学生创新能力--我院物理实验教学改革的实际与成效

结合我院近一两年物理实验教学改革的实际，阐述了在普通高校中如何根据自身的特点开展物理实验教学改革，以及我们在改革中所取得的初步成果。     

国际发展趋势下实验力学的未来作用

考察了分析结构、结构构件以及技术系统中的位移、应变与应力的测量和实验方法在目前和未来的作用。现在,比以往任何时候都更有理由和有更广阔的领域需要用到实验力学方法;许多先进、现代化技术,新型测量设备,测量和赋值过程自动化系统可供使用;以先进的测量技术和计算机技术相结合而形成的各种杂交法已被提出来。利用这些方法,可以优化结构和产品,节约能源和原材料,提高产品质量,增强结构、技术系统的可靠、安全性,控制生产过程以及监督操作系统的安全性;利用这些方法,能够并且应当使技术系统可能发生的危险以及对环境的毁损降至最低程度。     

The dynamics of water in small volumes probed by incoherent quasi-elastic neutron scattering

Summary The dynamics of water molecules occupying very small volumes can be probed by incoherent quasi-elastic neutron scattering. We summarise some results obtained with wet samples of porous silica and hydrated proteins. The movements of the molecules in the vicinity of the substrate are extremely reduced as compared to those of bulk water at the same temperature. Almost only rotational movements subsist and the local diffusion is of the order of that observed in deeply supercooled water. Paper presented at the I International Conference on Scaling Concepts and Complex Fluids, Copanello, Italy, July 4–8, 1994.     

改革材料力学试验教学提高学生综合素质

结合目前我院材料力学试验教学现状,提出几点试验教学改革的建议,以进一步提高学生综合素质。     

物理实验课程考核、评估体系初探

对物理实验课程考核、评估方法进行了探讨，提出了物理实验课程考核、评估体系及实施细则．重点介绍了体系中的核心部分——正规的物理实验课程考试．     

用参考圆法演示简谐振动

对受迫振动仪进行了改进，通过参考圆法，演示了作镁速圆周运动的质点在直径方向上的投影所作的运动为简谐振动。     

小长径比垂直管气液两相流动特性分析

实验观察了小长径比垂直上流管内流型及特点,并对管入口处的压力波动特性和系统的压差波动特性进行了试验研究.结果表明:小长径比(L/D)垂直管内流型表现为泡状流、塞状流、乳沫状流、环状流和液束环状流;分别增加管线中的气量、液量,或者同时增加气液流量,均会造成垂直管入口处压力波动的均值和最大压力的增加;压力信号的概率密度(PDF)大部分呈双峰分布,也存在单峰和多峰分布;差压信号的概率密度符合正态分布,其功率谱密度同压力信号相比具有频率波动范围宽、幅值小的特点.     

自由曲面光学虚拟制造与检测系统的探讨

自由曲面光学产品设计、制造与检测的工艺流程，通常采取试凑法逐次逼近。由于加工 检测 再加工，循环往复，既费时，成本又高，产生了瓶颈问题。为了解决此弊端，本文运用虚拟制造技术，提出光学虚拟制造的基本构想，即虚拟制造系统结构模型，给出光学系统虚拟原型的构成和光学系统成像质量虚拟检测系统的构成，讨论光学成像质量的仿真检测以及敏度分析方法。研究结果表明：运用虚拟制造与检测技术，可缩短研发周期，降低成本，优化工艺并提高产品质量。     

基于单片机控制的实验线路故障诊断系统

介绍了基于单片机控制技术的强电实验线路故障自动诊断系统的结构及功能,阐述了系统硬件设计、软件设计的基本原理．