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171.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
172.
173.
任胜兵 《武汉大学学报(理学版)》2006,52(5):644-648
针对基于Web的图书馆管理系统资源访问控制的动态性问题,提出了一种基于角色的访问控制策略描述方案.通过对基于Web的图书馆管理系统访问控制管理影响因素和访问控制需求的分析,结合NIST基于角色的访问控制统一模型标准,构造了一种基于角色的访问控制元模型.并在这一元模型的基础上,提出了一种紧凑的基于角色的访问控制XML策略描述语言框架.结果表明该访问控制策略描述语言框架适合表述动态环境下对图书馆资源的访问策略,提高了基于Web的图书馆管理系统资源访问的安全性. 相似文献
174.
论学分制管理模式下的高校学生管理制度改革 总被引:13,自引:0,他引:13
实行学分制是高校适应经济社会发展的教学体制创新性改革的必要性选择 .学分制的管理模式是要从人才培养的整齐划一转向培养模式的多样化 ,并注重学生个性发展 .在认真分析了学分制的本质特征以及实施学分制后对学生管理工作的影响后 ,认为学生管理工作是学分制得以顺利实行的重要保证之一 .进而从理论与实践方面 ,进行了学分制管理模式下的高校学生管理制度改革探索 相似文献
175.
Adhesion of zein to solid substrates has been studied using surface energy profiles as indices and by adhesion mapping using
atomic force microscopy (AFM). Different plasticizers like glycerol and sorbitol have been used to form mixed films with zein
and properties of these films are studied using surface energy profiles. Comparison of the results from the different mixed
samples with those from the pure zein films showed that force mapping could identify areas rich in protein. The adhesion maps
produced were deconvoluted from sample topography and contrasted with the data obtained from contact angle measurements. A
comparison of the two methods shows that the extent of contact angle hysteresis is indicative of both hydrophobicity of the
surface as well as the force of adhesion. Mechanical properties and microstructure of zein films prepared by casting from
solutions and using Langmuir-Blodgett film technique have been investigated. Pure zein seemed brittle and exhibited an essentially
linear relationship between stress and strain. Films with plasticizer were tougher than these films. In general, mixed films
showed better mechanical properties than pure films and had higher ultimate tensile strength and increased per cent elongation.
Further, the mixed films of zein showed a higher force of adhesion compared to the pure films. 相似文献
176.
177.
研制了一台五通道ROSS-FILTER-PIN软X射线能谱仪,能谱范围为0.28—1.56keV.它由5个连续能段组成,每个能段的起止边由罗斯滤片对(ROSS-FILTERS)的L或K吸收边确定.罗斯滤片对的厚度通过优化计算得到,为了使每个通道的灵敏区外响应(即所测能段外响应)与通道总响应之比最小,在滤片对的第二滤片上镀上了一定厚度的第一滤片材料;为了缩减滤片表面积以增强低能滤片的抗冲击能力及方便滤片加工,能谱仪采用了小探测面积的PIN探测器(1mm2).借助此能谱仪,测量得到了喷气式Z箍缩(Z-pinch)等离子体辐射软X射线能谱的分布,并研究了软X射线产额随箍缩状况的变化趋势.
关键词:
Z箍缩等离子体
罗斯滤片
软X射线能谱 相似文献
178.
179.
W. Gao M. Li R. Klie E.I. Altman 《Journal of Electron Spectroscopy and Related Phenomena》2006,150(2-3):136-149
Oxide catalysts are frequently used to convert toxic species to environmentally benign molecules, and to prevent the formation of toxic species in the first place. In this paper, growth and characterization of model oxide systems employed in both approaches is discussed. An example of the former approach is the selective catalytic reduction (SCR) of NO emitted from power plants by NH3, which employs tungsten and vanadium oxides supported on the anatase polymorph of TiO2. To model SCR catalysts, epitaxial titanium, vanadium and tungsten oxide films were grown using molecular beam epitaxy and magnetron sputtering. Two different anatase orientations were grown on LaAlO3 substrates and their interactions with vanadia were characterized. On LaAlO3 (0 0 1), anatase exposed a (4 × 1) reconstructed (0 0 1) surface. Vanadia lifted the reconstruction and at 1 ML a (1 × 1) surface with mostly V5+ was observed. Continued V2O5 growth led to loss of order, but at high temperatures epitaxial VO2 could be grown; vanadia behaved similarly on anatase films on LaAlO3 (1 1 0). Results suggested that the monolayer is pseudomorphic with O adsorption oxidizing the surface V to 5+, since the anatase structure cannot accommodate more bulk oxygen, only a monolayer can be pseudomorphic and have only V5+. Thus the vanadia monolayer has unique structural and chemical properties that can help explain why vanadia monolayers on TiO2 are much more active than bulk V2O5. For WO3, a series of added row reconstructions were observed as the epitaxial films were reduced. The effect of these structures on surface chemistry was characterized by studying 1-propanol adsorption. The results indicated that the structure of the WO3 surface did not alter its catalytic function but had a strong effect on reaction kinetics. As an example of a system where catalysts prevent the formation of toxic species, the reactivity of oxidized Pd surfaces used in CH4 catalytic combustion were studied. An ordered PdO-like monolayer was found to be less reactive towards CO than adsorbed O on Pd. On the other hand, the PdO layer favored a lower activation energy C3H6 oxidation pathway. The results indicated that Pd oxidation reduces the sticking coefficient of reactive species but once molecules adsorb, the oxide surface can reduce the activation energy for subsequent reaction. 相似文献