Pixel-based partially coherent image method for maskless lithography system

Maskless lithography (ML) provides a fast and low-cost method for projecting the images of IC or micro features onto photoresist. However, it needs an efficient simulation method to evaluate the performance of lithography process. In this paper, a pixel-based partially coherent image method for digital micro-mirror device (DMD) based ML is proposed based on the linear invariant theory. In our method, the mask is sampled by DMD pixel (each pixel corresponding to each micro-mirror) and expressed by rect function. Using the shift theory of Fourier transform and the stacked pupil operator approach, we build a matrix Φ for system response function of rect function. If the DMD pixel state matrix is S, then the aerial image can be calculated with two matrix multiplication I(x,y) = SΦ.     

膨胀机力学模拟试验装置

为了适应当前发展的需要,本试验装置可以研究G-M制冷机中的膨胀机在动态环境下能否可靠工作,为其提供了强有力的试验平台。本装置可以单独实现水平面的旋转或垂直面的翻转,还可以同时实现水平面的旋转和垂直面的翻转。对G-M制冷机扩大应用领域是不可或缺的试验装置。     

Beam Combination using Stimulated Brillouin Scattering for the Ultimate High Power-Energy Laser System Operating at High Repetition Rate over 10 Hz for Laser Fusion Driver

After the laser was invented in 1960, a phase conjugation mirror has been respected to be the most fantastic one for the laser resonator composition because it can compensate any distortions of the laser beams occurred by the many inhomogenuities of the laser media and optical components. Among the many phase conjugation configurations, the stimulated Brillouin scattering phase conjugation mirror is the most simple one and many researchers have tried to utilize it to develop high power/energy laser systems. For realizing a high energy/power laser system the thermal problem is the most difficult to solve, and some researchers suggested a beam combination technique to reduce the thermal load of the big laser media to many small sized ones. To accomplish the beam combination using stimulated Brillouin scattering phase conjugation mirrors (SBS-PCMs), it is necessary to lock/control the phases of the SBS-PCMs. And some researchers have developed several ways for it, but they can lock the phases of a limited number of beams overlapped at the foci less than 5, or lock the phases by back-seeding technique but it loses the phase conjugation characteristics. For realization of the laser fusion driver, it is necessary to combine more than 10 or 100 beams. And the authors have developed recently a new phase controlling/locking technique which is isolated and independent totally from other beams and it can be applied to an unlimited number of beams in principle.     

Widely tunable long-period fiber grating with nm-thick higher refractive index film overlay

By introducing a four-layer step-index waveguide modeling, the characteristics of long-period fiber grating (LPFG) with an nm-thick film overlay, which has higher refractive index than that of fiber cladding are investigated in detail. The influence of both the overlay thickness and refractive index on the tuning ability of LPFG is analyzed. The numerical results demonstrate that spectral response of LPFG is divided into three distinct regions as the overlay deposition increases and the shift of resonant wavelength is drastic in some special thickness range. In conjunction with higher-order cladding mode coupling and fiber cladding etching, the sensitivity of LPFG to the overlay refractive index is enhanced significantly and over 120 nm resonant wavelength tunable range is achieved.     

智能相机管理系统的设计与实现

针对传统的文本编程效率低下、智能相机只允许本地监视以及监视界面固定等问题,自主研发了一套集图形化编程、任务运行、数据监控等功能于一体的智能相机管理系统;分析了智能相机管理系统在编程、运行与监视过程中的功能需求,并进行系统结构的划分和设计;构建图形化图像处理单元、可视化编程界面以实现图形化编程功能;采用网络通讯方式,实现智能相机配置过程的同步、远程监控以及与其他设备的数据交互;讨论了系统中的数据管理模型;最后,通过应用实例验证该系统在工业生产中的可行性。验证结果表明,该系统能缩短开发时间,降低用户开发成本,并能对生产线上的智能相机进行有效的管理。     

掺铒聚合物狭缝波导放大器的增益特性研究

设计了一种高浓度稀土铒掺杂聚合物填充硅狭缝结构的平面光波导放大器（工作波长1 550 nm,泵浦波长1 480 nm）,能够在低泵浦下获得高增益,可以应用于硅基光互联的损耗补偿。通过扫描电镜照片观察发现,合成的铒掺杂聚合物材料具有良好的纳米狭缝填充能力。考虑铒离子的合作上转换和激发态吸收,利用铒离子四能级跃迁模型,建立原子速率方程和光功率传输方程,数值仿真分析了聚合物光学性质、狭缝波导结构参数及信号光泵浦光功率等放大器增益特性的影响因素。这种具有纳米截面尺寸的光波导放大器,获得4.5 dB的信号光相对增益仅需要1.5 mW的泵浦光,展现了良好的集成光学应用前景。为了进一步提高增益,引入了多层狭缝结构,四层狭缝波导的重叠积分因子比一层狭缝的高42%。     

An eye behavior measuring device for VR system

This work presents an eye-tracking and pupil size-measuring device that interfaces with a computer for applications useful in psychometry, ophthalmology, physiology and virtual reality (VR) systems. This system utilizes a change-coupled device (CCD) camera, appropriate lenses, PC with frame grabber and a DSP unit with various types of VR equipment, i.e., HMD, simulator or LCD projection device. The digital signal processing unit is used to calculate the average brightness and contrast of the VR video image. A CCD camera with various attachments can be mounted on various VR systems to capture the human eye image for testing. An image capture card and a personal computer are used to analyze the test image. From the eye digital image, the computer obtains data on the pupil size and a trace of the tested eye. A pattern recognition computer program and five measurement parameters are used to distinguish the position of the pupil, calculate the pupil location coordinate and analyze the physical conditions of the user. These data can be plotted against the average brightness and contrast of the VR video image in real time. This information is shown on the screen of a personal computer and used for cross-link analysis. This eye-tracking interface can determine the position of a subject's pupil and map that position into a display point on a computer screen. The pupil size and location data versus the average brightness and contrast of a VR video image are computed in real time.     

A Lattice Hydrodynamic Model for Traffic Flow Accounting for Driver Anticipation Effect of the Next-Nearest-Neighbor Site

In this paper, a new lattice hydrodynamic model is proposed by incorporating the driver anticipation effect of next-nearest-neighbor site. The linear stability analysis and nonlinear analysis show that the driver anticipation effect of next-nearest-neighbor site can enlarge the stable area of traffic flow. The space can be divided into three regions: stable, metastable, and unstable. Numerical simulation further illuminates that the driver anticipation effect of the next-nearest-neighbor site can stabilize traffic flow in our modified lattice model, which is consistent with the analytical results.     

光锥与CCD耦合器件调制传递函数的测试方法

采用直接对倾斜刀口成像的方法测量光锥与CCD耦合器件的调制传递函数.这种方法对静止刀口成像,利用刀口与光锥纤维列间的一定倾斜角度,在垂直于刀口的不同行之间形成不同的值,代替了传统刀口扫描中的扫描装置,并无需保证刀口与阵列的平行,相应地减小了测量误差. 在数据处理中采用了二次平均法,即对同一幅图像得出的不同位置值进行平均及多次测量结果平均,在一定程度上消除了由于离散性产生的空间非平移不变性的影响.     

线阵CCD光积分时间的智能控制技术及其应用

本文提出了一种新型线阵ＣＣＤ驱动电路的设计方法，可以在不改变系统工作主频的情况下，连续地改变ＣＣＤ的光积分时间，并且可通过计算机接口实现智能调整，此项技术已成功应用于热扎线材外径的线检测仪中，控制效果极其理想。