Determination of optical constants in DUV/VUV

An approach for determining the optical constants of the weakly absorbing substrate is developed and applied to obtain the parameters of CaF2 and fused silica substrates in deep ultraviolet （DUV） and vacuum ultraviolet （VUV） range. A method for extracting the optical constants of thin films deposited on strongly absorbing substrate, which is based on the reflectance spectra measured at different angles of incidence, is also presented. The optical constants are determined by fitting the measured spectra to the theoretical models. The proposed method is applied to determine the refractive index and extinction coefficient （n, k） of MgF2 film deposited on silicon substrate by electron beam evaporation with substrate temperature 300 ℃ and deposition rate 0.2 nm/s. The determined n, k values at 193 nm are 1.433 and 9.1×10-4, respectively.     

硅衬底GaN基LED薄膜芯片的应力调制

将Si衬底GaN基LED外延薄膜经晶圆键合、去硅衬底等工艺制作成垂直结构GaN基LED薄膜芯片,并对其进行不同温度的连续退火,通过高分辨X射线衍射(HRXRD)研究了连续退火过程中GaN薄膜芯片的应力变化。研究发现:垂直结构LED薄膜芯片在160~180℃下退火应力释放明显,200℃时应力释放充分,GaN的晶格常数接近标准值。继续升温应力不再发生明显变化,GaN薄膜的晶格常数只在标准晶格常数值附近波动。扫描电子显微镜给出的bonding层中Ag-In合金情况很好地解释了薄膜芯片应力的变化。     

Effects of Carrier Gas on Carbon Incorporation in GaN

GaN epitaxial layers were grown on Si （111） substrates by metal organic chemical vapor deposition. Carbon concentrations in the films grown in different ambients were measured by secondary ion mass spectrometry. The results show that the carbon incorporation is strongly dependent on the H2 flow rate when the NH3 flow rate is small, but insensitive to the H2 flow rate when the NH3 flow rate is sufficient large. We conclude that H2 can inhibit the dissociation of NH3 and result in a less active N source; an insufficiently active N source causes more N vacancies, which enhances carbon incorporation.     

Improved crystal quality of GaN film with the in-plane lattice-matched Ino.17Alo.s3N interlayer grown on sapphire substrate using pulsed metal-organic chemical vapor deposition

We report on an improvement in the crystal quality of GaN film with an Ino.17Alo.83N interlayer grown by pulsed metal-organic chemical vapor deposition, which is in-plane lattice-matched to GaN films. The indium composition of about 17% and the reductions of both screw and edge threading dislocations （TDs） in GaN film with the InA1N interlayer are estimated by high resolution X-ray diffraction. Transmission electron microscopy （TEM） measurements are employed to understand the mechanism of reduction in TD density. Raman and photoluminescence measurements indicate that the InA1N interlayer can improve the crystal quality of GaN film, and verify that there is no additional residual stress induced into the GaN film with InA1N interlayer. Atomic force microscopy measurement shows that the InA1N interlayer brings in a smooth surface morphology of GaN film. All the results show that the insertion of the InA1N interlayer is a convenient method to achieve excellent crystal quality in GaN epitaxy.     

图形衬底对多周期InGaAs量子点自组装生长的影响

量子点器件技术广泛应用于量子计算和光电器件上.成核位置的均匀性、有序性和尺寸一致性,可以有效提高光电器件性能.为了实现阵列量子点的可控性,本文采用湿法刻蚀制备图形化衬底,理论上解释了铟原子在图形化衬底上成核现象,产生有序的量子点分布特征,发现图形衬底的缺陷诱导在平台边缘和沟壑边缘成核,形成较大的量子点.在Stranski-Krastanow模式下图形衬底制备多周期量子点,发现多周期生长可以弱化台阶结构对量子点分布的限制作用.     

p型G aSb窗口层在热光伏电池中的应用研究

为了提高GaSb热光伏电池的转换效率,在电池结构中引入p+-GaSb窗口层,研究了生长基底、衬底温度和反应物源温度对p+-GaSb薄膜性能的影响,并优化了电池结构中p+-GaSb窗口层的厚度和掺杂浓度.实验结果表明,生长基底和温度等制备参数影响着p+-GaSb薄膜的结构特性和电学特性,而且,较薄的高掺杂p+-GaSb层有利于提高电池性能.通过测试和仿真,热光伏电池的转换效率达到9.49;(AM1.5测试)和20.34;(AFORS-HET仿真).     

蓝宝石衬底材料的研究及应用进展

蓝宝石因为其生产技术成熟、稳定性好、性价比高而被广泛应用于光电领域,成为GaN基光电器件的主要衬底材料.传统的蓝宝石衬底生长GaN薄膜存在许多问题,如由晶格常数不同产生的晶格失配、热应力失配等,且GaN薄膜结晶质量较差、光线提取效率低.介绍了图形化蓝宝石衬底技术在制作GaN基LED器件中的应用,比较了几种图形化衬底对LED的发光性能的影响.在图形化蓝宝石衬底上采用PVD法生长AlN薄膜,可以降低GaN薄膜的螺旋位错和刃位错、提高MOCVD生长效率、显著提高设备利用率.另外,介绍了蓝宝石衬底在SOS领域的应用,列出了SOS工艺对蓝宝石衬底的具体要求.蓝宝石作为一种重要的衬底材料,未来的发展前景会更加广阔.     

衬底对单层二硫化钼光学性质的影响

为了实现二硫化钼器件化应用,通过机械剥离和PMMA纳米转移相结合的方法,研究二氧化硅、氮化硅和蓝宝石衬底对单层二硫化钼拉曼光谱以及光致发光光谱的影响.实验结果表明,单层二硫化钼在二氧化硅、氮化硅及蓝宝石衬底间转移会释放应力.氮化硅和蓝宝石衬底对单层二硫化钼引入p型掺杂,导致转移后拉曼光谱中的403 cm-1处A1g峰发生0.48 cm-1和1.20 cm-1的蓝移,光致发光光谱中的位于662 nm处的I峰有5.44 nm和12.73 nm的红移.本工作对单层二硫化钼的应用具有重要意义.     

柔性砷化镓薄膜太阳电池剥离(lift-off)技术研究

对柔性砷化镓薄膜太阳电池关键技术进行研究,通过对柔性衬底表面处理、外延片/柔性衬底键合、衬底剥离技术和柔性薄膜外延层器件工艺技术等进行研究,成功地将砷化镓电池外延层转移到柔性聚酰亚胺薄膜衬底上,研制出效率为30.5;(AM0,25℃)的柔性砷化镓薄膜太阳电池,其重量比功率达到2153 W/kg,为将来卫星及临近空间飞行器的应用打下技术基础.     

不同衬底对溅射Pb(Zr_(0.8)Ti_(0.20))O_3薄膜的结构及其性能的影响

利用射频磁控溅射法在低阻Si,Si O2/Si以及Pt/Ti/Si O2/Si等不同衬底上制备了Pb(Zr0.8Ti0.2)O3薄膜.利用XRD,SEM等对薄膜的结构性能进行了分析,结果发现不同衬底对溅射制备的PZT薄膜的结构有很大影响.在Pt/Ti/Si O2/Si衬底上制备的PZT薄膜经600℃退火1h后,薄膜表面光滑、无裂纹,XRD分析显示PZT薄膜呈完全钙钛矿结构,测试PZT薄膜的电学性能,表明PZT薄膜具有良好的介电性能.