偏压及测试环境对离子束DLC膜摩擦学行为的影响

采用线性阳极层离子束技术制备了类金刚石薄膜(DLC膜),研究了不同衬底负偏压和测试环境对DLC薄膜摩擦学性能的影响.结果表明:在-50V偏压下,薄膜硬度和弹性模量最大,这主要与薄膜中高的sp³含量相关;衬底负偏压对薄膜在室温大气条件下的摩擦学性能影响不显著,薄膜总体呈现较低的摩擦系数和磨损率,显示出优异的抗磨损性能;线性离子束制备的含氢DLC薄膜的摩擦学行为受湿度及环境气氛影响较大,归因于环境中的氧气和水分造成的摩擦化学反应.     

Studies of Spectroscopic Ellipsometry in Cd1-xMnxTe/CdTe Superlattices

Cd1-xMnxTe/CdTe superlattices and thin films were grown by molecular beam epitaxy on GaAs （001） substrates. Spectroscopic ellipsometry measurements were performed on Cd1-x Mnx Te/ CdTe superlattices with compositions x = 0.4, 0.8, and Cd1-xMnx Te thin films with x = 0.2, 0.4, 0.6 at room temperature in the photon energy range 1.4-5 eV. In superlattices the pseudodielectric functions measured by ellipsometry show specific features related to the exciton transition between quantized interbands. The exciton transitions related to the heavy holes of 11 H, 22H, and 33H are observed and identified. In thin films spectroscopic ellipsometry allows the clear identification of the energy gap Eo. Additionally, critical point transitions are observable in both the spectra of the superlattices and films. Photoreflectance spectra were also performed at room temperature in order to compare with our ellipsometry results. After taking into account the strain-induced and quantum confinement effects, the theoretical calculations are in good agreement with our experimental spectra. Ellipsometry appears to be a suited technique to monitor the MBE growth, ultimately also in situ, of diluted magnetic low-dimensional systems.     

生长温度对In0.53Ga0.47As/InP的LPMOCVD生长影响

利用LPMOCVD技术在InP衬底生长了InxGa1-xAs材料，获得表面平整．光亮的In0.53Ga0.47As外延层。研究了生长温度对InxGa1-xAs外延层组分、表面形貌、结晶质量、电学性质的影响。随着生长温度的升高，为了保证铟在固相中组分不变，必须增加三甲基铟在气相中的比例。在生长温度较高时，外延层表面粗糙。生长温度在630℃与650℃之间，X射线双晶衍射曲线半高宽最窄，高于或低于这个温度区间，半高宽变宽。迁移率随着生长温度的升高而增加,在630℃为最大值，然后随着生长湿度的升高反而降低。生长温度降低使载流子浓度增大，在生长温度大于630℃时载流子浓度变化较小。     

Si表面上生长的ZnO薄膜的阴极射线荧光

几种不同温度下退火的用直流溅射法生长的ZnO／Si样品的阴极射线荧光(CL)光谱显示，当退火温度低于等于800℃时，随着退火温度的升高，薄膜的晶体质量得到了改善，这主要体现在390nm紫外带的发射强度与505nm绿带发射强度的相对比值迅速增加，同时也发生了绿带的红移以及窄化效应。但退火温度超过800℃时绿带就不再红移了，其峰值为525nm。当退火温度为950℃时，紫外带几乎消失，而只剩下绿带，且与纯硅酸锌样品的CL谱一致，掠入射X射线衍射测量表明，确有三角相三元化合物硅酸锌的产生。因此，从ZnO／Si异质结的质量来看，直流溅射法可能不适宜用于生长这样的异质结：因为当退火温度低于800℃且相差较大(如600℃)时，不能得到产生强ZnO紫外发光的晶体质量，而当退火温度接近或高于800℃时，虽然zn0晶体质量得到了改善从而紫外发光份额迅速增加，但同时也产生了新的三元化合物硅酸锌，将严重影响ZnO／Si异质结的电学输运特性。     

Electrical Properties of La-Doped Al2O3 Films on Si （100） Substrates as a High-Dielectric-Constant Gate Material

Amorphous La-doped Al2O3 （La： Al2O3） thin films are deposited on n-type （100） Si substrates by rf magnetron co-sputterlng. The composition of the deposited films is measured by energy dispersive x-ray spectroscopy： Capacitance-voltage measurement shows that the dielectric constant k of La-doped Al2O3 films ranges from 8.5 to 11.6 with the increasing La content, and the highest k value of 11.6 is obtained for the 20.14% La content film. In the structure of the Al/La：Al2O3/Si metal oxide semiconductor, the dominant conduction stems from the space- charge-limited current at different temperatures. In addition, the wavelength dependence of the transmittance is studied by ultraviolet spectroscopy and the band gap of all the deposited films is above 5.5eV. The results demonstrate that La-doped Al2O3 can meet the requirement of next-generation gate materials.     

温度对纳米ZnO膜电学光学性质影响的研究

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在织构Ni衬底上用电子束蒸发沉积YSZ阻挡层

用轧制及再结晶方法制备了高度立方织构的金属Ni(镍）基带。采用电子束蒸发的方法在几个厘米长的Ni基带表面上生长YSZ（钇稳定二氧化锆）阻挡层。X射线衍射分析表明，YSZ层具有纯c轴取向和良好的平面内取向及立方织要。扫描电镜观察表明，YSZ阻挡层连续致密无裂纹。     

聚四氟乙烯薄膜的制备及其红外光谱研究

用射频磁控溅射方法分别在NaCl和Si基底上制备了聚四氟乙烯薄膜．通过红外吸收光谱的研究分析了薄膜中的成分及分子链结构． 关键词：