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171.
172.
The feature scale planarization of the copper chemical mechanical planarization (CMP) process has been characterized for two
copper processes using Hitachi 430-TU/Hitachi T605 and Cabot 5001/Arch Cu10K consumables. The first process is an example
of an abrasive-free polish with a high-selectivity barrier slurry, while the second is an example of a conventional abrasive
slurry with a low-selectivity barrier slurry. Copper fill planarization has been characterized for structures with conformal
deposition as well as with bumps resulting from bottom-up fill. Dishing and erosion were characterized for several structures
after clearing. The abrasive-free polish resulted in low sensitivity to overpolish and low saturation levels for dishing and
erosion. Consequently, this demonstrated superior performance when compared to the International Technology Roadmap for Semiconductors
(ITRS) 2000 roadmap targets for planarization. While the conventional slurry could achieve the 0.13-μm technology node requirements,
the abrasive-free polish met the planarization requirements beyond the 0.10-μm technology node. 相似文献
173.
D. J. Plazek C. A. Bero S. Neumeister G. Floudas G. Fytas K. L. Ngai 《Colloid and polymer science》1994,272(11):1430-1438
By making creep and recoverable creep measurements of a nearly monodisperse low molecular weight poly(methyl phenyl siloxane) sample, we have found on decreasing temperature towardsT
g that there is continuously a change in the viscoelastic spectrum concomitant with a decrease of the steadystate recoverable compliance. This behavior is exactly the same as previously observed in low molecular weight poly(styrene), proving that this spectacular anomaly in the viscoelasticity of low molecular weight polymers is general and deserves an explanation. Photon correlation spectroscopic measurements performed on the same sample have extended the observation of the viscoelastic response to shorter times and the result corroborates the trend of variation established by the creep data.Dedicated to Prof.Dr. E. W. Fischer on his 65th Birthday. Prof.Dr. Fischer is known for his valuable contribution to fosterine, international collaboration of research in polymer science. This work is an example of his contribution because it would not be possible without him bringing us together. One of us (KLN) would like to take this opportunity to thank Prof. Dr. Fischer for his unwaiving support of the 1st (Crete) and the 2nd (Alicante) International Discussion Meeting on Relaxations in Complex Systems 相似文献
174.
We prove that to most of the known hypercyclic operators A on separable Banach spaces there exist compact (compact convex, compact connected) subsets K of E such that each compact (compact convex, compact connected) subset of E can be approximated with respect to Hausdorff's distance by for suitable .
Received July 8, 1997, in final form October 17, 1997 相似文献
175.
射频板条CO_2激光器并联谐振技术的研究 总被引:1,自引:0,他引:1
本文利用周期性网络模型计算了射频板条CO2激光器电极的纵向电压分布.探讨了并联谐振技术在板条器件中获得成功运用的原因.提出了利用并联谐振技术进一步提高电压分布均匀性的两个途径. 相似文献
176.
177.
Boundedness of commutators on homogeneous Herz spaces 总被引:9,自引:0,他引:9
The boundedness on homogeneous Herz spaces is established for a large class of linear commutators generated by BMO(R
n
) functions and linear operators of rough kernels which include the Calderón-Zygmund operators and the Ricci-Stein oRfiUatory
singular integrals with rough kernels.
Project supponed in pan by the National h’atural Science Foundation of China (Grant No. 19131080) and the NEDF of China. 相似文献
178.
一种实现最佳用户检测的非线性优化神经网络 总被引:2,自引:0,他引:2
本文提出并讨论了实现码分多址(CDMA)系统上最佳多用户检测(MUD)的一种神经网络方法。该方法通过将最佳多用户检测视为非线性优化组合问题,利用神经网络能有效求解非线性优化问题的优势,导出了一种非线性优化神经网络来实现最佳多用户检测,理论分析和计算机模拟表明,所提出的神经网络具有可实时应用的动态性能和较传统方法优越得多的误码率性能和抗多址干扰的性能。 相似文献
179.
Boole函数的线性可分性是前向人工神经网络理论中的一个比较困难的问题之一。目前仅对变量数n≤7的某些问题给予讨论。当n≥8时,尚无判别Boole函数线性可分的一般准则,更无线性可分Boole函数的计数公式。基于此,本文详细地研究了与Boole函数线性可分性有关的n-维超立方体的基本理论,包括n-维超立方体的基本性质、超立方体中的平行线、子超立方体的计数等,并给出了构造n-维超立方体图的一种新方法。 相似文献
180.
Peter Imkeller 《Probability Theory and Related Fields》1996,106(1):105-135
Summary. The analytic treatment of problems related to the asymptotic behaviour of random dynamical systems generated by stochastic
differential equations suffers from the presence of non-adapted random invariant measures. Semimartingale theory becomes accessible
if the underlying Wiener filtration is enlarged by the information carried by the orthogonal projectors on the Oseledets spaces
of the (linearized) system.
We study the corresponding problem of preservation of the semimartingale property and the validity of a priori inequalities
between the norms of stochastic integrals in the enlarged filtration and norms of their quadratic variations in case the random
element F enlarging the filtration is real valued and possesses an absolutely continuous law. Applying the tools of Malliavin’s calculus,
we give smoothness conditions on F under which the semimartingale property is preserved and a priori martingale inequalities are valid.
Received: 12 April 1995 / In revised form: 7 March 1996 相似文献