抛光液组成对LiNbO3 CMP去除速率的影响

影响LiNbO3化学机械抛光速率的因素很多,如抛光液组成、抛光垫质量、抛光工艺参数等.主要研究了抛光液对去除速率的影响,采用磨料 碱 活性剂的配方,首先分析了抛光液各成分对去除速率的影响机理,然后结合各因素的部分相关实验,从机械、化学角度分析其性质特点,对LiNbO3晶片的去除速率进行了研究.结果表明,在保证获得较好抛光表面的前提下,采用的磨料质量分数越高越好,但活性剂体积分数不宜过高,溶液pH值采用无机碱进行调节,即可获得较高的去除速率.     

纳米级三氧化二铝对碱性钨抛光液的影响

研究了纳米级三氧化二铝颗粒的加入对以二氧化硅为磨料的碱性钨抛光液的影响。首先用单一因素法分析了三氧化二铝与二氧化硅质量比对原有碱性钨抛光液的去除速率的影响,以及氧化剂体积分数和pH值对抛光液去除速率的影响,取最优值,然后对添加三氧化二铝抛光液抛光后晶圆表面粗糙度进行了测试分析。实验结果显示在三氧化二铝与二氧化硅质量比为1∶2,二氧化硅水溶胶与去离子水体积比为1∶1,氧化剂体积分数为2%,pH值为9时,去除速率达到175 nm/min,较原有碱性钨抛光液提高约1倍,表面粗糙度为2.24 nm,能满足实际生产要求。     

一种应用于全印制电子沉铜催化浆料制备及其应用

制备出一种应用于全印制电子沉铜催化浆料,采用电化学工作站的开路电位-时间(OCP-t)的技术,测定活化浆料引发沉铜的Emix-t曲线,比较不同含银量对引发过程的影响;在此基础上,应用于制造电子标签(RFID)。结果表明:随银含量增大,缓慢生成铜活性中心的诱导时间越短,活性越高;沉铜催化浆料及其对应的工艺加成法制作的电子标签导电性和结合力符合工业化要求,可以作为一种全印制电子技术来推广应用。     

化学机械抛光浆料研究进展

化学机械抛光(CMP)作为目前唯一可以实现全面平坦化的工艺技术,已被越来越广泛地应用到集成电路芯片、计算机硬磁盘和光学玻璃等表面的超精密抛光.介绍了CMP技术的发展背景,以及目前国内外抛光浆料的研究现状,并根据CMP浆料磨料的性质,将其分为单磨料、混合磨料和复合磨料浆料,对每一种浆料做了总体描述.详细介绍了近年来发展的复合磨料制备技术及其在CMP中的应用,并展望了CMP技术的发展前景以及新型抛光浆料的开发方向.     

Post-CMP cleaning using acoustic streaming

Noncontact surface cleaning is a desirable process in post-chemical mechanical polishing cleaning. High-frequency megasonic cleaning utilizes acoustic streaming as the dominant particle removal mechanism. It is widely used in the semiconductor industry for the removal of particulate contamination. This paper introduces recent results that involve the removal of silica slurry using megasonic cleaning. A noncontact (megasonic) cleaning process for the removal of slurry residues from dipped and polished wafers is presented. Complete particle removal (100%) was achieved using megasonics with deionized water with 1% NH₄OH using wafers dipped in silica slurry. The optimum conditions for megasonic cleaning (power, temperature, and time) were determined for the removal of the silica slurry. Up to 99% particle removal from polished wafers was accomplished using noncontact megasonic cleaning with 1% ammonia for 15 min.     

抛光工艺对硅片表面Haze值的影响

随着超大规模集成电路的快速发展,硅片表面的Haze值对于现代半导体器件工艺的影响也越来越受到人们的重视.通过实验研究了精抛光工艺参数对硅片表面Haze值的影响规律.结果表明,随着抛光时间的延长,硅的去除量逐渐增大,硅片表面Haze值逐渐降低;同时抛光过程中机械作用与化学作用的协同作用对Haze值也有较大影响.随着抛光液温度的降低与抛光液体积流量的减小,化学作用减弱,硅片表面Haze值逐渐减小.而随着抛光压力的增大,机械作用逐渐起主导作用,硅片表面Haze值逐渐降低.但当Haze值降低到某一数值后,随着硅去除量的增大、抛光液温度的下降、抛光液体积流量的降低、抛光压力的增大,硅片表面的Haze值基本保持不变.     

新型碱性抛光液对300mm TaN镀膜片CMP效果评估

TaN由于其良好的性能广泛用于布线铜与介质之间的阻挡层和黏附层.在对直径为300 mm的TaN镀膜片进行化学机械抛光(CMP)后,对比并分析了两种碱性抛光液对TaN去除速率、片内非均匀性、去除速率选择性和表面粗糙度的影响.结果表明,经过自主研发且不合氧化剂的碱性阻挡层抛光液抛光后,TaN的去除速率为40.1 nm/min,片内非均匀性为3.04％,介质、TaN与Cu的去除速率之比为1.69∶1.26∶1,中心、中间以及边缘的表面粗糙度分别为0.371,0.358和0.366 nm.与商用抛光液抛光结果相比,虽然采用自主研发的抛光液抛光的去除速率低,但片内非均匀性以及选择性均满足商用要求,且抛光后TaN表面粗糙度小,易清洗,无颗粒沾污.综合实验结果表明,自主研发的高性能碱性抛光液对TaN镀膜片具有良好的抛光效果,适合工业生产.     

煤的岩相显微组分对水煤浆性质的影响

通过对不同变质程度煤的岩相显微组分分析，考察了煤的岩相显微组分对水煤浆性质的影响。结果表明，在相近的灰分含量下，对于烟煤较高的镜质组、较低的丝质组含量有利于煤的成浆性和稳定性。从多元线性回归结果来看，镜质组和丝质组的含量对煤浆成浆性和流变性的影响较为明显，稳定组分的含量对水煤浆性质的影响较小。丝质组含量对稳定性作用明显，当煤中丝质组含量低于30%时，煤浆产生软沉淀的时间一般都在15d以上。煤的平均最大镜质组反射率与煤的成浆性具有较好的相关性，成浆性随煤的最大镜质组反射率增加而增加，因此可以用最大镜质组反射率来预测煤的成浆性。     

一种适用于三相过程的高活性和高稳定性的甲醇合成催化剂

Methanol is one of the most important basic feedstock for the organic chemical industry and also is a potential fuel. Although the technology for the production of methanol is generally considered mature, much attention is still being paid to the improvements of the process, equipment and catalyst.     

Pretreatment of corn stover using wet oxidation to enhance enzymatic digestibility

Corn stover is an abundant, promising raw material for fuel ethanol production. Although it has a high cellulose content, without pretreatment it resists enzymatic hydrolysis, like most lignocellulosic materials. Wet oxidation (water, oxygen, mild alkali or acid, elevated temperature and pressure) was investigated to enhance the enzymatic digestibility of corn stover. Six different combinations of reaction temperature, time, and pH were applied. The best conditions (60g/L of corn stover, 195°C, 15 min, 12 bar O₂, 2 g/L of Na₂CO₃) increased the enzymatic conversion of corn stover four times, compared to untreated material. Under these conditions 60% of hemicellulose and 30% of lignin were solubilized, whereas 90% of cellulose remained in the solid fraction. After 24-h hydrolysis at 50°C using 25 filter paper units (FPU)/g of dry matter (DM) biomass, the achieved conversion of cellulose to glucose was about 85%. Decreasing the hydrolysis temperature to 40°C increased hydrolysis time from 24 to 72 h. Decreasing the enzyme loading to 5 FPU/g of DM biomass slightly decreased the enzymatic conversion from 83.4 to 71%. Thus, enzyme loading can be reduced without significantly affecting the efficiency of hydrolysis, an important economical aspect.