热处理对NiTi形状记忆合金冲蚀磨损性能的影响

采用自制浆罐式砂水冲蚀磨损试验装置研究了4种经不同条件热处理的NiTi合金与1Cr18Ni9Ti不锈钢的冲蚀磨损性能;采用XL-30型扫描电子显微镜观察试样的冲蚀磨损表面形貌;采用MH-6型显微硬度计测量NiTi合金硬度;采用自制拉伸装置测量NiTi合金的力学性能.结果表明:5种试样的冲蚀磨损量随着冲蚀时间、冲蚀速度、砂水比及砂粒度的增加而增大,4种NiTi合金的耐冲蚀性能相近,均明显优于1Cr18Ni9Ti不锈钢,其中试样NiTi-3和NiTi-1表现出较好的耐冲蚀性能;硬度并非NiTi合金冲蚀磨损性能的决定因素,超弹性和超塑性是NiTi合金具有较好耐冲蚀性的主要原因,热处理使得NiTi合金的超弹性变形量减小,但增加了NiTi合金的塑性变形量;合金丝磨损表面不同部位的磨损机理不同,中部为典型的变形磨损,侧面为微切削磨损,5种试样均表现为典型的韧性材料冲蚀磨损特征.     

管内固-液两相流动阻力特性影响因素的敏感性分析

在浆体管道的工程设计中，管道阻力损失是一项关键参数。在大量实验的基础上，本文根据取得的有关实验成果，对影响管内固-液两相流动阻力的4个最主要因素-管径D、颗粒比重S、浆体浓度Cv和倾角θ进行了深入探讨，并采用多因素分析法比较了它们对于固体物料管道水力输送阻力输送阻力损失的影响程度大小关系，从而为在工程设计降低管道输送阻力提供了主要调整手段。     

UV-assisted degradation of propiconazole in a TiO2 aqueous suspension: identification of transformation products and the reaction pathway using GC/MS

Photocatalytic degradation of propiconazole, a triazole pesticide, in the presence of titanium dioxide (TiO₂) under ultraviolet (UV) illumination was performed in a batch type photocatalytic reactor. A full factorial experimental design technique was used to study the main effects and the interaction effects between operational parameters in the photocatalytic degradation of propiconazole in a batch photo-reactor using the TiO₂ aqueous suspension. The effects of catalyst concentration (0.15–0.4 gL^?1), initial pH (3–9), initial concentration (5–35 mg L^?1) and light conditions were optimised at a reaction time duration of 90 min by keeping area/volume ratio constant at 0.919 cm² mL^?1. Photocatalytic oxidation of propiconazole showed 85% degradation and 76.57% mineralisation under UV light (365 nm/30 Wm^?2) at pH 6.5, initial concentration 25 mg L^?1 and constant temperature (25 ± 1 °C). The Langmuir–Hinshelwood kinetic model has successfully elucidated the effects of the initial concentration on the degradation of propiconazole and the data obtained are consistent with the available kinetic parameters. The photocatalytic transformation products of propiconazole were identified by using gas chromatography–mass spectrometry (GC/MS). The pathway of degradation obtained from mass spectral analysis shows the breakdown of transformation products into smaller hydrocarbons (m/z 28 and 39).     

水煤浆喷嘴热冲蚀磨损机理研究

采用1Crl8Ni9Ti不锈钢、YG8硬质合金和Al2O3／(W，Ti)C陶瓷3种材料制备了水煤浆喷嘴，考察了其在水煤浆雾化和燃烧过程中的热冲蚀磨损机理．结果表明：喷嘴材料的硬度对水煤浆喷嘴的热冲蚀磨损行为具有重要影响；在相同条件下，高硬度的Al2O3／(W，Ti)C陶瓷喷嘴的冲蚀率最低，YG8硬质合金次之，硬度较低的1Crl8Ni9Ti不锈钢喷嘴的冲蚀率最高；在热冲蚀磨损工况下，1Crl8Ni9Ti不锈钢水煤浆喷嘴主要呈现微切削特征，YG8硬质合金水煤浆喷嘴主要呈现晶粒剥落特征，而Al2O3／(W，Ti)C陶瓷水煤浆喷嘴主要呈现研磨损伤和热崩特征．     

耐磨环氧胶粘涂层冲蚀磨损特性的研究

本文对气固冲蚀和浆体冲蚀条件下耐磨环氧胶粘涂层的磨损特性进行了研究。结果表明,这种涂层的冲蚀磨损是由粘结剂的磨损和抗磨填料的磨损所组成;填料粒度和磨料粒度都对涂层的气固冲蚀磨损有影响,但在给定的试验条件下,填料粒度对涂层的浆体冲蚀磨损影响甚微。文章指出,耐磨环氧胶粘涂层在气固冲蚀和浆体冲蚀下的磨损机理相似,但磨损规律却有所不同;耐磨环氧胶粘涂层尤其适用于浆体冲蚀的场合,可以明显地提高机械过流部件的使用寿命。     

切割速度对硅片翘曲的影响

根据线切割机的工作原理,结合12英寸(1英寸=2.54 cm)单晶直径大、SiC磨削路线长和磨削发热量大的特点,制定了包括线速度、耗线量、砂浆温度、砂浆流量及各部分温度的工艺参数。根据单位时间内钢线的切割面积相等的理论设计了对称变化的切割速度曲线,又根据砂浆磨削能力的影响设计了非对称变化的切割速度曲线。用两种切割速度变化曲线进行了对比实验,根据实验结果确定在实际切割中必须考虑砂浆磨削能力的影响从而必须采用非对称的切割速度变化曲线。分析了影响线切割机加工质量的因素,并且给出了提高线切割机加工质量的改善方向。     

碱性抛光液对铜布线电特性的影响

随着互连电路的规模发展到亚微米级,互连延迟已经成为超过门延迟的重要因素。减小延迟在互连结构中是不可避免的问题。化学机械抛光是最适合在多层铜互连结构中达到平整化目的的手段。出于对整体过程的考虑,我们将考察化学机械抛光对铜晶圆片电特性的影响。在这篇文章中,我们将考察两种抛光液在化学机械抛光中的影响,一种抛光液是酸性抛光液,来自于SVTC,另一种是碱性抛光液,由河北工业大学提供的。着重考察了三个方面的特性,电阻,电容和漏电流。电阻测试结果显示,河北工业大学提供的抛光液抛光后,电阻更小。而被两种抛光液抛光后的电容则相差不多,电容值分别为1.2 E^-10F 和1.0 E^-10F。同样,河北工业大学提供的抛光液抛光后的漏电流是1.0E^-11A,低于SVTC提供的酸性抛光液。结果显示,河北工业大学提供的碱性抛光液会产生小的碟形坑和氧化物损失,优于SVTC提供的酸性抛光液。     

Energy losses of ice slurry in pipe sudden contractions

The paper presents the results of the experimental research on the ice slurry loss coefficient during its flow through sudden contractions. Experimental studies were conducted using a few of the most common contractions of copper pipes. Six contraction ratios were covered: 0.500, 0.615, 0.650, 0.769, 0.800 and 0.813. In the experimental research, the mass fraction of solid particles in the slurry ranged from 20 to 30 (20%, 25%, 30%). Research results allow for determining the theoretical correlation for the ice slurry, in order to calculate the loss coefficient in contractions during laminar flow. The results of experimental investigations also confirmed that the loss coefficients in contractions in turbulent (transitional) flow of the ice slurry are the same as in the case of Newtonian liquids. The paper also presents original theoretical correlation for calculating the kinetic energy correction factor in the laminar range flow of liquid in the Bingham model. This correlation is used in this work for calculation of the ice slurry flow through contractions.     

Alkaline barrier slurry applied in TSV chemical mechanical planarization

We have proposed a TSV （through-silicon-via） alkaline barrier slurry without any inhibitors for barrier CMP （chemical mechanical planarization） and investigated its CMP performance. The characteristics of removal rate and selectivity of Ti/SiO2/Cu were investigated under the same process conditions. The results obtained from 6.2 mm copper, titanium and silica show that copper has a low removal rate during barrier CMP by using this slurry, and Ti and SiO2 have high removal rate selectivity to Cu. Thus it may be helpful to modify the dishing. The TSV wafer results reveal that the alkaline barrier slurry has an obvious effect on surface topography correction, and can be applied in TSV barrier CME     

Cu CMP工艺中新型低pH碱性抛光液稳定性的研究

Abstract： The stability of a novel low-pH alkaline slurry （marked as slurry A, pH = 8.5） for copper chemical mechanical planarization was investigated in this paper. First of all, the stability mechanism of the alkaline slurry was studied. Then many parameters have been tested for researching the stability of the slurry through comparing with a traditional alkaline slurry （marked as slurry B, pH = 9.5）, such as the pH value, particle size and zeta potential. Apart from this, the stability of the copper removal rate, dishing, erosion and surface roughness were also studied. All the results show that the stability of the novel low-pH alkaline slurry is better than the traditional alkaline slurry. The working-life of the novel low-pH alkaline slurry reaches 48 h.