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41.
本征吸除硅片特性研究 总被引:1,自引:0,他引:1
本文描述硅本征吸杂片的特性参数,如吸除区宽度、洁净度,氧沉淀密度、MOS电容寿命,介绍了表面态密度及残余间隙氧浓度的检测方法和工艺对参数的影响及参数之间的内在联系,文章还实验论证了不同参数水平对器件成品率的影响,建立了以MOS电容寿命为主导的参数控制方法,利用本文提供的控制参数,可使CCD-512器件成品率达60%,以上优品率≥85%。 相似文献
42.
43.
An optical system for the parallel evaluation of in- and out-of-plane dynamical deformations will be described. A double pulse laser with pulse separation in the microsecond range is used for the investigations. Two separate interferograms of an object under test, in its undeformed and deformed state, are recorded in a few microseconds. The object is illuminated from two different directions and imaged onto a CCD sensor. This produces two sensitivity vectors. The reference beams have different directions in order to produce two directional spatial carriers. The Fourier method is used for quantitative evaluation, and the measurements along different sensitivity vectors are separated in the Fourier domain. The phases of the two interferograms are obtained from the complex amplitudes and the two dimensional deformation is calculated from the phases. Experimental results are presented. 相似文献
44.
Q.J. Zhu 《Journal of Mathematical Analysis and Applications》2007,326(1):708-720
Investment systems are studied using a framework that emphasize their profiles (the cumulative probability distribution on all the possible percentage gains of trades) and their log return functions (the expected average return per trade in logarithmic scale as a function of the investment size in terms of the percentage of the available capital). The efficiency index for an investment system, defined as the maximum of the log return function, is proposed as a measure to compare investment systems for their intrinsic merit. This efficiency index can be viewed as a generalization of Shannon's information rate for a communication channel. Applications are illustrated. 相似文献
45.
李斌 《数学的实践与认识》2006,36(8):25-30
在分析我国房地产自有资本收益率操作中所存在问题的基础上,论述了自有资本收益率的实质是自有资金直接资本化率,并在房地产持有期小于抵押贷款期以及房地产持有期和土地批租年限相同的两种情况下,推导出了与土地有限期使用制度相适应的房地产资本化率和自有资本收益率的计算方法,提出了利用债务保障比率的取值范围检验资本化率合理性的基本公式. 相似文献
46.
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48.
Ashraf Bastawros Abhijit Chandra Yongjin Guo Bo Yan 《Journal of Electronic Materials》2002,31(10):1022-1031
The role of a porous pad in controlling material-removal rate (MRR) during the chemical-mechanical planarization (CMP) process
has been studied numerically. The numerical results are used to develop a phenomenological model that correlates the forces
on each individual abrasive particle to the applied nominal pressure. The model provides a physical explanation for the experimentally
observed domains of pressure-dependent MRR, where the pad deformation controls the load sharing between active-abrasive particles
and direct pad-wafer contact. The predicted correlations between MRR and slurry characteristics, i.e., particle size and concentration,
are in agreement with experimentally measured trends reported by Ouma1 and Izumitani.2 相似文献
49.
50.
Bin Han 《Advances in Computational Mathematics》2006,24(1-4):375-403
In this paper, we present a necessary and sufficient condition for the existence of solutions in a Sobolev space Wpk(ℝs) (1≤p≤∞) to a vector refinement equation with a general dilation matrix. The criterion is constructive and can be implemented.
Rate of convergence of vector cascade algorithms in a Sobolev space Wpk(ℝs) will be investigated. When the dilation matrix is isotropic, a characterization will be given for the Lp (1≤p≤∞) critical smoothness exponent of a refinable function vector without the assumption of stability on the refinable function
vector. As a consequence, we show that if a compactly supported function vector φ∈Lp(ℝs) (φ∈C(ℝs) when p=∞) satisfies a refinement equation with a finitely supported matrix mask, then all the components of φ must belong to a Lipschitz
space Lip(ν,Lp(ℝs)) for some ν>0. This paper generalizes the results in R.Q. Jia, K.S. Lau and D.X. Zhou (J. Fourier Anal. Appl. 7 (2001) 143–167)
in the univariate setting to the multivariate setting.
Dedicated to Professor Charles A. Micchelli on the occasion of his 60th birthday
Mathematics subject classifications (2000) 42C20, 41A25, 39B12.
Research was supported in part by the Natural Sciences and Engineering Research Council of Canada (NSERC Canada) under Grant
G121210654. 相似文献