i线投影光刻曝光系统的光学设计

叙述具有同轴对准特性的光学投影物镜双远心结构和均匀照明光学系统原理。为了满足ｉ线光刻所需的光学传递函数要求，讨论了光刻分辨率和数值孔径的关系。设计了一种新的双远心投影物镜，其数值孔径ＮＡ＝０．４２，放大倍率Ｍ＝－１／５，像场尺寸１５ｍｍ×１５ｍｍ（直径２１·２ｍｍ），共轭距Ｌ＝６０２ｍｍ。用光学设计程序ＺＥＭＡＸ－ＸＥ计算此ｉ线物镜的像质。设计结果说明，整个视场内波差＜λ／４，ＭＴＦ＞０．５５，当空间频率为７１５ｐａｉｒｌｉｎｅｓ／ｍｍ，使用波长为３６５士３ｎｍ时。可以实现０．７μｍ光刻分辨率；照明均匀器，由８１个小方型透镜组成一方列阵。用本文模拟计算软件ＯＰＥＮＧ计算被照像平面上的光能分布，说明实际系统的照明不均匀性为土２％。     

一种对光照变化鲁棒性的彩色目标检测方法

彩色目标检测过程中由于环境光照的变化以及分布不均匀会造成物体反射光的改变,使得检测效率降低.彩色目标检测中最常见的光照影响是光照强度的改变和检测区域强度分布不均匀.本文对颜色生成基本过程进行考察,发现在很多应用中可以用简单的的DELTA函数近似传感器的响应函数.在此基础上用一个有限维向量量化光照变化,对像素进行补偿,提高对光照变化的适应能力.并用实际应用结果说明其合理性.     

均匀照明中光束质量的定量描述

利用一种简化模型处理横向电子热传导效应对高功率激光均匀照明靶面光强分布的影响，同时对传统的量度光束质量的束宽、光强不均匀度和能量利用率三个物理量重新进行了定义。     

光楔列阵线聚焦系统的研制

报道七单元光楔列阵线聚焦系统的设计原理和焦线特性的测试结果。     

Current-voltage behavior of AlGaAs/InGaAs pHEMT structures and the effect of optical illumination

Various pseudomorphic High Electron Mobility Transistor (pHEMT) structures of AlGaAs/InGaAs alloys have been observed their current-voltage behavior. The tungsten probes were used for a measurement the structures by ramping the voltage from −5 to 5 V and measure the electrical current. Measurement was carried out at room temperature and also under optical illumination. From the measurement, the electrical current was found to increase as the increase of Al content in the AlGaAs alloys layer in the pHEMT structure. This phenomenon was supported by the decrease of sheet resistance as obtained from Hall effect measurement. Under visible light illumination, the current-voltage behavior of pHEMT structure was observed to vary as the light power density was varied for 0, 25 and 55 μW/cm.     

海面波浪坡度场光学测量装置的光源设计(英文)

在海面波浪坡度场光学测量系统中,光源是一个非常重要的照明元件。合理的设计和选用光源,是保证系统精度和布局的重要因素之一。比较传统光源短弧氙灯的明显优势,如低能耗,寿命长,更好的安全性和稳定性等,本文提出了采用LED作为本系统光源的设想,确定了所需LED个数和LED阵列方式,并经过计算和光学软件模拟,验证了本设想的可行性。     

基于图像亮度特性统计的水下距离选通成像自动增益控制方法

对水下激光距离选通成像质量与系统增益的关系进行了分析,提出了一种基于图像亮度特性统计的普适性自动增益控制方案。该方案通过设定不同灰度统计阈值,甄别目标图像的亮度特性,并以此作为控制系统增益的主要依据。在对水下大动态范围照度目标或慢速运动目标等进行成像的特殊场合,该方案也具备较强的适用性,能实时反馈控制系统增益,使成像质量优化。     

The illumination conjecture and its extensions

Summary The Illumination Conjecture was raised independently by Boltyanski and Hadwiger in 1960. According to this conjecture any <InlineEquation ID=IE"1"><EquationSource Format="TEX"><![CDATA[<InlineEquation ID=IE"2"><EquationSource Format="TEX"><![CDATA[<InlineEquation ID=IE"3"><EquationSource Format="TEX"><![CDATA[$]]></EquationSource></InlineEquation>]]></EquationSource></InlineEquation>]]></EquationSource></InlineEquation>d$-dimensional convex body can be illuminated by at most $2^d$ light sources. This is an important fundamental problem. The paper surveys the state of the art of the Illumination Conjecture.     

Characterization on titanium surfaces and its effect on photocatalytic bactericidal activity

Many studies have been published on the use of TiO₂ as a photocatalyst, which decomposes various organic compounds under UV illumination by generating various radicals. The purpose of the present study was to evaluate the photocatalytic bactericidal effects of variously treated titanium surfaces on Escherichia coli K-12. The specimens were fabricated from grade 4 commercially pure titanium, 12 mm in diameter and 1 mm in thickness. Five different surfaces were prepared (MA: machined surface; AO: anodized at 300 V; NO: NaOH-treated; NW: NaOH- and water-treated; and HT: heat-treated). Surface analysis was performed using scanning electron microscopy, optical interferometer, and thin-film X-ray diffractometry. Photocatalytic activity of each group was confirmed by degradation of methylene blue (MB). The antibacterial activity was assessed by calculating the survival ratio in a drop of a culture of E. coli placed on the surface under UV illumination. Significant photocatalytic activity and bactericidal effects were observed on the titanium surfaces of AO and NW, regardless of the surface roughness (P < 0.01). The group with anatase was the most susceptible to the photocatalytic effect, while the surface without anatase showed the least susceptibility. Based on this in vitro study, the crystallography of the oxide layer on its titanium surfaces is an important factor affecting the photocatalytic bactericidal activity.     

光照鲁棒的人脸识别

传统的人脸识别方法对待识别人脸图像的质量要求较高,而且要求所采集的人脸图像的光照情况与人脸训练库的光照情况的差异不能太大,这就限制了人脸识别系统运行的环境条件,从而限制了人脸识别的应用。为了降低人脸识别对环境条件的要求,真服光照对人脸识别的影响。本文分析了人脸图像的幅频特性和相频特性,提出了频域光照归一化的人脸识别方法,使得对任何光照条件下采集的图像经过归一化后,光照情况与训练库中的图像完全相同,同时保留了人脸的可区分性。因为人脸之间差异的信息量一般较少,故本文运用最小非零特征向量作为人脸特征,通过实验仿真,与传统方法相比本文人脸识别方法对光照变化具有鲁棒性。