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71.
基于镜像焦面检测对准标记的套刻性能原位测量技术 总被引:5,自引:2,他引:5
套刻性能是现代高精度步进扫描投影光刻机的重要性能指标之一。提出了一种基于镜像焦面检测对准标记(简称“镜像焦面检测对准标记”)的光刻机套刻性能原位测量技术。该技术通过对曝光在硅片上的镜像焦面检测对准标记图形进行光学对准,利用标记图形对准位置与理想位置偏差实现套刻性能的原位检测。实验结果表明该技术在进行套刻误差的精确测量的同时还可以全面、定量地计算影响光刻机单机套刻误差的场内参量及场间参量。与目前套刻性能原位测量技术相比,该技术有效地避免了测量精度对轴向像质限制的依赖,简化了光刻机整机性能检测的过程。 相似文献
72.
论述了1550 nm射频电视(CATV)通道与1490 nm数据通道的相互干扰问题。针对1490 nm光波通过光纤中受激拉曼效应对1550 nm光波的非线性串扰和1550 nm光波通过粗波分复用(CWDM)分波器对1490 nm光波的线性串扰提出了理论计算公式,进行了定量分析和计算。结果表明,数据非线性串扰可使射频电视系统低频端的载噪比下跌9 dB;而在常规融锥型粗波分复用分波器情况下,射频电视线性串扰可使数据光接收机的光功率代价达到2.5dB。最后指出了克服串扰的方法,如以太空闲字符扰码和高隔离度粗波分复用等。 相似文献
73.
《Electronics and Communications in Japan》2018,101(5):22-32
NTMobile (Network Traversal with Mobility) has been proposed to achieve end‐to‐end encryption communication supporting IP mobility in environments where IPv4/IPv6 networks coexist. However, since NTMobile unconditionally establishes an encrypted User Datagram Protocol (UDP) tunnel between NTMobile‐ready nodes (NTM nodes), a malicious NTM node can attack a target NTM node through the encrypted UDP tunnel without being detected by a firewall. Moreover, since communication with a general server always passes through a relay server (RS), the route becomes redundant even when IP mobility is not needed, and the communication delay increases. In order to solve these problems, this paper proposes an access control function using the name of the correspondent node and a “Route option” that can select whether the RS is used or not. As a result of implementation of the prototype system and evaluation of its performance, it was confirmed that the increase of the start‐up time and that of the overhead at the beginning of the communication were quite small, and there was little influence on practical use. 相似文献
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75.
In the future wideband CDMA cellular systems, services with different data rates, Quality of Service requirements, and power constraints will coexist in a cell. Multiband CDMA may be used to accommodate these heterogeneous service requirements by overlaying the subbands containing different services within the same spectrum band. In this paper we will derive the capacity of multiband CDMA systems in terms of the number of users in each service class, and the corresponding bandwidth utilization. Both reverse and forward links are analyzed. The effects of imperfect power control, other cell interference, and soft handoff are considered. The performance results are compared with the single-band system where all services share the entire system bandwidth. 相似文献
76.
就 S1 2 40维护过程中的计费文件丢失情况 ,通过分析其相关原理及数据结构 ,总结出尽可能恢复计费记录的一套方法。 相似文献
77.
针对目前视频显示领域中常见的图像叠加和跨屏拼接显示方式,两种功能往往不能同时在一个系统中实现,导致应用的场景受到局限问题,提出一种多功能视频拼接系统的硬件结构设计.该系统基于双线性插值图像算法,采用流水线设计思路对算法进行优化,同时采用单片机完成视频处理前后,缩放倍数的计算与显示参数的传递,通过IIC总线发送计算出的参... 相似文献
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79.
运用迭加算法给出矩形网格上二元有理插值函数的表现公式,特别给出了在对角情形下使用迭加算法得到的插值公式.这种方法具有较大的灵活性,且易于编写程序,便于实际应用. 相似文献
80.
Ying?WangEmail author Tee?Hiang?Cheng Sanjay?Kumar?Bose 《Photonic Network Communications》2005,10(3):347-360
Network control for IP-over-optical networks can be classified as falling under the overlay, augmented, or peer models. In the first two models, the IP layer and the optical layer only have the resource information of their respective layers. In the peer model, all the resource information is known to both layers; hence, it can potentially achieve better resource utilization. Unfortunately, the peer model approach is generally not acceptable to the operators if the IP layer and optical layer belong to two different administrations. In addition, it is much more complex and generally seen as not feasible in the near future In this paper, we propose an enquiry-based provisioning scheme based on the overlay model which can, however, utilize resources in both layers as in the peer model approach. Two simple and novel algorithms for routing labeled-switched path (LSP) requests for this provisioning scheme are proposed. Simulation results show that our proposed algorithms perform significantly better than other routing algorithms for the overlay model and are nearly as good as the integrated routing algorithm for the peer model. 相似文献