Impact of preanneal process on threshold voltage of MOS transistors for trench DRAM

As the first step of DRAM manufacture, preanneal process plays an important role in determining the threshold voltage variation. It is found that the higher trans-1,2-dichloroethene flow in pad oxide growth and the higher nitrogen flow in high-temperature annealing step would respectively engender a lower boron segregation coefficient and higher nitridation of the oxide, both modify the boron distribution in the substrate and consequently the behavior of the threshold voltage. As the feature size of DRAM devices enter nanometer regime, besides gate oxidation, ion implantation and related thermal processes, the impact of preanneal process condition should be prudentially taken into consideration for rigorous control of the threshold voltage in the advanced DRAM production.     

电解铜箔生产中的质量控制点

概从电解铜箔生产的各工序来介绍铜箔的质量控制。     

Robust Disturbance Attenuation with Stabilization for Uncertain Networked Control Systems

This paper investigates the problem of robust stabilization and attenuation for a class of uncertain networked control systems (NCSs) with random communication network-induced delays. Based on the Lyapunov–Razumikhin method, a controller is designed such that both robust stability and a prescribed disturbance attenuation performance for the closed-loop NCS are achieved, irrespective of the uncertainties and network-induced delays. The controller design technique is given in terms of the solvability of bilinear matrix inequalities. An iterative algorithm is proposed to change this non-convex problem into quasi-convex optimization problems, which can be solved effectively using available mathematical tools. The effectiveness of the proposed design methodology is verified by a numerical example.     

H ∞ and Robust Control of 2-D Systems in FM Second Model

This paper deals with output feedback stabilization and H control problems for two-dimensional (2-D) discrete linear systems without or with parameter uncertainty. The class of systems under investigation is described by the 2-D local state space Fornasini-Marchesini second model. We aim at designing a dynamical output feedback controller to achieve asymptotic stability and H performance for the 2-D system. It is shown that the design of output feedback controller can be recast into a convex optimization problem characterized by linear matrix inequalities (LMIs). The LMI solution is further extended to solve the robust stabilization problem for 2-D systems subject to norm-bounded uncertainty. The solutions for the H control and robust stabilization are applied to two application examples: thermal process control and robust stabilization of processes in Darboux equation.     

PROFIBUS-DP网络对液压伺服系统性能的影响

文章在对PROFIBUS-DP网络进行时延分析的基础上,针对其网络特点,提出了对网络造成的时变不确定性系统的简化方法.通过一个由PROFIBUS-DP网络组成的泵控马达系统的分析,说明了网络对系统性能的影响.该方法的提出,可从工程上设计和分析控制网络对系统性能的影响,具有实际应用价值.     

LENZE变频器的常见故障及维修对策

文章介绍了LENZE变频器的发展及相应的故障处理。     

洁净手术室空调的低频噪声控制

对洁净空调中风机的低频噪声产生和控制作了介绍,重点介绍了微穿孔消声器和阻尼减振技术。并提出医院、生物安全和动物试验用L或C计权计量室内噪声,并考核倍频程的噪声参数。