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131.
研究了一种基于BCB材料的牺牲层接触平坦化技术,用于红外焦平面阵列Post CMOS工艺之前对读出电路表面的平坦化,以利于微测辐射热计微桥阵列与读出电路的集成。利用该方法成功将2μm的电路表面突起,平坦化为表面起伏56 nm的平面,可替代会给器件带来颗粒和损伤的化学机械抛光(CMP)技术。并在该平坦层上方成功进行了非晶硅敏感薄膜的沉积、微桥结构的图形化以及同时作为牺牲层的BCB的释放。通过实验研究了BCB膜层的厚度与转速、固化温度的关系,实验发现BCB的收缩率随温度小范围变化,约为30%。研究了BCB的等离子刻蚀特性,表明该材料适合用等离子刻蚀的方法进行接触孔的刻蚀和牺牲层释放。最后,利用BCB牺牲层接触平坦化技术成功地在读出电路(ROIC)芯片上制作了160×120面阵的非制冷红外焦平面阵列。 相似文献
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134.
M.F. Luo J.Y. Huang C.I. Chiang G.R. Hu C.C. Wang C.T. Wang C.W. Lin 《Surface science》2009,603(3):558-565
We present a self-organised approach for the synthesis of one-dimensional (1D) arrays of supported nanoclusters. By oxidising NiAl surfaces vicinal to the (1 0 0) plane tilted along the crystallographic direction [0 1 0], we produced ordered thin films of θ-Al2O3 that exhibit uniform protrusion stripes propagating uniquely along direction [0 0 1] of the NiAl. These protrusions are preferential centres for nucleation of metal deposited from a vapour; the nanoclusters grown from such metal are aligned and form massive 1D cluster arrays along direction [0 0 1]. The arrays of Co nanoclusters exhibit a diameter as small as 3 nm and length exceeding a micrometer. The results imply prospective applications for which a patterned assembly of nanoclusters is desired. 相似文献
135.
Rui Liu Yuankun Cai Joong‐Mok Park Kai‐Ming Ho Joseph Shinar Ruth Shinar 《Advanced functional materials》2011,21(24):4744-4753
The organic light‐emitting diode (OLED)‐based sensing platform is gaining momentum due to unique attributes of the compact OLEDs that are used as excitation sources. This paper, however, points to issues related to this sensing platform that will affect many (bio)chemical sensing applications, in particular in photoluminescence (PL)‐based sensors operated in the advantageous time domain, where pulsed OLEDs are utilized. The issues are related to the post‐pulse electroluminescence (EL) profile, i.e., transient EL, which depends on the OLED materials and structure, and to the long‐wavelength tail of the typically broad‐band EL spectrum. Depending on materials and device structure, the transient EL may exhibit spikes peaking at ~100–200 ns and μs‐long tails. As shown, these interfere with the determination of PL decay times (that are related to analyte concentrations) of sensing elements. The results also indicate that the long‐wavelength tail of the EL spectrum contributes to the interfering post‐pulse μs‐long EL tail. Hence, it is shown that the choice of OLED materials, the use of microcavity (μC) OLEDs with tunable, narrower EL bands, and the use of UV OLEDs alleviate these issues, resulting in more reliable data analysis. Furthermore, a 2‐D uniform 2 μm‐pitch microlens array that was previously used for improving light extraction from the OLEDs (J.‐M. Park et al., Optics Express 2011 , 19, A786) is used for directional PL scattering toward the photodetector, which leads to a ~2.1–3.8 fold enhancement of the PL signal. This behavior is shown for oxygen sensing, which is the basis for sensing of bioanalytes such as glucose, lactate, ethanol, cholesterol, and uric acid. 相似文献
136.
The pad pitch of modern radio frequency integrated circuits is in the order of few tens of micrometers. Connecting a large number of high‐speed I/Os to the outside world with good signal fidelity at low cost is an extremely challenging task. To cope with this requirement, we need reflection‐free transmission lines from an on‐chip pad to on‐board SMA connectors. Such a transmission line is very hard to design due to the difference in on‐chip and on‐board feature size and the requirement for extremely large bandwidth. In this paper, we propose the use of narrow tracks close to chip and wide tracks away from the chip. This narrow‐to‐wide transition in width results in impedance discontinuity. A step change in substrate thickness is utilized to cancel the effect of the width discontinuity, thus achieving a reflection‐free microstrip. To verify the concept, several microstrips were designed on multilayer FR4 PCB without any additional manufacturing steps. The TDR measurements reveal that the impedance variation is less than 3 Ω for a 50 Ω microstrip and S11 better than –9 dB for the frequency range 1 GHz to 6 GHz when the width changes from 165 µm to 940 µm, and substrate thickness changes from 100 µm to 500 µm. 相似文献
137.
T. A. Nguyen H. T. Dung 《The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics》2008,46(1):173-177
Using the Born expansion of the Green tensor, we consider the
spontaneous decay rate of an excited atom placed in the vicinity of
a rectangular plate. We discuss the limitations of the commonly used
simplifying assumption that the plate extends to infinity in the lateral
directions and examine the effects of the atomic dipole moment
orientation, atomic position, and plate boundary and thickness on the atomic
decay rate. In particular, it is shown that
due to the plate finite size, the spontaneous decay may be inhibited
even when the atom is situated very close to the surface, and that
in the boundary region, the
spontaneous decay rate can be strongly modified. 相似文献
138.
Highly ordered Prussian blue nanowires with diameter of about 50 nm and length up to 4 m have been fabricated by an electrodepositing technology with two-step anodizing anodic aluminum oxide films. The Mössbauer spectra taken between 15 and 300 K indicate that the hyperfine parameters decrease as the temperature increases. The temperature dependence of the quadrupole splitting, the isomer shift and the spectra area are discussed. A decrease of Debye temperature for Prussian blue nanowires was found with respect to that of Prussian blue bulk. 相似文献
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Mohamed Rehan M. Watheq El-Kharashi Fayez Gebali 《Multidimensional Systems and Signal Processing》2006,17(4):327-341
Many useful DSP algorithms have high dimensions and complex logic. Consequently, an efficient implementation of these algorithms on parallel processor arrays must involve a structured design methodology. Full-search block-matching motion estimation is one of those algorithms that can be developed using parallel processor arrays. In this paper, we present a hierarchical design methodology for the full-search block matching motion estimation. Our proposed methodology reduces the complexity of the algorithm into simpler steps and then explores the different possible design options at each step. Input data timing restrictions are taken into consideration as well as buffering requirements. A designer is able to modify system performance by selecting some of the algorithm variables for pipelining or broadcasting. Our proposed design strategy also allows the designer to study time and hardware complexities of computations at each level of the hierarchy. The resultant architecture allows easy modifications to the organization of data buffers and processing elements-their number, datapath pipelining, and complexity-to produce a system whose performance matches the video data sample rate requirements. 相似文献