硅压力传感器的可靠性测试

硅压力传感器的可靠性测试技术研究受到了国内外的重视，对它的测试项目及其加速寿命测试方法进行了综述。     

采用磁集成技术的低压大电流DC/DC变换器的仿真

运用回转器一电容模型可以很好的理解磁性器件，特别是复杂的集成磁件。文章运用磁导电容类比建模法建立了磁件的回转器一电容模型。在回转器一电容模型中，磁路由容性电路来模拟，绕组由双端口的回转器来代替。进行了采用磁集成技术的低压大电流DC／DC变换器的仿真。仿真电路拓扑是原边不对称半桥、副边倍流整流电路。磁集成变压器的结构是Wei Chen提出的原边绕于中柱的只在侧柱开气隙的倍流整流磁集成结构。建立了用SPICE语言描述的回转器仿真模型。仿真软件是MULTISIM2001。     

光刻技术及其新进展

介绍了用于制作半导体集成电路的光刻工艺的概念、分类及发展过程，阐述了当前光刻工艺的主流，并重点介绍了极紫外光刻、X射线光刻、电子束光刻、离子束光刻、纳米图形转印等下一代光刻技术的特点及其面临的挑战。     

谐振式力传感器对其晶振频率稳定度的要求

为了寻找石英晶振频率稳定度对传感器影响的判据,根据石英谐振式力传感器的灵敏度阈值和量程与晶体的相关常数及结构参数间的关系,导出了反映谐振式力传感器研究水平的指标参数与晶体结构参数及晶振频率稳定度之间的关系式,为传感器的研究提供了依据。例如,欲制作量程阈值比达到105量级的传感器,所用晶振的频率稳定度必须优于108。     

光电传感器在战场侦察车上的应用与发展

通过对国内外战场侦察车光电传感器资料及实物的查阅和调研，并通过总结几十年的工作和设计经验，论述了战场侦察车上光电传感器在未来数字化战争中的作用和地位。对国外传感器系统在侦察车上的应用状况进行了分析，着重对各种传感器进行分析与比较，并对多光谱技术、多传感器的图像融合技术以及桅杆的应用和要求提出看法。最后对我国光电传感器在战场侦察车上的应用与发展提出了建议。     

On the dynamic electromechanical loading of dielectric elastomer membranes

Dielectric elastomer actuators (DEAs) have received considerable attention recently due to large voltage-induced strains, which can be over 100%. Previously, a large deformation quasi-static model that describes the out-of-plane deformations of clamped diaphragms was derived. The numerical model results compare well with quasi-static experimental results for the same configuration. With relevance to dynamic applications, the time-varying response of initially planar dielectric elastomer membranes configured for out-of-plane deformations has not been reported until now. In this paper, an experimental investigation and analysis of the dynamic response of a dielectric elastomer membrane is reported. The experiments were conducted with prestretched DEAs fabricated from 0.5 mm thick polyacrylate films and carbon grease electrodes. The experiments covered the electromechanical spectrum by investigating membrane response due to (i) a time-varying voltage input and (ii) a time-varying pressure input, resulting in a combined electromechanical loading state in both cases. For the time-varying voltage experiments, the membrane had a prestretch of three and was passively inflated to various predetermined states, and then actuated. The pole strains incurred during the inflation were as high as 25.6%, corresponding to slightly less than a hemispherical state. On actuation, the membrane would inflate further, causing a maximum additional strain of 9.5%. For the time-varying pressure experiments, the prestretched membrane was inflated and deflated mechanically while a constant voltage was applied. The membrane was cycled between various predetermined inflation states, the largest of which was nearly hemispherical, which with an applied constant voltage of 3 kV corresponded to a maximum polar strain of 28%. The results from these experiments reveal that the response of the membrane is a departure from the classical dynamic response of continuum membrane structures. The dynamic response of the membrane is that of a damped system with specific deformation shapes reminiscent of the classical membrane mode shapes but without same-phase oscillation, that is to say all parts of the system do not pass through the equilibrium configuration at the same time. Of particular interest is the ability to excite these deformations through a varying electrical load at constant mechanical pressure.     

Surface roughness investigation of semi-conductor wafers

Conventionally, surface roughness is predominantly determined through the use of stylus instruments. However, there are certain limitations involved in the method, particularly when a test specimen, such as a silicon wafer, has a smooth mirror-like surface. Hence, it is necessary to explore alternative non-contact techniques. Light scattering has recently been gaining popularity as an optical technique to provide prompt and precise inspection of surface roughness. In this paper, the total integrated scattering (TIS) model is modified to retrieve parameters on surface micro-topography through light scattering. The applicability of the proposed modified TIS model is studied and compared with an atomic force microscope. Experimental results obtained show that the proposed technique is highly accurate for measuring surface roughness in the nanometer range.     

基于有限差分光束传播法的过渡波导功耗分析

为了在既定尺寸下减小斜坡波导和弯曲波导的功耗，设计了4种过渡波导形状函数。用有限差分光束传播法(FD-BPM)进行了模拟分析，发现过渡波导形状的选取与坡度和曲折角存在条件有关，并给出了条件表达式及其详细说明。     

DNS／GPS组合导航系统研究

本文阐述ＤＮＳ与ＧＰＳ组合导航的必要性、可行性及组合方法，给出了误差模型和卡尔曼滤波模型。选取观测量不同可有三种组合方式，通过模拟计算给出了相应曲线。当采用伪距及其变化率作为观测量时，其组合方式最佳，定位精度可达米级，航向精度可提高到０．２°。     

Thermal Monitoring of Self-Checking Systems

With the increasing power density in integrated systems resulting from scaling down, the occurrence of field failures due to overheating has considerably increased. Faulty operation can be prevented by on-line temperature monitoring. This paper deals with questions of on-line temperature monitoring in safety-critical systems. First the possible temperature sensors are reviewed and basic principles of self-checking systems including such sensors are detailed, then a new temperature sensor cell with extremely good parameters designed especially for DfTT applications is presented. The basic questions of integrating thermal sensors into self-checking systems are also discussed.