193nm光刻曝光系统的现状及发展

投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。重点介绍了目前193nm光刻设备曝光系统的发展现状和趋势，以及为提高曝光质量所采用的相关分辨率增强技术；通过分析曝光系统的构成和其中的关键技术，探讨了国内研制相关曝光设备所面临的挑战。     

梯度折射率棒透镜的色差模型

本文提出一个梯度折射率棒透镜(GRIN－RodLens)的色差模型,并运用本模型合理地解释了在色差测量过程发现的各类色差现象.     

透镜不胶盘单件抛光技术

本文介绍了在ＹＧ３６６高速抛光机上进行的透镜不胶盘单件抛光技术。这一新的抛光方法比弹性成盘法和刚性成盘法有许多优点：它省掉了许多辅助工序，缩短了抛光时间，所以生产周期短，效率高，成本低。同时给出了根据透镜的结构参数进行生产技术准备和评估抛光过程稳定性的公式。最后提出了进一步改进的设想。     

Aberration-corrected catadioptric magnifiers useful for simple microfiche readers

The present paper considers the magnifying power and aberration properties of three different catadioptric magnifying systems useful for application as simple hand-held microfiche readers. These are in the form of a plano-convex lens, a meniscus lens and an achromatic doublet lens and all their outer surfaces have been coated with a semi-reflecting film so that they behave like catadioptric elements. These can be designed to give magnification in the range of 15 × to 25 × with sufficient eye relief. Using such magnifiers, it is possible to read microfiche having frame sizes of 16 × 12 mm and 12 × 9 mm. The cemented achromatic doublet coated on the outer surfaces seems to give a very good image for use in microfiche reader.     

微形貌观测镜变焦系统的设计

提出的微型变倍微形貌观测镜光学系统是以微型内窥观测系统作为整个系统的前固定组、以变倍组和补偿组构成双组元全动型变倍系统,以CCD作为固定像平面的观测系统。利用高斯光学计算公式建立了系统的数学模型,计算了变焦透镜组的运动曲线。选定了该系统初始结构,进行了像差优化计算,给出了像差曲线和最终的设计数据,符合像差要求。该系统具有3种应用形式,整个系统是连续变倍内窥式微形貌观测镜,其前固定组是内窥式微形貌观测镜,其变倍系统是连续变倍微形貌观测镜。变焦范围6×～16×,分辨最小细节可达2.5μm左右。     

Changes Brought about by a Lens in an Obliquely Incident Laser Beam

In the paraxial optics approximation, we have studied the transformation of a simple Gaussian beam of light obliquely incident on an isotropic lens for the case where the axis of the beam and the principal optical axis of the lens are crossed straight lines. The data obtained are compared with the corresponding results for the case where the axes of the beam and lens are coplanar.     

Submicron External Electro-optic Measuring System Based on an Electro-optic Solid Immersion Lens

In this paper, all electro-optic solid immersion lens (EOSIL) is introduced, which is made of GaAs. A reflecting external electro-optic measuring system based on the EOSIL is built. With a hemispherical GaAs EOSIL used as the external probe, 0.7 µm spot size is obtained when the wavelength of the probing beam from a laser diode is 1.3 µm and a microscope objective with 0.3 numerical aperture is used. The principle of the measuring system is analyzed by Jones matrix. By using the system, the electrical signals propagating on a microstrip transmission line are successfully measured. The voltage sensitivity about 5 mV/ is measured when 10 kHz sinusoidal electric signal is applied on the microstrip line.     

头盔式单目微光夜视仪中光学系统的设计

为提高头盔式单目微光夜视仪中光学系统的成像质量，并满足夜视仪结构紧凑、质量小的指标要求，提出在微光夜视仪光学系统设计中引入高次项非球面透镜的设计方法。针对具体的头盔式微光夜视仪，根据微光物镜、目镜系统技术参数计算理论，确定该微光夜视仪光学系统的技术参数，应用光学设计软件ZEMX上机调试，并在光学系统设计中引入高次非球面透镜，使物镜系统镜片数由原来的9片减少为6片，目镜系统由原来的9片减少为7片，简化了结构，并提高了成像质量。设计结果表明：在头盔式微光夜视系统中采用非球面透镜可以提高系统成像质量，简化系统结构。     

圆锥透镜对偏轴球面波光束的衍射模式

球面波入射圆锥透镜产生的出射光束中心光斑直径较小且焦深长，适合通讯领域长距离测量和准直。针对实际操作中球面波光束入射时很可能与圆锥透镜的中心轴线发生偏移或倾斜，使衍射光场发生变化，着重研究圆锥透镜对偏轴球面波光束的衍射模式，并通过衍射理论和稳相法分析，研究其径向衍射光场的分布特性。使用半径为15mm，底角为1°的圆锥透镜进行计算机仿真和实验，最后将实验结果与理论分析和仿真结果相比较，证明球面波的曲率半径和出射光束的传输距离越小，偏轴对衍射模式的影响越小。该研究结果表明：在激光通讯等长距离通信中，使用曲率半径小的球面波光束代替平面波入射圆锥透镜，不仅可以扩展焦深，还可以降低偏轴对测量的影响。     

F-θ镜头的光学设计

介绍一种适合于激光打标的聚焦镜头－F-θ镜头的光学设计.通过引入桶形畸变，得到的F-θ镜头的像高与入射角成正比，可实现打标速度的线性控制.优化设计得到的工作面积达500×500 mm2的F-θ镜头，结构简单紧凑、聚焦性能达到衍射极限.