Defocusing image to pattern contact holes using attenuated phase shift masks

The patterning of contact holes by selecting out-of-focus image plane (defocus) using attenuated phase shift masks (APSM) has been studied. Defocus is found to enhance the image modulation at low partial coherence for contact holes with negative local average of mask function. Semi-dense holes up to 130 nm in 8% APSM have been printed by 0.5 μm defocus at a partial coherence of 0.31 using KrF scanner with highest numerical aperture of 0.68. However, these holes were closed with in-focus imaging. Defocus is also found to be beneficial for patterning the pitches that have extensive side lobes with in-focus imaging.     

宽带DDS跳频源设计

直接数字合成（DDS）简单可靠、控制方便，具有很高的频率分辨率，高速转换，非常适合快速跳频的要求。在对DDS基本原理进行了简要介绍和分析后，提出宽带跳频源设计方案。     

双级染料激光放大器泵浦能量分配的数值研究

用染料激光放大器的横向稳态泵浦理论，对不同的入射光能量选择不同的增益计算方法，研究了双级染料放大器的泵浦能量分配比例、泵浦光总能量和信号光能量大小对激光增益的影响。计算结果表明，对于其他参数确定的放大系统，存在着最佳的泵浦能量分配比例，可获得最大增益输出。通过自编程序的计算，可方便地找出特定系统泵浦能量分配比例的最佳值。     

基于小波变换的不同融合规则的图像融合研究

图像融合是一种重要的增强图像信息的方法。提出了一种基于多尺度分解的像素图像融合方法。利用小波变换按照不同融合规则及融合算子构造融合图像对应的小波系数。通过对可见光图像与红外图像进行融合的实验比较表明，以像素的局部能量为准则的融合效果更好，既可避免传统融合规则的信息损失，又提高了融合图像的空间分辨率和清晰度，融合图像更符合人的视觉特性，也有利于机器视觉。     

Cs-K混合蒸气中Cs(8D)+K(4S)碰撞能量转移

在Cs-K混合蒸气中，两步激发Cs原子到8D态，观察了Cs(8D) K(4S)→Cs(5D) K(4P)碰撞能量合并逆过程(REP，reverse energy pooling)。应用双调制技术探测K(4P)原子发射的荧光，基态K原子密度用光学吸收方法测量。得到了REP速率系数，讨论了其它过程对速率系数的影响．     

Kinetics of phenol hydrogenation over supported palladium catalyst

Kinetics of vapor phase hydrogenation of phenol to cyclohexanone over Pd/MgO system has been studied in a flow microreactor under normal atmospheric pressure. The reaction rate is found to be negative order with respect to the partial pressure of phenol and has increased from −0.5 to 0.5 with increasing temperature (473 to 563 K). The apparent activation energy (E_a) of the process is found to be close to 65 kJ per mol. On the basis of kinetic results a surface mechanism is proposed.