CMOS compatible dual metal gate integration with successful Vth adjustment on high-k HfTaON by high-temperature metal intermixing

In this paper, we report for the first time a novel dual metal gate (MG) integration process for gate-first CMOS platform by utilizing the intermixing (InM) of laminated ultra-thin metal layers during high-temperature annealing at 1000 °C. In this process, an ultra-thin (2 nm) TaN film is first deposited on gate dielectric as a buffer layer. Preferable laminated metal stacks for NMOS and PMOS are then formed on a same wafer through a selective wet-etching process in which the gate dielectric is protected by the TaN buffer layer. Dual work function for CMOS can finally be achieved by the intermixing of the laminated metal films during the S/D activation annealing. To demonstrate this process, prototype metal stacks of TaN/Tb/TaN (NMOS) and TaN/Ti/HfN (PMOS) has been integrated on a single wafer, with WF of 4.15 and 4.72 eV achieved, respectively. Threshold voltage (V_th) adjustment and transistor characteristics on high-k HfTaON dielectric are also studied.     

偏振模色散自相关函数的实验测量

采用宽光源和光谱分析仪测量偏振模色散自相关函数,来替代传统的可调谐激光器和偏振计的测量方法,得到了与理论分布曲线基本吻合的结果,这种方法大大缩短了测量时间,使得测量结果更接近光纤中偏振模色散的真实情况.     

波导缝隙外部半空间场矩阵元素的计算方法

本文证明了用Galerkin法对波导缝隙特性分析时,Fourier变换法导出的缝隙外部半空间场的矩阵元素公式与一般积分法导出的公式是等同的.同时把这两种方法中含有二重积分的公式简化为一重积分形式.并描述了利用简化公式的优点.     

基于最小费用流的InSAR干涉相位展开算法

从影响InSAR干涉相位展开算法的相干系数出发,分析了相干系数对干涉处理的影响,提出了基于新的加权系数矩阵的最小费用流算法,定义了新的加权系数矩阵并分析其性能,使得加权系数矩阵不再随着幅度的变化而变化,减小了相干系数较小时对干涉相位展开的不利影响。通过仿真和实测数据检验本方法的处理性能,可以获得较好的相位展开处理效果。     

模拟电路软故障诊断的研究

分析了模拟电路软故障诊断的重要性及现有的各种软故障诊断方法。对模拟电路软故障诊断字典法中基于支路屏蔽原理、电路参数随元件参数变化轨迹、节点电压灵敏度序列守恒定理和节点电压增量关系方程的四个研究方向各自的基本原理和优缺点进行了探讨;介绍了基于神经网络,结合模糊理论、小波变换的现代模拟电路软故障诊断的两个方向的研究现状;同时从通用的软故障诊断方法、大规模模拟电路的诊断策略和数模混合集成电路的诊断需求三方面指出了模拟电路软故障诊断的发展趋势和亟待解决的问题。     

RO PUF硬件物理指纹性能评估

入网设备的身份认证是工业互联网、物联网安全运行的基础.通过分析物理不可克隆函数(Physical Unclonable Function,PUF)作为入网设备的身份凭据应具有的特性,建立了其性能的多层指标体系.按照性能指标的重要性分为必要指标、重要指标和应用指标,对每项指标及其评估方法进行了说明,并给出了可用于PUF选...     

复杂环境背景下典型飞行器表面红外反射特性研究

飞机蒙皮对于背景辐射的反射可以作为红外目标识别的辐射源,但背景辐射通常来源于太阳辐射和地面背景辐射等辐射的综合作用,其复杂性和多变性也可能使飞机的红外反射辐射严重干扰红外制导的准确性,因此,研究复杂环境背景下的飞机蒙皮红外反射特性对于红外目标识别和红外导弹制导等应用具有重要意义.本文基于Schlick双向反射分布函数(...     

反射式离轴数字全息再现像中的噪声抑制

为了抑制反射式离轴数字全息再现像中的零级像和散斑噪声对再现像的影响,利用高斯核函数在空域对数字全息图进行低通滤波,再用原数字全息图减去滤波后的低频信息来抑制零级像,采用非局部均值滤波来抑制散斑噪声。实验结果表明空域高斯核函数处理法能有效地抑制零级像,非局部均值滤波可以抑制散斑噪声但对部分细节的保持能力不强,改进后的非局部均值滤波在抑制散斑噪声的同时能很好地保护细节信息,提高了离轴数字全息再现像的质量。     

一种基于DWT通道分离和函数提取的运动目标检测新方法

智能视频监控由于其智能性、实时性和高检测率成为交通和安防领域的热点研究方向,其中运动目标实时检测是智能视频监控中的一个基本和重要的部分。本文提出一种针对智能视频监控的运动目标检测新方法：包括视频帧的小波变换、YCb Cr通道分离、目标检测与融合等环节。与传统的检测方法相比,该方法检测运动目标速度较快,精确度较高,且同时还能抑制弱的阴影。     

Multi-scale noise estimation for image splicing forgery detection

Noise discrepancies in multiple scales are utilized as indicators for image splicing forgery detection in this paper. Specifically, the test image is initially segmented into superpixels of multiple scales. In each individual scale, noise level function, which reflects the relation between noise level and brightness of each segment, is computed. Those segments not constrained by the noise level function are regarded as suspicious regions. In the final step, pixels appears in suspicious regions of each scale, after necessary morphological processing, are marked as spliced region(s). The Optimal Parameter Combination Searching (OPCS) Algorithm is proposed to determine the optimal parameters during the process. Two datasets are created for training the optimal parameters and to evaluate the proposed scheme, respectively. The experimental results show that the proposed scheme is effective, especially for the multi-objects splicing. In addition, the proposed scheme is proven to be superior to the existing state-of-the-art method.