二元光学法在微透镜制作中的应用

对二元光学的产生和发展作了介绍,并阐述了二元光学元件之一的微透镜(microlenses)的设计、制作和测试方法以及它们的主要应用。微透镜的设计是基于已成熟的标量衍射理论;而其制作过程包括:计算机设计波面相位、产生掩模版、光刻或离子(束)蚀刻以及复制产生微透镜,其关键技术蚀刻方法有等离子蚀刻技术和反应离子蚀刻RIE(Reactive Ion Etching)技术;微透镜的测试主要包括衍射效率(diffractive efficiency)和点扩散函数(PSF)的测试,有直接法和间接法两种测试方法。微透镜可以微型化与阵列化,并且可以同微电子器件一起集成化,具有广泛的应用前景。     

二元光学反／衍混合Schmidt望远系统光学设计

针对空间光学系统轻型的特点，采用衍射光学元件取代Ｓｃｈｍｉｄｔ校正板来校正系统像差，设计了一个二元光学反／衍混合Ｓｃｈｍｉｄｔ望远系统。光学系统的通光孔径为＝２００ｍｍ，相对孔径Ｆ／＃＝１．９，波长λ＝４．３μｍ，视场２ω＝１０°。光学设计采用ＯＳＬＯｓｉｘ软件。光学设计结果：空间频率ν≤６０ｃｙｃｌｅｓ／ｍｍ时，调制传递函数ＭＴＦ≥０．４。     

液电冲击波的实验研究

本文用水下电火花微爆炸产生重复性极佳的球形冲击波,用双曝光全息干涉法测量了液电冲击波的传播,并观察到冲击波与水下电极之间的相互作用.实验结果表明此法适用于液电冲击波的测量,特别适用于由冲击波波前位移来确定其峰值压力分布.     

相移干涉术中参考波准直误差的数值校正

针对相移干涉术中参考波由于准直误差可能为非倾斜或倾斜球面波的情形,本文提出了一种简单的数字处理方法,不需任何附加测量即可提取真实球面波的几何参数,进而校正由标准波前再现公式所恢复的物波波前误差.本文方法的有效性由模拟试验所证实,并说明了其适用范围.     

用于非球面检验的激光直写高精度计算全息图制作

为实现高精度非球面的面形误差检测,对激光直写计算全息图(CGH)的关键技术进行研究。以获得最小线宽偏差为目的,通过基础工艺实验,探究离焦量对光刻胶上线宽的影响;研究湿法刻蚀过程对不同线宽引入的展宽规律;分析线宽误差与位置误差关系,得到CGH不同周期位置误差引入的波前误差。根据实验结果,制作最小线宽1.8 mm,直径80 mm的振幅型CGH。检测结果表明,波前误差均方根值为0.011l,达到l/100量级,可用于高精度非球面的检测。     

A novel monochromator for experiments with ultrashort X‐ray pulses

Aiming at advancing storage‐ring‐based ultrafast X‐ray science, over the past few years many upgrades have been undertaken to continue improving beamline performance and photon flux at the Femtoslicing facility at BESSY II. In this article the particular design upgrade of one of the key optical components, the zone‐plate monochromator (ZPM) beamline, is reported. The beamline is devoted to optical pump/soft X‐ray probe applications with 100 fs (FWHM) X‐ray pulses in the soft X‐ray range at variable polarization. A novel approach consisting of an array of nine off‐axis reflection zone plates is used for a gapless coverage of the spectral range between 410 and 1333 eV at a designed resolution of E/ΔE = 500 and a pulse elongation of only 30 fs. With the upgrade of the ZPM the following was achieved: a smaller focus, an improved spectral resolution and bandwidth as well as excellent long‐term stability. The beamline will enable a new class of ultrafast applications with variable optical excitation wavelength and variable polarization.     

Diffractive optics: Design, realization, and applications

This paper presents methods for designing and recording optimal computer-generated diffractive optical elements. The design method is based on an analytic ray-tracing procedure for minimizing aberrations. The recording involves computer-generated masks and multiple lithographic processes in order to form reflective and transmissive multilevel, surface relief-phase, diffractive elements. As a result, the elements can have high diffraction efficiencies over a broad range of incidence angles. Even generalized diffractive elements that operate with highly uniform diffraction efficiency and polychromatic radiation can be designed and recorded by optimizing the shape and height of the relief gratings. To illustrate the effectiveness of the diffractive optical elements, they have been incorporated into a number of applications, involving visible as well as infra-red radiation. Some that deal with coordinate transformation, beam shaping, and polarization control are briefly reviewed.     

Wavelength-Division Multiplexing Switches Using Free-Space Optics

Optical crossbar switches were fabricated using multiwavelength vertical-cavity surface-emitting lasers and free-space microoptics. Four-channel optical switches with 10-nm wavelength intervals were successfully demonstrated.     

Explanation of Anomalous Diffractive Behavior with New Model in Doped KNSBN Crystals

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二元光学元件衍射效率的逐层分析法研究

提出了一种有效的分析二元光学元件衍射效率的新方法－逐层分析法，并对四台阶二元器件，就蚀刻深度误差和横向对准误差对器件衍射效率的影响进行了详细的分析和讨论，证明了用该方法分析含有横向对准误差的二元光学元件的衍射效率非常简便有效。