VHF-PECVD制备微晶硅材料的均匀性及其结构特性的分析

采用VHF-PECVD技术在多功能系统(cluster tool)中制备了系列硅薄膜，研究薄膜的均匀性及电学特性和结构特性。结果表明：气压和功率的合理匹配对薄膜的均匀性有很大的影响；材料的喇曼测试和电学测试结果表明微晶硅薄膜存在着纵向的结构不均匀，在将材料应用于器件上时，必须要考虑优化合适的工艺条件；硅烷浓度大，相应制备薄膜的晶化程度减弱，即薄膜中非晶成分增多。     

Morphological and chemical study of the initial growth of CdS thin films deposited using an ammonia-free chemical process

We study the initial growth stages of CdS thin films deposited by an ammonia-free chemical bath deposition process. This ammonia-free process is more environmentally benign because it reduces potential ammonia release to the environment due to its high volatility. Instead of ammonia, sodium citrate was used as the complexing agent. We used atomic force microscopy (AFM), Rutherford backscattering (RBS) and X-ray photoelectron spectroscopy (XPS) to investigate the morphological and chemical modifications at the substrate surface during the first initial stages of the CdS deposition process. Additionally, X-ray diffraction (XRD) and optical transmission spectroscopy measurements were carried out to compliment the study. XPS results show that the first nucleation centers are composed by Cd(OH)₂ which agglomerate in patterns of bands, as demonstrated by AFM results. It is also observed that the conversion to CdS (by anionic exchange) of the first nucleus begins before the substrate surface is completely covered by a homogenous film.     

脉冲激光淀积高电流密度的YBCO超导带材

采用脉冲激光加辅助离子源的方法在长为６．０ｃｍ的ＮｉＣｒ合金基带上制备０．１３μｍ厚的Ｙ－ＺｒＯ２（ＹＳＺ）隔离层，再用脉冲激光在ＹＳＺ／ＮｉＣｒ带上制备１．５μｍ厚的ＹＢａ２Ｃｕ３Ｏ７－ｘ超导厚膜形成ＹＢＣＯ／ＹＳＺ／ＮｉＣｒ超导带材。实验测得在７７Ｋ，０Ｔｅｓｌａ下其临界电流密度为８．７５×１０４Ａ／ｃｍ２，超导转变温度为８８．６Ｋ。     

三十烷醇在GA_3影响水稻幼苗生长和生理性状中的增效作用

微量三十烷醇（ＴＲＩＡ）与ＧＡ３配合使用，比ＧＡ３单独使用能明显地促进幼苗生长和增加幼苗干物质积累．同时还增强了ＧＡ３对幼叶中叶绿素含量、可溶性蛋白质含量、呼吸速率、细胞膜透性和过氧化物酶活性的影响．ＧＡ３＋ＴＲＩＡ与ＧＡ３处理相比，促进幼叶内源ＧＡ３水平提高，稳定保持内源ＺＴ于一定水平，ＴＲＩＡ在ＧＡ３低浓度时降低ＩＡＡ水平，在高浓度时则提高ＩＡＡ水平．作者认为ＴＲＩＡ可作为ＧＡ３处理时的增效剂．     

Gradient- and Sensitivity-Enhanced TOCSY Experiments

A pulsed field gradient version of the sensitivity-enhanced 2D TOCSY experiment is proposed which yields high-quality spectra with improved sensitivity and a minimum of two scans pert₁increment. For rapid acquisition of 1D TOCSY spectra, the 1D DPFGSE–TOCSY experiment was modified to include phase-encoded multiple-selective excitation followed by a simple spectral editing. Combination of these two building blocks is used in a sensitivity-enhanced 2D analog of the 3D TOCSY–TOCSY experiment which provides an efficient tool for resolving severely overlapped signals of oligomers in short experimental time.     

TFT有源矩阵α－Si∶H薄膜PECVD淀积工艺研究

分析了α－Ｓｉ∶Ｈ薄膜的质量和厚度对α－Ｓｉ∶ＨＴＦＴ关键性指标的影响，深入、详细地讨论了其ＰＥＣＶＤ淀积工艺，并在实验的基础上确定了最佳淀积工艺参数，从而获得了高性能的７５ｍｍ３７２×２７６像素α－Ｓｉ∶ＨＴＦＴ有源矩阵     

动态广义球对称含荷黑洞的统计熵

利用改进了的brickwall膜模型,计算了动态广义球对称含荷黑洞的熵,研究结果表明,对于动态黑洞,将黑洞熵表示为与视界面积成正比时,则比例系数总与动态黑洞的视界速度有关 关键词： 广义球对称黑洞 黑洞熵 brick-wall膜模型 WKB近似     

Improved coating method for uniform polymer layer in infrared hollow fiber

An improved coating method was proposed in order to form a uniform polymer layer in the fabrication of cyclic olefin polymer-coated silver (COP/Ag) hollow fiber. A COP solution was flowed in a closed loop, in which the silver-coated tube was used as a part of the loop. Owing to the constant flowing speed of the COP solution and the airtight flowing environment, a COP layer was uniformly formed. The hollow fibers attain high performance and deliver multi-wavelength laser light from the infrared to the visible simultaneously. The method was successfully applied to the fabrication of practical hollow fibers with 2 m length for the near and mid-infrared lasers.     

SiH_4－O_2体系LPCVD SiO_2薄膜的工艺及其应用

本文研究了ＳｉＨ４—Ｏ２体系ＬＰＣＶＤＳｉＯ２的工艺及设备。为了得到厚度均匀性好的薄膜，改进了反应气体的进气方式和装片舟的结构，获得了每炉１００片、直径为１００ｍｍ的硅片的膜厚不均匀性≤士５％的结果。     

单层光学薄膜中薄膜－衬底体系的双重干涉效应及其应用

提出了单层光学薄膜中薄膜与衬底反射光之间的双重干涉效应的理论，实验结果证实了理论分析的正确性。双重干涉效应使薄膜－衬底体系的热致反射调制度高达８０％，这一效应可望有极广泛的应用