Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements

The diffusion barrier properties of PVD Ru and PECVD / PEALD Ru-C films, deposited by RuEtcp₂ precursor and N₂/H₂ plasma, were compared on the basis of bias temperature stress measurements. An MIS test structure was used to distinguish between thermal diffusion induced by annealing and a Cu field drift due to applied electric fields. BTS-CV, TZDB and TDDB measurements revealed that the barrier performance is significantly better for PEALD and PECVD Ru-C films. This improvement is associated with carbon impurities in the Ru films with a concentration in the order of several percent according to ToF-SIMS and ERDA. The TDDB mean time to failure at 250 °C, +5 MV/cm was 7 s for PVD Ru samples, ≈500 s for PECVD Ru-C, ≈800 s for PEALD Ru-C and >3600 s for PVD TaN. Triangular voltage sweep measurements at 300 °C, 0.1 V/s confirmed the presence of Cu ions inside the SiO₂ for degraded dots, in contrast to the Al reference sample and to PVD TaN, which performed best among all the Cu barriers under test. XRD data suggests that PEALD and PECVD Ru-C films are only weakly crystalline.     

On general summability factor theorem of infinite series

A lower triangular matrix with nonzero principal diagonal entries is called a triangle. In this paper we obtain the sufficient conditions for ∑a_nλ_n to be summable ∣A∣_k whenever ∑a_n is summable ∣T∣_k for a triangle T.     

On the denominator values and barycentric weights of rational interpolants

We improve upon the method of Zhu and Zhu [A method for directly finding the denominator values of rational interpolants, J. Comput. Appl. Math. 148 (2002) 341–348] for finding the denominator values of rational interpolants, reducing considerably the number of arithmetical operations required for their computation. In a second stage, we determine the points (if existent) which can be discarded from the rational interpolation problem. Furthermore, when the interpolant has a linear denominator, we obtain a formula for the barycentric weights which is simpler than the one found by Berrut and Mittelmann [Matrices for the direct determination of the barycentric weights of rational interpolation, J. Comput. Appl. Math. 78 (1997) 355–370]. Subsequently, we give a necessary and sufficient condition for the rational interpolant to have a pole.     

三角模糊数互补判断矩阵的一种排序方法

给出三角模糊数互补判断矩阵的概念及三角模糊数相互比较的可能度公式 ,提出一种基于可能度的三角模糊数互补判断矩阵排序方法 ,通过算例说明该方法的可行性和有效性。     

On the adjacencies of triangular meshes based on skeleton-regular partitions

For any 2D triangulation τ, the 1-skeleton mesh of τ is the wireframe mesh defined by the edges of τ, while that for any 3D triangulation τ, the 1-skeleton and the 2-skeleton meshes, respectively, correspond to the wireframe mesh formed by the edges of τ and the “surface” mesh defined by the triangular faces of τ. A skeleton-regular partition of a triangle or a tetrahedra, is a partition that globally applied over each element of a conforming mesh (where the intersection of adjacent elements is a vertex or a common face, or a common edge) produce both a refined conforming mesh and refined and conforming skeleton meshes. Such a partition divides all the edges (and all the faces) of an individual element in the same number of edges (faces). We prove that sequences of meshes constructed by applying a skeleton-regular partition over each element of the preceding mesh have an associated set of difference equations which relate the number of elements, faces, edges and vertices of the nth and (n−1)th meshes. By using these constitutive difference equations we prove that asymptotically the average number of adjacencies over these meshes (number of triangles by node and number of tetrahedra by vertex) is constant when n goes to infinity. We relate these results with the non-degeneracy properties of longest-edge based partitions in 2D and include empirical results which support the conjecture that analogous results hold in 3D.     

On the choice of approximations in direct problems of nozzle design

Two problems are considered: the design of a supersonic nozzle with a uniform exit characteristic and the design of a subsonic nozzle part with a plane (straight) sonic line in the minimum cross section. It is shown how the choice of a nozzle profile approximation affects the direct solutions to variational gas dynamics problems. The nozzle profile is described by polynomials or splines (quadratic, cubic, rational). The varied variables are the profile’s expansion coefficients in terms of basis functions or the parameters to be interpolated. It is shown that a priori information on the monotonicity of the desired profile improves the efficiency of the solution.     

Triangular finite elements of HCT type and classC ρ

Let τ be some triangulation of a planar polygonal domain Ω. Given a smooth functionu, we construct piecewise polynomial functionsv∈C ^ρ(Ω) of degreen=3 ρ for ρ odd, andn=3ρ+1 for ρ even on a subtriangulation τ₃ of τ. The latter is obtained by subdividing eachT∈ρ into three triangles, andv/T is a composite triangular finite element, generalizing the classicalC ¹ cubic Hsieh-Clough-Tocher (HCT) triangular scheme. The functionv interpolates the derivatives ofu up to order ρ at the vertices of τ. Polynomial degrees obtained in this way are minimal in the family of interpolation schemes based on finite elements of this type.