光纤白光干涉法与膜厚纳米测量新技术研究

运用薄膜光学干涉原理、光纤技术和干涉光谱分析技术,用光纤反射式干涉光谱仪(Reflectromic Interference Spectroscopy)直接测试宽带入射光在单晶硅表面超薄SiO₂膜层前后界面反射形成的干涉光谱曲线,并用专业软件对被测光谱信号数据处理后,可直接用公式准确计算出SiO₂氧化膜的厚度和光学折射率通过对单晶硅片表面超薄SiO₂氧化膜的实测,并与成熟的椭圆偏振仪测试结果相比,测试误差≤2nm但该方法测试简单、快速,精度高,不需要制定仪器曲线和数表,可对薄膜任意位置的厚度在线测试经过对不同厚度聚苯乙烯薄膜的厚度测试表明,该方法适合0.5～20μm薄膜厚度的精确在线测量,测量误差小于7nm.     

薄膜SOI材料MOSFET的高温泄漏电流

在对体硅MOSFET高温泄漏电流研究的基础上,深入研究了SOI材料MOSFET泄漏电流的组成、解析式及高温模拟结果,并与体硅MOSFET进行了比较,证明薄膜SOI材料MOSFET的高温泄漏电流明显减小,因而在高温领域中有着广阔的应用前景。     

Synthesis and characterization of indium–tin oxide (ITO) nanoparticles

Synthesis and characterization of ITO nanoparticles were investigated in the present study. To synthesize the ITO nanoparticles flame spray pyrolysis was introduced. The average particle diameter increased with an increase in the molar concentration of the precursor. Raising the maximum flame temperature by controlling the gas flow rates also led to an increase in the average diameter of the particles. The crystalline ITO nanoparticles were synthesized, and their average primary particle diameters ranged from 11 to 20 nm. ITO thin films were prepared with a sol consisted of the ITO nanoparticles and a polymer binder. Effect of average particle diameter of the ITO nanoparticles on the transparency and the surface resistance of the ITO thin films were measured. As the average particle diameter increased, the transparency and the surface resistance decreased from 92 to 83% and from 1.0 × 10⁴ to 0.8 × 10⁴Ω/□, respectively.     

Effect of firing atmosphere on air-fireable glass-free electrically conductive thick film

The firing atmosphere (air, oxygen, and argon) was found to affect the electrical and mechanical properties of an air-fireable electrically conductive glass-free silver-based thick film. For the optimum firing temperature of 930°C, air results in the lowest resistivity, but a minor amount of pinholes; oxygen results in the largest thickness, the smoothest surface, and no pinhole; and argon results in the highest resistivity, large pinholes, the smallest thickness, vanishing of macroscopic parts of the film, and the poorest scratch resistance. Argon gives higher resistivity than air or oxygen at essentially all firing temperatures.     

AlN基板与金属化层界面的分析电镜研究

利用各种分析电镜观察了掺杂助烧剂和未掺杂助烧剂的ＡｌＮ陶瓷的微观结构特征，鉴别了ＡｌＮ中的第二相，研究了ＡｌＮ基板上薄膜（Ａｕ－Ｐｔ－Ｔｉ）和厚膜（Ｍｏ－Ｍｎ）金属化界面的结构。     

混合MIC电路的制作质量要素

随着微波技术的发展，混合微波集成越来越受到人们的重视。介绍了制造混合ＭＩＣ电路的制作质量要素，即工艺控制难点所在。文章从厚膜，薄膜，微波印制，微组装以及表面组装五个大的方面进行了阐述。     

Behavior of the surface of a bubbly liquid after detonation wave impact

In safety engineering, one position of interest inside heterogeneous systems of the type liquid–gas is the contact surface between these two phases. Under certain conditions, e.g. shock wave impact, phenomena can take place at this position that can have a significant influence on the explosion behavior of the system. In this work an investigation is presented about the existence of such phenomena on the surface of liquid cyclohexane with or without the existence of oxygen containing bubbles. The observations have been performed during the time before, as well as after, a detonation wave reflection on that surface. High-speed pressure and optical measurements have been applied. Apart from the experimental observations, also a theoretical analysis and discussion is presented in this contribution, which contains the comparison between calculated and experimental values.     

Measurement and modeling on hydrodynamic forces and deformation of an air bubble approaching a solid sphere in liquids

The interaction between bubbles and solid surfaces is central to a broad range of industrial and biological processes. Various experimental techniques have been developed to measure the interactions of bubbles approaching solids in a liquid. A main challenge is to accurately and reliably control the relative motion over a wide range of hydrodynamic conditions and at the same time to determine the interaction forces, bubble–solid separation and bubble deformation. Existing experimental methods are able to focus only on one of the aspects of this problem, mostly for bubbles and particles with characteristic dimensions either below 100 μm or above 1 cm. As a result, either the interfacial deformations are measured directly with the forces being inferred from a model, or the forces are measured directly with the deformations to be deduced from the theory. The recently developed integrated thin film drainage apparatus (ITFDA) filled the gap of intermediate bubble/particle size ranges that are commonly encountered in mineral and oil recovery applications. Equipped with side-view digital cameras along with a bimorph cantilever as force sensor and speaker diaphragm as the driver for bubble to approach a solid sphere, the ITFDA has the capacity to measure simultaneously and independently the forces and interfacial deformations as a bubble approaches a solid sphere in a liquid. Coupled with the thin liquid film drainage modeling, the ITFDA measurement allows the critical role of surface tension, fluid viscosity and bubble approach speed in determining bubble deformation (profile) and hydrodynamic forces to be elucidated. Here we compare the available methods of studying bubble–solid interactions and demonstrate unique features and advantages of the ITFDA for measuring both forces and bubble deformations in systems of Reynolds numbers as high as 10. The consistency and accuracy of such measurement are tested against the well established Stokes–Reynolds–Young–Laplace model. The potential to use the design principles of the ITFDA for fundamental and developmental research is demonstrated.     

Analytical model for thermal resistance due to multiple moving circular contacts on a coated bodyModèle analytique pour la résistance thermique due à des contacts circulaires mobiles multiples à la surface d'un solide revêtu

The heat transfer at the interface of two solids in sliding/rolling contact depends on the constriction phenomenon which occurs at the vicinity of asperities. In order to study this problem, the micro-contacts are represented by multiple moving circular heat sources on the surface of a body. The studied body is constituted of a substrate and a surface coating. The thermal constriction resistance due to those contacts is determined analytically in this paper. The solution is developed by using the integral Fourier transforms, and it is valid regardless of the velocity and the relative contact size values. To cite this article: A. Baïri, C. R. Mecanique 331 (2003).     

冲击高度对自由冲击射流影响的实验研究

采用热线风速仪测量了雷诺数为 ２３ ０００时四种冲击高度下率流自由冲击射流流场，并给出详细的结果．表明壁面的“阻尼”影响主要集中在近壁面０．５Ｄ以内．小冲击高度时径向速度下降得比大冲击高度时明显要快，量值也较小；在ｒ／Ｄ≤１．５处，小冲击高度时紊动能的数值大小和分布趋势与大冲击高度时不同，特别是在喷管出口距冲击板高度Ｚ与喷管直径Ｄ之比Ｚ／Ｄ为８时分布特殊，在其它测点处，紊动能的分布趋势基本一致，只是大冲击高度下的值较大；流动结构在Ｚ／Ｄ为６～８时发生了较大的变化，这种变化与势流核心区有关，在势流核心区的顶端以及下游的一段距离内紊流度都很高．