Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements

The diffusion barrier properties of PVD Ru and PECVD / PEALD Ru-C films, deposited by RuEtcp₂ precursor and N₂/H₂ plasma, were compared on the basis of bias temperature stress measurements. An MIS test structure was used to distinguish between thermal diffusion induced by annealing and a Cu field drift due to applied electric fields. BTS-CV, TZDB and TDDB measurements revealed that the barrier performance is significantly better for PEALD and PECVD Ru-C films. This improvement is associated with carbon impurities in the Ru films with a concentration in the order of several percent according to ToF-SIMS and ERDA. The TDDB mean time to failure at 250 °C, +5 MV/cm was 7 s for PVD Ru samples, ≈500 s for PECVD Ru-C, ≈800 s for PEALD Ru-C and >3600 s for PVD TaN. Triangular voltage sweep measurements at 300 °C, 0.1 V/s confirmed the presence of Cu ions inside the SiO₂ for degraded dots, in contrast to the Al reference sample and to PVD TaN, which performed best among all the Cu barriers under test. XRD data suggests that PEALD and PECVD Ru-C films are only weakly crystalline.     

From defects creation to circuit reliability - A bottom-up approach (invited)

This paper presents a theoretical framework about interface states creation rate from Si-H bonds at the Si/SiO₂ interface. It includes three mains ways of bond breaking. In the first case, the bond can be broken thanks to the bond ground state rising with an electrical field. In the two others cases, incident carriers will play the main role either if there are very energetic or very numerous but less energetic. This concept allows us physically modeling the reliability of MOSFET transistors, and particularly NBTI permanent part, and Channel Hot Carrier (CHC) to Cold Carrier (CCC) damage. Finally, the translation of these physical models into reliability spice models is discussed. These models pave the way to Design-in Reliability (DiR) approach which seeks to provide a quantitative assessment of reliability - CMOS device reliability in this case - at design stage thereby enabling judicious margins to be taken beforehand.     

Two photoluminescent pentanuclear homo- and hetero-metal complexes based on benzotriazole bridge

Two new discrete Btz-bridged pentanuclear metal complexes, [HDMF][NaHg₄(Btz)₆I₄] (1) and [Zn₅(Btz)₆(L)₃(Ac)]?·?0.5MeOH?·?0.5H₂O (2) (Btz?=?deprotonated benzotriazole, L?=?p-aminobenzoate, HDMF?=?protonated DMF, and Ac?=?acetate), were synthesized using three-layered diffusion and natural evaporation methods, respectively. In 1, the pentanuclear anion [NaHg₄(Btz)₆I₄]^? is composed of a tetrahedral arrangement of four four-coordinate Hg(II) ions centered on the six-coordinate Na(I), and thereby forming a rare Btz-bridged hetero-metal complex. Compound 2 is a neutral pentanuclear homo-metal complex, consisting of a tetrahedral arrangement of four five-coordinate Zn(II) ions centered on the fifth six-coordinate Zn(II). The thermal stabilities and solid-state photoluminescence of the two complexes have been investigated.     

Experiment on relationship between the magnetic gradient of low-carbon steel and its stress

In geomagnetic field, a series of tensile experiments on the low-carbon steel sticks were carried out. A special homemade detector was used to measure the magnetic gradient on the material surface. The results showed that the relationship between the magnetic gradient and the stress varied with different conditions of measurement. There was no obvious correlation between the magnetic gradient and the tensile stress if the sample remained on the material test machine. If the sample was taken off from the machine, the measured magnetic gradient was linear with the prior maximum stress. In Nanjing, PR China, a place of 32°N latitude, the slope of the linear relationship was about 67 (uT/m)/MPa. This offered a new method of non-destructive stress testing by measuring the magnetic gradient on the ferromagnetic component surface. The prior maximum applied stress of the sample could be tested by measuring the present surface magnetic gradient. Actually this phenomenon was the metal magnetic memory (MMM). The magnetic gradient near the stress concentration zone of the sample, the necking point, was much larger than other area. Thus, the hidden damage in the ferromagnetic component could be detected early by measuring the magnetic gradient distribution on its surface. In addition, the magnetic memory signal gradually weakened as the sample was taken off and laid aside. Therefore, it was effective for a given period of time to detect the stress or stress concentration based on the MMM testing.     

脉冲镀金在半导体激光器中的应用及工艺优化

为提高半导体激光器芯片的焊接成功率以及器件的性能寿命,采用脉冲电镀技术在半导体激光器芯片 P 面沉积了厚金层,详细研究了镀金液 pH 值和电流通断比对镀金层组织形貌、表面粗糙度、内应力、沉积均匀性以及粘附力的影响规律。结果表明,表面粗糙度随 pH 值的升高或通断比的提高而增大。沉积均匀性随 pH 的增大先降低后升高,而随通断比的增大而变差。pH 较大（＞10．0）或较小（＜8．5）时,镀金层粘附性均不理想。而通断比对镀金层的粘附性影响不大。不同条件下,金膜内应力均为张应力,大小为29～88 MPa。     

METHACRYLOYL DERIVITIZED HYPERBRANCHED POLYESTER. 1. SYNTHESIS,CHARACTERIZATION, AND COPOLYMERIZATION

Three hyperbranched multi-methacrylates (H20-MMA, H30-MMA and H40-MMA) have been synthesized by reacting Boltorn dendritic polyols with methacrylic anhydride and methacryloyl chloride. Their structures were characterized by FT-IR and NMR (¹H and ¹³C) and molecular weights were measured by GPC. These multi-methacrylates (H-MMAs) mixed well with a variety of monomers such as acrylic acid (AA), methacrylic acid (MA), methyl methacrylate (MMA), 2-hydroxy-ethyl methacrylate (HEMA), tri(ethylene glycol) dimethdimethacrylate (TEGDMA), and bisphenol A glycidyl dimethacrylate (BisGMA). The initial studies on thermal polymerization activities of 10% of H-MMAs with AA, MA, and MMA showed that they gave higher polymerization enthalpy than the corresponding homopolymerization. The resulting materials showed one glass transition temperature, indicating a typical single-phase resin. The H-MMAs can effectively copolymerize with AA, MA, and MMA, with essentially no homopolymers produced, as indicated by acetone extraction studies. This indicated that the hyperbranched multi-methacrylates have the potential to be used as crosslinking agents or modifiers with a number of monomers to produce new thermosets.     

Alkyl Rearrangement of Derivatives of 2-Anilino-4,6-dialkoxy-1,3,5-triazines in the Solid- and Liquid-state

Abstract

2-Anilino-4,6-dimethoxy-1,3,5-triazine (13), 2-anilino-4,6-diethoxy-1,3,5-triazine (14), 2-(2′-nitoanilino) 4,6-dimethoxy-1,3,5-triazine (15) undergo alkyl rearrangement in the liquid-state, while 2-(4′-nito-anilino) 4,6-dimethoxy-1,3,5-triazine (16) undergoes methyl rearrangement in the solid-state. The crystal structure and thermal behavior of these compounds are described. 13 crystallizes in monoclinic P2₁/c space group, a = 11.030(4), b = 6.345(4), c = 16.315(4) Å, β = 90.76(3)°. The calculated density for Z = 4 is 1.351 Mg/m³. The number of unique reflections collected is 2092, and the final R = 0.0643 [I > 2σ(I)]. 14 crystallizes in triclinic P-1 space group, a = 7.700(2), b = 9.723(3), c = 10.154(3) Å, α = 78.78(3), β = 70.32(3), γ = 73.67(3)°. The calculated density for Z = 2 is 1.266 Mg/m³. The number of unique reflections collected is 2401, and the final R = 0.0561 [I > 2σ(I)]. 15 crystallizes in monoclinic P21/m space group, a = 11.020(3), b = 6.600(2), c = 8.409(3) Å, β = 99.72(3)°. The calculated density for Z = 2 is 1.527 Mg/m³. The number of unique reflections collected is 1153, and the final R = 0.0502 [I > 2σ(I)]. 16 crystallizes in monoclinic P21/c space group, a = 7.499(3), b = 21.846(5), c = 7.895(3) Å, β = 115.42(3)°. The calculated density for Z = 4 is 1.576 Mg/m³. The number of unique reflections collected is 2036, and the final R = 0.0757 [I > 2σ(I)].     

Thermal stability,morphology and electronic band gap of Zn(NCN)

The thermal behavior of zinc carbodiimide Zn(NCN) was examined in the temperature range between 200 and 1100 °C in Ar atmosphere. The material starts to partially decompose at about 800 °C. Heat treatment at temperatures beyond 800 °C results in the formation of the byproducts nitrogen-containing bamboo-like multiwall carbon-nanotubes of 20–50 nm in diameter due to a partial decomposition of Zn(NCN) into dicyan (CN)₂, zinc and nitrogen gas followed by the polymerization of the former product to paracyanogen (CN)_n. At 1100 °C, the yield of the residual carbodiimide depends on the dwelling time and the initial amount of powder used for pyrolysis. One hour dwelling at 1100 °C yields ∼50% of the Zn(NCN) separated as pure material. Temperature-induced change in the band structure, namely indirect-to-direct band gap transition, is registered when compared the Zn(NCN) at room temperature with the residual material annealed at 1100 °C. The transition from indirect (E_g = 4.32 eV) to direct band gap (E_g = 4.93 eV) is due to the thermal annealing process which results in healing of crystal defects.     

Solvent-Free Conversion of N,N-Dimethylhydrazones to Nitriles Under Microwave Irradiation

A variety of aldehyde N,N-dimethylhydrazones are rapidly converted into the corresponding nitriles using oxone supported on wet Al₂O₃ under microwave irradiation in dry media.