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981.
Veena Misra Xiaoli Xu Brian E. Hornung Richard T. Kuehn Donald S. Miles John R. Hauser Jimmie J. Wortman 《Journal of Electronic Materials》1996,25(3):527-535
In the present study, we have performed electrical characterization of oxides deposited via rapid thermal chemical vapor deposition using SiH4 and N2O. We have investigated the effect of temperature, pressure, and SiH4 to N2O ratio on the electrical and material properties of as-deposited films. We have found that as-deposited oxides deposited at low temperatures, low pressures, and with a low silane to nitrous oxide ratio of ~0.5% give good material and electrical properties. The as-deposited films are stoichiometric in nature and have high deposition rates. As-deposited films had very low Dit values, high breakdown fields, and excellent subthreshold swing. The leakage currents and metal oxide semiconductor field effect transistor current drive, although lower than thermal oxides, were found to be quite acceptable. We have also investigated the thickness dependence of the films and found that as the film thickness is reduced below 50Å, the reliability improves for all oxides including the silicon-rich deposited oxides. 相似文献
982.
C. W. Hill R. W. Gedridge T. J. Groshens G. B. Stringfellow L. P. Sad Wick 《Journal of Electronic Materials》1996,25(9):1434-1438
The low pressure decomposition of tertiarybutylbis(dimethylamino) phosphine, (t-Bu)P(NMe2)2, (TBBDMAP), has been studied on quartz and deposited GaP and InP surfaces. This new phosphorus precursor has been found to
pyrolyze on quartz surfaces at much lower temperatures than the related compounds tertiarybutylphosphine, (t-Bu)PH2, (TBP) and tris(dimethylamino)phosphorus, P(NMe2)3, (TDMAP). In contrast to the results obtained for TDMAP, GaP and InP surfaces decrease the decomposition temperature of TBBDMAP
only slightly. The TBBDMAP reaction products were dimethylamine, methylmethyleneimine, and isobutylene, consistent with previous
pyrolysis studies of TBP and TDMAP. 相似文献
983.
Summary.
We consider a discontinuous Galerkin finite element method
applied in time to a model Volterra equation of the second kind.
A residual-based computable
Galerkin-error estimate is derived
for .
This estimate does not explicitly
contain the time step and therefore the time step
control must be based
on a heuristic criterion, the estimate can then be used to
demonstrate the integrity, or otherwise, of the finite element
solution. After performing some numerical experiments
we conclude that this approach is at least competetive
with classical discretizations since it is
computationally simple to implement,
but has the added advantage of
reliable error feedback.
Received June 25, 1995 相似文献
984.
Glucose, maltose, sucrose, lactose, ethanol and urea concentrations were monitored simultaneously during the cultivation of Escherichia coli and Saccharomyces cerevisiae by means of enzyme field effect transistors (EnFETs) applying glucose dehydrogenase (GDH), maltase (MAL)/GDH, invertase (INV)/GDH, β-galactosidase (β-GAL)/galactosedehydrogenase (GALDH), alcoholdehydrogenase (ADH)/aldehydedehydrogenase (ALDH), and urease. These enzymes were (co)immobilized on the pH sensitive gates of an eight-FET array. The FET array was integrated in a commercial FIA system. 相似文献
985.
IR LASER BACKSCATTERING FROM AN ARBITRARILY SHAPED DIELECTRIC OBJECT WITH ROUGH SURFACE 总被引:2,自引:0,他引:2
吴振森 《电子科学学刊(英文版)》1993,10(4):298-306
The backscattering of light wave from arbitrarily convex dielectric objects withrough surface is investigated and formulas for calculating the backscattering cross-section of bothcoherent and incoherent fields are obtained.In the infrared wave-band,the influence of the ge-ometry,permittivity and statistical characteristics of the rough surface on LRCS is analyzed,byusing rough sphere and ellipsoids as examples. 相似文献
986.
Michael Bildhauer 《manuscripta mathematica》1998,97(3):389-406
H?lder continuity up to the free boundary is proved for minimizing solutions if they meet the supporting surface in an angle
which is bounded away from zero. The problem is localized by proving the continuity of the distance function, a result which
is also true for stationary points.
Received: 14 April 1998 相似文献
987.
988.
989.
Summary. A third-order accurate Godunov-type scheme for the approximate solution of hyperbolic systems of conservation laws is presented.
Its two main ingredients include: 1. A non-oscillatory piecewise-quadratic reconstruction of pointvalues from their given
cell averages; and 2. A central differencing based on staggered evolution of the reconstructed cell averages. This results in a third-order central scheme, an extension along the lines
of the second-order central scheme of Nessyahu and Tadmor \cite{NT}. The scalar scheme is non-oscillatory (and hence – convergent),
in the sense that it does not increase the number of initial extrema (– as does the exact entropy solution operator). Extension to systems is carried out by componentwise application of the scalar framework. In particular, we have the advantage that, unlike upwind schemes, no (approximate) Riemann
solvers, field-by-field characteristic decompositions, etc., are required. Numerical experiments confirm the high-resolution
content of the proposed scheme. Thus, a considerable amount of simplicity and robustness is gained while retaining the expected
third-order resolution.
Received April 10, 1996 / Revised version received January 20, 1997 相似文献
990.